Agilent 4UHV Ion Pump Controller Models 929-9010, 929-9011, 929-9020, 929-9021, 929-9022, 929-9101, 929-9200, 929-9201, 929-9210, 929-9211, 929-9212, 929-9213, 929-9400, 929-9401, 929-9402 Manuale di Istruzioni Bedienungshandbuch Notice de Mode D’Emploi User Manual 87-900-137-01 (A) 03/2011
Warranty Notices © Agilent Technologies, Inc. 2011 No part of this manual may be reproduced in any form or by any means (including electronic storage and retrieval or translation into a foreign language) without prior agreement and written consent from Agilent Technologies, Inc. as governed by United States and international copyright laws. Manual Part Number Publication Number: 87-900-137-01 (A) Edition Edition 03/2011 Printed in ITALY Agilent Technologies Italia S.p.A. Vacuum Products Division Via F.
4UHV Ion Pump Controller 4UHV Ion Pump Controller Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 3/104
UHV Ion Pump Controller 4/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Contents Contents 1 Istruzioni per l’uso 7 Informazioni Generali 8 Immagazzinamento 9 Preparazione per l’installazione 10 Installazione 11 Uso 13 Manutenzione 18 2 Gebrauchsanleitung 19 Allgemeines 20 Lagerung 21 Vor der Installation 22 Installation 23 3 Gebrauch 25 Wartung 30 Mode d’emploi 31 Indications Generales 32 Emmagasinage 33 Preparation pour l’Installation 34 Installation 35 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 5/104
Contents Utilisation 37 Entretien 4 42 Instructions for Use 43 General Information 44 Storage 45 Prior to Installation 46 Installation 47 Usage 49 Maintenance 5 54 Technical Information 55 4UHV Controller Description 57 Specifications 59 Operating Mode 65 Start-Up 67 Serial 73 Display and Menus 91 Orderable Parts 98 6/104 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Agilent 4UHV Ion Pump Controller User Manual 1 Istruzioni per l’uso Informazioni Generali 8 Immagazzinamento 9 Preparazione per l’installazione 10 Installazione 11 Uso 13 Accensione del controller dal pannello frontale (modalità LOCAL) Manutenzione 18 Smaltimento 18 15 Traduzione delle istruzioni originali 7/104
1 Istruzioni per l’uso Informazioni Generali Informazioni Generali Questa apparecchiatura è destinata ad uso professionale. L’utente deve leggere attentamente il presente Manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell’utilizzo dell’apparecchiatura.
1 Istruzioni per l’uso Immagazzinamento Immagazzinamento Per trasportare e immagazzinare il controller occorre osservare le seguenti condizioni ambientali: Temperatura: da -20 °C a +70 °C Umidità relativa: da 0 a 95% (senza condensa) Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 9/104
1 Istruzioni per l’uso Preparazione per l’installazione Preparazione per l’installazione Il controller viene fornito in un imballo protettivo speciale; nel caso in cui si presentassero segni di danni che potrebbero essere stati causati durante il trasporto, contattare l’ufficio vendite locale. Durante l’operazione di disimballo, prestare particolare attenzione a non lasciar cadere il controller e a non sottoporlo ad urti.
Istruzioni per l’uso Installazione 1 Installazione AVVERTENZA! Per la sicurezza dell’operatore il controller 4UHV deve essere alimentato con un cavo di alimentazione a 3 fili dotato di una spina approvata a livello internazionale. Utilizzare questo cavo e spina insieme ad una presa adeguatamente connessa a terra per evitare scosse elettriche e soddisfare i requisiti delle norme CE. Le alte tensione che si sviluppano nel controller possono provocare gravi lesioni o la morte.
1 Istruzioni per l’uso Installazione ATTENZIONE! Il controller 4UHV appartiene alla seconda categoria di installazione (o sovratensione) prevista dalla normativa EN 61010-1. Connettere quindi il dispositivo ad una linea di alimentazione che soddisfi tale categoria. Il controller 4UHV ha dei connettori per gli ingressi/uscite e per la comunicazione seriale che devono essere connessi ai circuiti esterni in modo che nessuna parte sotto tensione sia accessibile.
Istruzioni per l’uso Uso 1 Uso In questo paragrafo vengono riportate le principali procedure operative. Per ulteriori informazioni e per le procedure riguardanti collegamenti o particolari opzioni fare riferimento al paragrafi “UTILIZZO” nell’appendice “Technical Information”. Prima di utilizzare il controller effettuare tutti i collegamenti elettrici e fare riferimento al manuale della pompa collegata.
1 Istruzioni per l’uso Uso NOTA Se si vuole utilizzare un cavo HV senza interlock nel sacchetto accessori è fornito un apposito kit di cavetti per interlock preassemblati. Con questo utilizzo si perde la funzionalità di sicurezza offerta dall’utilizzo dell’interlock. Fare riferimento alla seguente figura per montare correttamente il cavo di interlock fornito nel sacchetto accessori, qualora si voglia rinunciare al cavo di alta tensione dotato di interlock.
