Specifications

Solves the most extreme parametric
measurement challenges
For engineers and scientists working
on current and future semiconduc-
torprocesstechnologies,theE5270B
provides a solution that both meets
their needs and lowers their cost of
test. The wide variety of available
modules and advanced measurement
features provide a complete solution
for parametric measurement and
analysis.BothaVXIplug&play driver
and TIS commands are provided as
programming aids for customers
who choose to use their own soft-
ware instead of software provided
by Agilent.
Unlike solutions that include both
the system controller and measure-
mentresourcescombined,theE5270B
gives you the freedom to manage these
resources separately, thereby avoiding
the expensive problem of the system
controller becoming obsolete years
beforeotherelements.TheE5270B
can be controlled from MS Windows-
based,UNIX-based,orevenLINUX-
based operating system environments.
Becauseyoucanupgradeyoursystem
controller hardware or software with-
out losing the use of your instrument,
your investment is protected against
unforeseeable technology shifts.
Application Specific DC Power Supplies tailored solutions for specific needs
More detailed specifications at www.agilent.com/find/E5270B
152
E5270B
Key features and benefits:
•Ultra low current measurement
without cumbersome external
preamplifiers
•The E5270B HRSMU supplies
1-femtoamp measurement resolution
without the need for cumbersome
external preamplifiers, providing
an extremely efficient solution for
situations not requiring ultra low
current measurement. This innate
capability enables you to meet
the measurement challenges posed
by the vast majority of current
and future devices. The HRSMU
(and redesigned MPSMU) also
provides voltage measurement
resolution down to 0.5 microvolts.
The HRSMU (as well as the rede-
signed MPSMU) also supports new
0.5 V and 5 V measurement ranges,
which improve measurement
accuracy for modern lower-voltage
transistors. Advanced measurement
features include multi-channel
sweep mode with parallel test
capability, linear/binary search,
range management, and force
value self-monitoring.
Mainframe
Characteristics
E5270B 8-Slot Precision Measurement Mainframe
Available slots 8
Ground Unit (GNDU) Sink Capability 4.0 A
Instrument control GPIB
External trigger inputs/outputs 1 BNC trigger in; 1 BNC trigger out; 8 programmable trigger in/out
Module
Selection Guide
E5280B E5281B E5287A E5288A
HPSMU MPSMU HRSMU ASU
Required Slots 2 1 1 N/A
Maximum force voltage ±200 V ±100 V ±100 V ±100 V
Maximum force current ±1 A ±100 mA ±100 mA ±100 mA
Voltage measurement resolution 2 µV 0.5 µV 0.5 µV 0.5 µV
Current measurement resolution 10 fA 10 fA 1 fA 0.1 fA
Perform precision DC parametric measurements
Eight slots for plug-in modules
Code compatible with 4142B
Source Measure Units
E5270B 8-Slot Precision Measurement
Mainframe