User manual
Contents
Variable Leak Valve User Manual / 87-400-085-01 (D) 5/36
Contents
1
Instructions for Use 7
Safety Information 9
General 10
Variable Leak Valve Outline 13
Flange Connection 14
Inlet Gas Connection 14
Use 15
To Establish a New Stop Position 16
To Set Stop Position at any Leak Rate 17
Operating at Low Leak Rates 17
Changes in Leak Rate with Variation in Room Temperature 18
Bakeout Procedure 18
To Use as a Roughing Valve 19
Adjustment of Handle Position 20
If Valve Will not Close Leak-Tight 21
Lubrication Instructions 24
Loss of Sensitivity at High Leak Rates 26
Replacement Parts 28
Accessories 30