Istruzioni per l’uso Uso 1 Nella figura “Collegamenti delle masse” sono riportati i corretti collegamenti delle masse, del cavo HV tra il controller e la pompa e del cavo di interlock. ATTENZIONE! Se si monta il cavo di interlock fornito nel sacchetto accessori fare molta attenzione affinchè nessuna parte cada accidentalmente all’interno del controller.
1 Istruzioni per l’uso Uso (2) (1) (3) (4) (5) (6) Figura 4 Front Panel 4UHV Ion Pump Controller Figura 5 Rear Panel 4UHV Ion Pump Controller Per spegnere i canali HV: Tenere premuto il pulsante HV ON/OFF (2) mentre si preme il pulsante HV-x (3,4,5,6) dove x è il numero del canale che si vuole accendere o spegnere. Per ulteriori dettagli sull’uso del controller e sulla descrizione delle informazioni del display fare riferimento alla sezione “Technical Information”.
Istruzioni per l’uso Uso 1 AVVERTENZA! In condizioni di emergenza per spegnere l’unità e tutti i canali alta tensione disattivare l’interruttore generale (1) posto sul pannello anteriore. Mettendo in off l’interruttore generale si spegnerà l’unita HV.
1 Istruzioni per l’uso Manutenzione Manutenzione Il controller 4UHV non richiede alcun intervento di manutenzione. Qualsiasi tipo di intervento sull’unità deve essere eseguito da personale tecnico autorizzato. In caso di guasto è possibile usufruire del servizio di riparazione Agilent o del "Agilent advanced exchange service", che permette di ottenere un controller rigenerato in sostituzione di quello guasto.
Agilent 4UHV Ion Pump Controller User Manual 2 Gebrauchsanleitung Allgemeines 20 Lagerung 21 Vor der Installation 22 Installation 23 Gebrauch 25 Einschalten des Controllers von der vorderen Schalttafel (LOKAL-Modus) 28 Wartung 30 Entsorgung 30 Übersetzung der Originalanleitungen 19/104
2 Gebrauchsanleitung Allgemeines Allgemeines Dieser Apparat ist für Fachbetriebe bestimmt. Vor Gebrauch sollte der Benutzer dieses Handbuch sowie alle weiteren mitgelieferten Zusatzdokumentationen genau lesen. Bei Nichtbeachtung - auch teilweise - der enthaltenen Hinweise, unsachgemäßem Gebrauch durch ungeschultes Personal, nicht autorisierten Eingriffen und Missachtung der einheimischen, hier zur Geltung kommenden Bestimmungen übernimmt die Firma Agilent keinerlei Haftung.
Gebrauchsanleitung Lagerung 2 Lagerung Bei Transport und Lagerung der Controller müssen folgende Umgebungsbedingungen eingehalten werden: Temperatur: -20 °C bis +70 °C Rel.
2 Gebrauchsanleitung Vor der Installation Vor der Installation Der Controller wird mit einer speziellen Schutzverpackung geliefert. Eventuelle Transportschäden müssen sofort der zuständigen örtlichen Verkaufsstelle gemeldet werden. Das Verpackungsmaterial muss korrekt entsorgt werden. Es ist vollständig recyclebar und entspricht der EG-Richtlinie 85/399 für Umweltschutz.
Gebrauchsanleitung Installation 2 Installation WARNUNG! Zur Sicherheit des Controller-Bedieners muss der 4UHV an ein 3-DrahtSpeisekabel mit einem international anerkannten Stecker angeschlossen sein. Dieses Kabel und dieser Stecker müssen an eine angemessen geerdete Steckdose angeschlossen sein, um Stromschläge zu vermeiden und den Anforderungen der CE-Normen gerecht zu werden. Die Hochspannungen, die im Controller entstehen, können schwere Verletzungen oder den Tod verursachen.
2 Gebrauchsanleitung Installation VORSICHT! Der Controller 4UHV gehört zu der zweiten Einbaukategorie (oder auch Überspannung), die von der Norm EN 61010-1 geregelt ist. Schließen Sie daher das Gerät an eine Stromleitung an, die dieser Kategorie gerecht wird. Der Controller 4UHV hat Anschlüsse für die Ein-/Ausgänge und die Serienkommunikation, die an externe Kreisläufe angeschlossen sein müssen, so dass man zu keinem unter Strom stehenden Teil Zugriff hat.
Gebrauchsanleitung Gebrauch 2 Gebrauch In diesem Kapitel sind die wichtigsten Betriebsvorgänge aufgeführt. Für weitere Hinweise bezüglich Anschluß und Montage des bestellbaren Zubehörs verweisen wir auf das Kapitel "Gebrauch" im Anhang zu "Technical Information". Vor Benutzung des Controllers müssen sämtliche elektrischen Anschlüsse ausgeführt und die Betriebsanleitung der angeschlossenen Pumpe durchlesen werden.
