Installation manual

10 5975 Series MSD Operation Manual
1 Introduction
5975 MSD Version
5975 Series MSDs are equipped with a diffusion pump or one of two
turbomolecular (turbo) pumps. The serial number label displays a product
number (Table 1) that indicates what kind of MSD you have.
Table 1 Available high vacuum pumps
Model name Product number Description Ionization modes
5975C TAD VL MSD G3170A Diffusion Pump MSD Electron impact (EI)
5975C TAD inert
MSD
5975C TAD inert XL
MSD
G3171A
G3172A
Standard Turbo MSD
Performance Turbo MSD
Electron impact (EI)
Electron impact (EI)
5975C TAD inert XL
MSD
G3174A CI High Mass Performance
Turbo Pump
Electron impact (EI)
Negative chemical ionization (NCI)
Positive chemical ionization (PCI)
7820 MSD VL G3175A Diffusion Pump MSD Electron impact (EI)
7820 MSD G3176A Standard Turbo MSD Electron impact (EI)