Specifications

3.0 Fixturing and Cabling
LF impedance measurement
3.1 Terminal configuration ...................................................................................... 3-1
3.1.1 Two-terminal configuration ..................................................................... 3-2
3.1.2 Three-terminal configuration................................................................... 3-2
3.1.3 Four-terminal configuration .................................................................... 3-4
3.1.4 Five-terminal configuration ..................................................................... 3-5
3.1.5 Four-terminal pair configuration............................................................ 3-6
3.2 Test fixtures ......................................................................................................... 3-7
3.2.1 Agilent-supplied test fixtures .................................................................. 3-7
3.2.2 User-fabricated test fixtures .................................................................... 3-8
3.2.3 User test fixture example ......................................................................... 3-9
3.3 Test cables ............................................................................................................ 3-10
3.3.1 Agilent supplied test cables .................................................................... 3-10
3.3.2 User fabricated test cables ...................................................................... 3-11
3.3.3 Test cable extension ................................................................................. 3-11
3.4 Practical guarding techniques .......................................................................... 3-15
3.4.1 Measurement error due to stray capacitances ...................................... 3-15
3.4.2 Guarding techniques to remove stray capacitances............................. 3-16
RF impedance measurement
3.5 Terminal configuration in RF region ............................................................... 3-16
3.6 RF test fixtures .................................................................................................... 3-17
3.6.1 Agilent-supplied test fixtures .................................................................. 3-18
3.7 Test port extension in RF region ....................................................................... 3-19
4.0 Measurement Error and Compensation
Basic concepts and LF impedance measurement
4.1 Measurement error ............................................................................................. 4-1
4.2 Calibration ........................................................................................................... 4-1
4.3 Compensation ...................................................................................................... 4-3
4.3.1 Offset compensation ................................................................................. 4-3
4.3.2 Open and short compensations .............................................................. 4-4
4.3.3 Open/short/load compensation .............................................................. 4-6
4.3.4 What should be used as the load? .......................................................... 4-7
4.3.5 Application limit for open, short, and load compensations .............. 4-9
4.4 Measurement error caused by contact resistance ......................................... 4-9
4.5 Measurement error induced by cable extension ............................................ 4-11
4.5.1 Error induced by four-terminal pair (4TP) cable extension ............... 4-11
4.5.2 Cable extension without termination ..................................................... 4-13
4.5.3 Cable extension with termination........................................................... 4-13
4.5.4 Error induced by shielded 2T or shielded 4T cable extension ........... 4-13
4.6 Practical compensation examples .................................................................... 4-14
4.6.1 Agilent test fixture (direct attachment type) ........................................ 4-14
4.6.2 Agilent test cables and Agilent test fixture............................................ 4-14
4.6.3 Agilent test cables and user-fabricated test fixture (or scanner)....... 4-14
4.6.4 Non-Agilent test cable and user-fabricated test fixture....................... 4-14
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