2 Gebrauchsanleitung Gebrauch WARNUNG! Soll ein HV-Kabel ohne Interlock zum Einsatz kommen, befindet sich in dem Zubehörbeutel ein dafür bestimmtes Kabelset für vormontierte Interlock-Teile. Bei diesem Gebrauch geht die Sicherheitsfunktion verloren, die man bei der Interlock-Verwendung hat. Sehen Sie sich folgende Abbildung genau an, um das im Zubehörbeutel mitgelieferte Interlock-Kabel richtig zu montieren, wenn auf das Hochspannungskabel mit Interlock verzichtet werden soll.
Gebrauchsanleitung Gebrauch 2 Auf der Abbildung “Anschlüsse” sind die richtigen Anschlüsse der Erdungen, des HV-Kabels des Controller an die Pumpe und des Interlock-Kabels ersichtlich. VORSICHT! Beim Montieren des im Zubehörbeutel mitgelieferten Interlock-Kabels gehen Sie sehr vorsichtig vor, damit dabei kein Teil in den Controller fällt.
2 Gebrauchsanleitung Gebrauch Einschalten des Controllers von der vorderen Schalttafel (LOKAL-Modus) HINWEIS Um die Hochspannung (HV) einzuschalten, muss der Interlock des HV-Kabels (Kabel-Iinterlock) geschlossen sein (Verbinder eingesteckt). Gehen Sie wie folgt vor, um den Controller mit Strom zu versorgen und die Spannung an den Hochspannungsverbindern (H.V.) freizugeben: Schalten Sie den Controller aus. Schließen Sie das HV-Kabel und den Interlock des H.
Gebrauchsanleitung Gebrauch Abbildung 5 2 Rückenteil 4UHV Ionenpumpen-Controller Um die HV-Leitungen auszuschalten: Halten Sie die Taste HV ON/OFF (2) gedrückt und drücken Sie gleichzeitig die Taste HV-x (3,4,5,6), wobei x die Nummer der Leitung ist, die ein- oder ausgeschaltet werden soll. Weitere Einzelheiten zum Gebrauch des Controllers und zur Beschreibung der Display-Angaben entnehmen Sie bitte dem Abschnitt “ Technical Information ”.
2 Gebrauchsanleitung Wartung Wartung Die 4UHV-Controller sind wartungsfrei. Eventuell erforderliche Eingriffe müssen von dazu befugtem Fachpersonal ausgeführt werden. Bei Störungen kann der Agilent-Reparaturdienst in Anspruch genommen werden oder schließen Sie einen Vertrag für “Agilent Advanced Exchange Service” ab, mit dem ein defekter Controller gegen einen general-überholten ausgetauscht wird. Eine eventuelle Verschrottung muß unter Einhaltung der einschlägigen landesüblichen Vorschriften erfolgen.
Agilent 4UHV Ion Pump Controller User Manual 3 Mode d’emploi Indications Generales 32 Emmagasinage 33 Preparation pour l’Installation 34 Installation 35 Utilisation 37 Allumage du Contrôleur du Panneau Frontal (Modalité LOCAL) 40 Entretien 42 Mise au Rebut 42 Traduction de la mode d’emploi originale 31/104
3 Mode d’emploi Indications Generales Indications Generales Cet appareillage a été conçu en vue d'une utilisation professionnelle. Il est conseillé à l'utilisateur de lire attentivement cette notice d'instructions ainsi que toute autre indication supplémentaire fournie par Agilent, avant l'utilisation de l'appareillage.
Mode d’emploi Emmagasinage 3 Emmagasinage Pour transporter et emmagasiner le contrôleur il faut observer les conditions suivantes d’environnement: température: de -20°C à +70°C humidité relative: 0 - 95 % (non condensante).
3 Mode d’emploi Preparation pour l’Installation Preparation pour l’Installation Le contrôleur est fourni dans un emballage de protection spécial; si l'on constate des dommages pouvant s'être produits pendant le transport, contacter tout de suite le bureau de vente local. Pendant l'opération d'ouverture de l'emballage, veiller tout particulièrement à ne pas laisser tomber le contrôleur et à ne lui faire subir aucun choc.
Mode d’emploi Installation 3 Installation AVERTISSEMENT! Pour la sécurité de l’opérateur, le contrôleur 4UHV doit être alimenté par un câble d’alimentation à 3 fils doté d’une prise mâle approuvée à un niveau international. Brancher le câble avec prise mâle à une prise femelle raccordée à la terre de façon adéquate afin d’éviter tout risque d’électrocution et de pouvoir remplir les conditions de conformité prescrites par les normes CE.
