Specifications

Measurement settings
Measurement instrument: 4294A
Measurement frequency: 40 Hz to 10 MHz
Measurement parameter: Z - θ
Compensation: Performed short compensation
Bandwidth: 3
Measurement method: Inserted the shorting plate, measure the short condition, and remove
the shorting plate. Repeated this 50 times
Display method: Overlaying traces by using the accumulate mode
Lastly, a method of visually analyzing the accurate measurement range of a test fixture is intro-
duced. This method is only appropriate when all three error-terms (proportional error, open
repeatability, and short repeatability) are known. Table A-1 shows the additional error of the
16034G. The whole equation, with all three terms, can be solved for measurement impedance rather
than additional error, for example when additional error is equal to 0.5 percent. If the obtained
impedance values are plotted with measurement impedance (y-axis) versus frequency (x-axis),
a graph similar to the one shown in Figure A-7 can be obtained. The area inside the plotted
curve shows the range of impedance that can be measured with an additional error better than
0.5 percent. In the same way, other graphs can be drawn with other additional error values to better
visualize the accuracy for a given impedance and frequency range. The operation manuals of recent
test fixtures present such graphs.
Table A-1. Additional error of 16034G
A-6
Type of error Impedance
Proportional error 0.5 × (f/10)
2
[%]
Open repeatability 5 + 500 × (f/10) [nS]
Short repeatability 10 + 13 × (f/10) [mΩ]
Figure A-7. Range of impedance measurable with additional error ≤ 0.5 percent