User manual

1
Instructions for Use
General
10/36 Variable Leak Valve User Manual / 87-400-085-01 (D)
General
The variable leak valve can be added to any vacuum system to
establish an adjustable leak. It offers unprecedented control
sensitivity and stability with leak rates as small as 1 x 10
-10
Torr-litres
per second. Leak rate adjustment is controlled with knurled knobs.
The entire valve, including the drive mechanism, is bakeable to 450°C
in either the open or closed position. Both components of the seal
mechanism (sapphire assembly and gasket assembly) are easily
replaceable.
Figure 1
Variable leak valve