3 Mode d’emploi Installation ATTENTION! Le contrôleur 4UHV appartient à la seconde catégorie d’installation (ou surtension) prévue par la norme EN 61010-1. Il est donc nécessaire de brancher le dispositif à une ligne d’alimentation qui soit adaptée à cette catégorie d’appareils. Le contrôleur 4UHV dispose de connecteurs pour entrées/sorties et pour la communication en série qui doivent être branchés à des circuits externes de façon à ce qu’aucune des parties sous tension ne soitaccessible.
Mode d’emploi Utilisation 3 Utilisation Dans ce paragraphe, on indique les principales procédures opérationnelles. Pour tous autres détails et pour les procédures concernant des connexions ou des éléments en option, se reporter au paragraphe "Usage" de l'appendice "Technical Information". Avant d'utiliser le contrôleur, effectuer toutes les connexions électriques et se reporter à la notice de la pompe connectée.
3 Mode d’emploi Utilisation NOTE Si l’opérateur veut utiliser un câble HV sans interlock, le sachet d’accessoires contient un kit spécial de câbles pour interlocks préassemblés. L’utilisation de ces accessoires provoque la perte des fonctions de sécurité offertes par l’utilisation de l’interlock. Consulter la figure ci-dessous pour monter correctement le câble d’interlock contenu dans le sachet d’accessoires en cas de non utilisation du câble de haute tension équipé d’un interlock.
Mode d’emploi Utilisation 3 Les branchements corrects des masses, du câble HV entre le contrôleur et la pompe, ainsi que du câble d’interlock sont reportés sur la figure “Connexions des masses”. ATTENTION! En cas d’utilisation du câble d’interlock contenu dans le sachet d’accessoires, il faut veiller en particulier à ce qu’aucune pièce ne tombe à l’intérieur du contrôleur.
3 Mode d’emploi Utilisation Allumage du Contrôleur du Panneau Frontal (Modalité LOCAL) NOTE Pour allumer la haute tension (HV), il faut que l’interlock du câble HV (câble interlock) soit fermé (connecteur branché). Procéder comme suit pour alimenter le contrôleur et habiliter la tension au niveau des connecteurs de haute tension (H.V.) : Eteindre le contrôleur. Brancher le câble HV et l’interlock du câble H.V. sur les connecteurs correspondants situés sur le panneau arrière.
Mode d’emploi Utilisation Figure 5 3 Panneau arrière 4UHV sur le contrôleur de pompe Pour éteindre les canaux HV : Maintenir le bouton HV ON/OFF (2) enfoncé tout en appuyant sur le bouton HV-x (3,4,5,6)) ; x correspond au numéro du canal à allumer ou à éteindre. Pour plus de renseignements sur l’usage du contrôleur et sur la description des informations de l’écran, consulter la section “ Technical Information ”.
3 Mode d’emploi Entretien Entretien Le contrôleur 4UHV n’a besoin d’aucun entretien. N’importe quel entretien sur l’unité doit être effectué par un personnel technique autorisé. En cas de panne contacter le Support technique Agilent ou bien s’abonner au Agilent Advanced Exchange Service” où le contrôleur endommagé est remplacé par un contrôleur reconditionné. En cas de mise au rebut du contrôleur, procéder à son élimination conformément aux réglementations nationales en la matière.
Agilent 4UHV Ion Pump Controller User Manual 4 Instructions for Use General Information 44 Storage 33 Prior to Installation 46 Installation 47 Usage 49 Powering On the Controller from the Front Panel (LOCAL Mode) 52 Maintenance 54 Disposal 54 Original Instructions 43/104
4 Instructions for Use General Information General Information This equipment is intended for professional use. Prior to using this equipment the user must carefully read this Instruction Manual in its entirety and any additional information provided by Agilent.
Instructions for Use Storage 4 Storage The following environmental conditions must be met when transporting and storing the controller: Temperature: -20 °C to +70 °C Relative humidity: 0 - 95% (non-condensing) Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 45/104
4 Instructions for Use Prior to Installation Prior to Installation The controller comes in a special protective packaging; if there is any sign of damage that could have been caused during transportation, contact your local sales office immediately. When unpacking the controller, be particularly careful to avoid dropping it or knocking it against anything. The packaging material is totally recyclable and complies with EEC directives 85/399 for the safeguard of the environment.
Instructions for Use Installation 4 Installation WARNING! For the safety of the operator, the 4UHV controller must be powered with a 3wire power cable connected to a plug approved at international level. Use this cable and plug together with an adequately earthed socket so as to prevent electrical shocks and satisfy the requirements of EC norms. The high voltages that develop in the controller can provoke serious injuries or death.
4 Instructions for Use Installation CAUTION! The 4UHV controller belongs to the second installation category (or overvoltage) as provided for in normative EN 61010-1. Therefore the device must be connected to a power supply line satisfying the requirements for this category. The 4UHV controller has connectors for inputs/outputs and for serial communications that must be connected to the external circuits in such a way that no powered part is accessible.
