Specifications

6 5975 Series MSD Troubleshooting and Maintenance Manual
Diffusion pump system 178
Turbo pump system 178
Analyzer Chamber 179
Diffusion pump version 179
Turbo pump version 179
Side Plate 180
Vacuum Seals 182
Foreline Gauge 184
Diffusion Pump and Fan 185
Turbo Pump and Fan 191
Calibration Valves and Vent Valve 192
Micro-Ion Vacuum Gauge 195
7 Analyzer
Overview 198
EI Ion Source 200
CI Ion Source 202
Filaments 204
Other Source Elements 206
Quadrupole Mass Filter 208
Detector 211
Analyzer Heaters and Radiators 213
8 Electronics
Local Control Panel and Power Switch 217
Side Board 218
Electronics Module 219