Installation manual

108 5975 Series MSD Operation Manual
4 Operating in Chemical Ionization (CI) Mode
The Open and Closed states are shown in the monitors as 1 and 0 respectively.
Table 17 Flow control module state diagram
Result Gas A flow Gas B flow Purge
with Gas A
Purge
with Gas B
Pump out
flow module
Standby,
vented, or EI
mode
Gas A Open Closed Open Closed Closed Closed
Gas B Closed Open Closed Open Closed Closed
MFC On
 setpoint On  setpoint On  100% On  100% On  100% Off 0%
Shutoff valve Open Open Open Open Open Closed