Instructions for Use Usage 4 Usage This section provides you with the major operating procedures. For more information and for the procedures that concern connections or specific options, refer to the section “USAGE” in the “Technical Information” appendix. Before using the controller, perform all electrical connections and refer to the manual of the connected pump.
4 Instructions for Use Usage WARNING! If an HV cable without interlock is to be used, the accessories bag contains a specific kit of preassembled interlock leads. However, with this type of use, the safety capability furnished using the interlock is lost. Refer to the figure below for correct assembly of the interlock cable furnished in the accessories bag in the case in which an HV cable with interlock is not used. Figure 3 NOTE The cable interlock closes on pump ground.
Instructions for Use Usage CAUTION! 4 When using the interlock cable furnished in the accessories bag, make sure that no parts drop accidentally inside the controller.
4 Instructions for Use Usage Powering On the Controller from the Front Panel (LOCAL Mode) NOTE To switch on the High Voltage (HV), the interlock of the HV cable (cable interlock) must be closed (connector inserted). Proceed as follows to power the controller and apply voltage to the high voltage (HV) connectors: Switch off the controller. Connect the HV cable and the interlock of the HV cable in the related connectors on the rear panel.
Instructions for Use Usage Figure 5 4 Rear Panel 4UHV Ion Pump Controller To switch off the HV channels: Hold down the HV ON/OFF (2) button while pressing the HV-x (3,4,5,6) button where x is the number of the channel to be switched on/off. For further details on using the controller and for a description of the information appearing on the display, refer to the section “Technical Information”.
4 Instructions for Use Maintenance Maintenance The 4UHV controller does not require any maintenance. Any form of servicing on the unit must be performed by authorized personnel. If servicing is needed, contact Agilent Technical Support or subscribe to the “Agilent Advanced Exchange Service” where the faulty controller is replaced by a refurbished one. If the controller needs to be scraped, proceed to do so in compliance with the specific national norms.
Agilent 4UHV Ion Pump Controller User Manual 5 Technical Information 4UHV Controller Description 57 Specifications 59 Controller Outline 60 Front Panel Description 61 Keys 61 Rear Panel Description 63 Operating Mode 65 Selecting “Operating Mode” from Front Panel 65 Selecting “Operating Mode” via Serial 66 Start-Up 67 Connection of Input remote 72 Serial73 Connector Examples 74 Window Protocol 74 Error Description 84 Error Code 84 Old Serial Protocol (“Binary Protocol”)87 Original Instructions 55/104
5 Technical Information Display and Menus 91 Displaying Channel-Related Information Commands93 Menu 94 Orderable Parts 98 56/104 74 Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Technical Information 4UHV Controller Description 5 4UHV Controller Description The 4UHV controller is a power supply for ion pumps. It supplies a high voltage on output, selectable as 3kV, 5kV or 7kV, and measures the output current. The controller has the following features: Front panel with keypad and a 4-row display (4x20, 146 x 62 mm) for displaying the operating values (voltage, current, pressure) Remote I/O card with DB37 connector RS232 and RS485 serial communications.
5 Technical Information 4UHV Controller Description One 200 W channel and two 80W channels. One 120 W channel The 4UHV controller can be operated in the modes: LOCAL, SERIAL or REMOTE.
Technical Information Specifications 5 Specifications Table 1 Specifications Component Description Input Voltage 100 - 240 Vac (+/-10%) Input Frequency 50/60 Hz Input Power 600 VA Output HV Voltage +/- 7000 Vdc +/- 5% Output HV Short circuit current 40 mA (for 80W channels) 100 mA (for 200 W channels) Output HV Power max 200 W or 80 W each channel Operating temperature 0 °C to 40 °C Storage temperature -20 °C to +70 °C Fuse 5x20 T6.
5 Technical Information Specifications Output curve (200W) Output curve (80W) 8000 7000 Voltage (V) 6000 5000 4000 3000 2000 1000 0 0 20 40 60 80 100 120 Current (mA) Figure 7 Output voltage vs Output current Controller Outline The outline dimensions for the 4UHV controller are shown in the following figures: Front View 211.40 177.00 164.30 141.
Technical Information Specifications 5 Front Panel Description Figure 9 Front Panel Table 2 Keys Keys Main Power This is the main switch for switching on and off the controller. HV-ON/OFF To switch a high voltage channel on or off, keep the HV-ON/OFF key pressed while you press the HV-x key, where x is the number of the channel you want to switch on or off.
5 Technical Information Specifications Graphic Signals Four black squares are present for each channel indicating, respectively, the 4 states of the channel. The meaning of the 4 indicators is the following: 62/104 1. HV-x Square lit (black)= HV on Square not lit = HV off Square flashing = Error 2. Protect-x Square lit (black)= Protect on Square not lit = Protect off Square flashing = Protect error 3. SP-x Square lit (black)= Set-point activate Square not lit = Set-point not active 4.
Technical Information Specifications 5 Rear Panel Description HV Connectors Interlock connector Fuses Figure 10 Serial Port Remote I/O Rear Panel The following are present on the rear panel: The HV connectors ( 1, 2, 3 or 4 according to model) The interlock connectors associated to each channel The fuses The DB9 connector for RS232 and RS485 serial communication The DB37 connector for Remote I/O signals.
5 Technical Information Specifications Fuse Holder The following figure shows the location of this assembly. Figure 11 Rear Panel Proceed as follows to replace one or both fuses: 64/104 1 Disconnect the mains cable 2 Waiting for 15 second 3 Remove the fuse with a small screwdriver 4 Replace the fuse 5 Use only 5x20 T6.
Technical Information Operating Mode 5 Operating Mode The controller 4UHV for ion pumps can be operated in three different modes: Local Serial Remote. The commands sent to the controller (for example, HVON/OFF, Target voltage etc) can only be given in the mode chosen, while the data (for example, current, pressure, voltage etc…) can be read in all the modes. E.g.
5 Technical Information Operating Mode Selecting “Operating Mode” via Serial Using serial communications via the protocol “WIN protocol” (see chapter: SERIAL – Window Protocol), write the chosen value in window 8: Table 3 66/104 Keys Value Description 0 Serial 1 Remote 2 Local Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Technical Information Start-Up 5 Start-Up This chapter explains how to switch on and off the unit and the high voltage channels. In the following chapters, all the functions of the controller are explained in detail.
5 Technical Information Start-Up Table 4 Component Description Remote I/O Signal Listing Pin 4 +24V +/- 10%, max. current 60mA Pin 5 Reserved Fault A unique fault relay for all channels and for all errors.
Technical Information Start-Up 5 Digital Output Pin 14 CH2 NC Set-point Relay Pin 15 CH2 (Common) Relay Pin 16 CH2 NO Set-point Relay Channel 3 Input Pin 23 CH3 on/off Pin 24 CH3 protect Pin 25 CH3 step Pin 22 Digital Gnd Analog Output Pin 20 Analog 3 Pin 3 Analog Gnd Digital Output Pin 35 CH3 NC Set-point Relay Pin 36 CH3 (Common) Relay Pin 37 CH3 NO Set-point Relay Channel 4 Input Pin 26 CH4 on/off Pin 27 CH4 protect Pin 28 CH4 step Pin 22 Digital Gnd Analog Output Pin 21
5 Technical Information Start-Up Figure 13 Recorder Output Pressure Analog remote vs Pressure 5.0 1.3E-6 kPa 4.0 Analog remote (Volt) 3.0 2.0 1.0 1.3E-12 kPa 0.0 1.0E-12 1.0E-11 1.0E-10 1.0E-09 1.0E-08 1.0E-07 1.0E-06 Pressure (kPa) Figure 14 70/104 Analog remote vs Pressure (kPa) Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A) 1.
Technical Information Start-Up 5 Analog remote vs Pressure 5.0 1.3E-5 mbar Analog remote (Volt) 4.0 3.0 2.0 1.0 1.3E-11 mbar 0.0 1.0E-11 1.0E-10 1.0E-09 1.0E-08 1.0E-07 1.0E-06 1.0E-05 1.
5 Technical Information Start-Up Connection of Input remote In order to activate the inputs remote (CH on/off, Ch protect, CH Step) connect the pins as following: +24V A Controller Figure 16 72/104 Customer device’s Input Agilent 4UHV Ion Pump Controller User Manual / 87-900-137-01 (A)
Technical Information Serial 5 Serial The following figure shows the 4UHV interconnections. Figure 17 4UHV interconnections This is a 9-pin D-type serial input/output connector that allows the 4UHV to be controlled via an RS232 or RS485 connection. Table 5 PIN No.
5 Technical Information Serial Connector Examples PC Figure 18 5 5 2 2 3 3 Controller 4UHV RS–232 Connection Ion controller 1 Ion controller 2 Figure 19 RS–485 Connection Window Protocol Both RS232 and the RS485 interfaces are available on the 9-pin Dtype serial input/output connector. The communications protocol is the same (see the structure below), but only the RS485 handles the address field.
Technical Information Serial 5 The Window Protocol is the same of the Turbo Pump, but the meaning of the Window is different (see the below chapter: Windows Description).
5 Technical Information Serial 76/104 (Command) = 0x30 to read the window, 0x31 to write in the window = an alphanumeric ASCII string with the data to be written in the window. In the case of a read command, this field is not present.
Technical Information Serial 5 Table 6 Data Type Field Length Valid Characters Logic (L) 1 ‘0’ = OFF ‘1’ = ON Numeric (N) 6 ‘-‘, ‘.’, ‘0’ . . . ‘9’ right justified with ‘0’ Alphanumeric (A) 10 From blank to ‘_’ (ASCII) (End of transmission) = 0x03 = XOR of all characters following and including the terminator. The value is hexadecimal coded and represented by two ASCII characters.
5 Technical Information Serial The controller can reply with the following types of response: Table 7 Type Length Logic Value Description - After a read instruction of a logic window. Numeric 6 bytes - After a read instruction of a numeric window. Alphanumeric 10 bytes - After a read instruction of a alphanumeric window. ACK 1 byte (0x6) Execution of the command has been successful. NACK 1 byte (0x15) Execution of the command has failed.
Technical Information Serial WIN R/W Type Description 5 Range 1= RS485 505 R/W N Channel Selection (see below) 600 R/W N Unità di misura 0 = Torr ; Pressione 1=mBar (def) ; 2=Pa 601 R/W A Operating Mode (see below) 602 R/W A Protect (see below) 603 R/W A Fixed/Step (see below) 610 R/W N Device Number CH1 (see below) 612 R/W N Power max CH1 20 W – 80 W 613 R/W N V target CH1 [3000,7000] V step 1000; def=7000 614 R/W N I protect CH1 [1,100] step 1 mA 615 R
5 Technical Information Serial WIN R/W Type Description Range step 1000; def=7000 644 R/W N I protect CH4 [1,100] step 1 mA 645 R/W A Set Point CH4 [X.
5 Technical Information Serial Example: Turn ON Channel 1 PC ´ Controller 02 80 STX ADDR 30 31 31 WINDOW 31 31 03 WR DATA ETX 42 31 30 03 WR DATA ETX 33 CRC Controller ´ PC 02 80 06 03 38 STX ADDR ACK ETX 33 CRC Turn OFF Channel 1 PC ´ Controller 02 80 30 STX ADDR 31 31 WINDOW 42 32 CRC Controller ´ PC 02 80 06 03 38 STX ADDR ACK ETX 35 CRC Read Pressure (win 812) Channel 1 PC ´ Controller 02 80 38 STX ADDR 31 32 WINDOW 30 03 38 RD ETX 3
5 Technical Information Serial Read Voltage (win 810) Channel 1 PC ´Controller 02 80 38 STX ADDR 31 30 WINDOW 30 03 RD ETX 30 30 38 41 CRC Controller ´ PC 02 80 38 31 STX ADDR WINDOW 32 30 33 WR 30 30 30 DATA 03 ETX 38 39 CRC Data=3000 Read Current (win 811) Channel 1 PC ´ Controller 02 80 38 STX ADDR 31 31 WINDOW 30 03 RD ETX 38 42 CRC Controller ´ PC 02 80 38 31 STX ADDR WINDOW 31 30 20 20 20 32 WR 2E 39 45 2D 30 35 DATA 03 ETX 45
5 Technical Information Serial Controller ´ PC 02 80 06 03 38 STX ADDR ACK ETX 35 CRC Protect (Win 602) PC ´ Controller 02 80 36 STX ADDR 30 32 WINDOW 30 03 RD ETX 38 37 CRC Controller ´ PC 02 80 36 30 STX ADDR WINDOW 32 30 30 30 30 30 WR 30 30 30 31 30 30 DATA 03 38 ETX 36 CRC Fixed/Step (603) PC ´ Controller 02 80 36 STX ADDR 30 33 WINDOW 30 03 RD ETX 38 36 CRC Controller ´ PC 02 80 36 30 STX ADDR WINDOW 33 30 30 30 30 30 WR
5 Technical Information Serial Error Description Controller errors can be displayed in two windows: WIN 505 where the user writes the channel whose error is to be viewed WIN 206 where the controller shows the error code of the channel written in window 505. If the value 0 is written in window 505, the errors of all the channels remain displayed in window 206.
5 Technical Information Serial Error code in decimal format Binary Description 32 0000000100000 Interlock cable 64 0000001000000 Overtemp HV 128 0000010000000 Protect 256 0000100000000 Measurement error 512 0001000000000 HV out error 1024 0010000000000 Short circuit 2048 0100000000000 HV disabled Example: Interlock cable Error code: 32 (decimal) ´ 0000000010000 ( binary) ´Interlock cable error Interlock cable + Overtemp HV Error code: 96 (decimal) ´ 0000000110000 ( binary) ´Interloc
5 Technical Information Serial Write 1 02 80 35 30 35 STX ADDR WINDOW 02 80 06 03 STX ADDR ACK ETX 31 30 30 30 WR 38 30 30 31 DATA 03 ETX 38 33 CRC 35 CRC Error code (Win 206) Interlock error: 02 80 32 30 36 STX ADDR 02 80 32 STX ADDR WINDOW WINDOW 30 36 30 03 RD ETX 30 30 38 37 CRC 30 30 WR 30 33 32 DATA 03 ETX 38 36 CRC Channel selection (Win 505) Write 2 02 80 35 STX ADDR WINDOW 30 35 02 80 06 03 STX ADDR ACK ETX 31 30 30
Technical Information Serial 5 Old Serial Protocol (“Binary Protocol”) The “Binary Protocol” serial protocol used by some old controllers is no longer supported. For new projects, Agilent advises that the new protocol “Window protocol” be used. Nevertheless, for compatibility with the old systems, some commands of the “Binary Dual” have been implemented. The 4UHV controller cannot implement all the commands of the Dual but only a subset.
5 Technical Information Serial The commands have a read and a write mode. By specifying the type of read operation being performed, the Host queries the Splitter Box that, in turn, replies in a format that is compliant with the command sent. As long as a write operation can be carried out, the write and read formats for the same command coincide.
Technical Information Serial 5 Table 13 No. Description ASCII Hex 1 Local/remote Z0 5Ah 30h 3 HV-ON/OFF A0 41h 30h 4 Device number F0 46h 30h 5 Measurement unit D0 44h 30h 7 Protect C0 43h 30h 8 Fixed/Step B0 42h 30h 9 Power supply polarity G0 47h 30h 10 Max. power J0 4Ah 30h 11 Vmax H0 48h 30h 12 Iprotect K0 4Bh 30h 13 Set point P0 50h 30h 14 V meas. S0 53h 30h 15 I meas. T0 54h 30h 16 P meas.
5 Technical Information Serial Table 14 90/104 Interlock Status Coding Bit Field Interlock Coding (active if 1) 01h HV3 Cable Interlock 02h Reserved 04h Reserved 08h HV1 Cable Interlock 10h HV4 Cable Interlock 20h Reserved 40h Reserved 80h HV2 Cable Interlock Value Error Status Coding (active if 1) 33h Cable Interlock 36h Excess temperature 37h Power input error 38h FAN Error 39h Protect 31h 30h Short-circuit 31h 31h HV out error 31h 32h Zero Measurement Agilent 4UHV
Technical Information Display and Menus 5 Display and Menus Switching on the unit, the initial screen that appears is as follows: V A R I A N V A C U U M . T E C H N O L O G I E S Figure 20 Afterwards a screen of the following type appears, which displays for each channel the name of the ion pump selected.
Technical Information Display and Menus 5 Table 15 1 7 5 - 5 - 4 0 D i o d e 5 Display the pump type for each channel 7 Display the pressure for each channel 9 Display the voltage and operation mode “Step Mode” – “Fixed mode” for each channel X X X X X X X X 2 3 5 7 5 5 - 4 5 - 4 0 S t a r C e l l X X X X X X X X 6 Press “V/I/P” 1 X . X E - X X m b a r 2 X . X E - X X m b a r 3 X . X E - X X Y Y Y Y 4 X .
Technical Information Display and Menus 5 Information on a Single Channel You can display all the information (voltage, current, pressure and pump type) for each single pump. To do this, press the HV-x key, where x corresponds to the channel to display: 7 5 3 - 4 0 S t a r C e l l - 5 5 X . X E - X X m B a r X . X E - X X A + 7 0 0 0 V S t e p Figure 22 In this case, the pump type, pressure, current and voltage of channel 3 are being displayed.
5 Technical Information Display and Menus Changing the Output Voltage To change the output voltage choosing between 7KV, 5KV, 3KV, StepMode and Fixed-Mode, keep the Fixed Step key pressed while you press the HV-x key, where x is the number of the channel for which you want to change the output voltage. The output voltage changes cyclically between “STEP 7 KV, 5 KV, 3 KV”. Menu Keeping the “Mode” key pressed for a long time (> 2 sec), you enter the Menu.
Technical Information Display and Menus 5 Power max: Set the maximum power. Scrolling Through the Menus The 4UHV controller menu has a three-level structure. To scroll through the menus, remaining on the same level, press the keys “ ◄ “ “ ►”. To go to submenu, press “Enter” in the transition menus. To escape to go back, press “Esc” at any time. In multiple-choice menus, the symbol “ ■ “ appears next to the value currently in use and the value currently used will flash.
5 Technical Information Display and Menus Menu Screens Examples of all the screens that appear in the Menu are provided below.
5 Technical Information Display and Menus First Level Second Level C O N F I G S e t p o i G E N E R A L n t P O I N T A C H x S E T P O I N T B ▲ I G A n a ■ ► G E N E R A L ■ S E T C O N F C O N F Third Level - I G U R E l G E N E R A L o g t X X E - X X .
5 Technical Information Orderable Parts Orderable Parts Part Description Controllers 929-9010 929-9011 929-9020 929-9021 929-9100 929-9101 929-9200 929-9201 929-9400 929-9401 929-9210 929-9211 929-9022 929-9402 929-9212 929-9213 4UHV with 1 channel 200W Negative 4UHV with 1 channel 200W Positive 4UHV with 2 channels 200W Negative 4UHV with 2 channels 200W Positive 4UHV with 1 channel 120W Negative 4UHV with 1 channel 120W Positive 4UHV with 2 channels 80W Negative 4UHV with 2 channels 80W Positive 4UH
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