Specifications
Parts 9
5975 Series MSD Troubleshooting and Maintenance Manual 265
CI Parts
Tables 32 through 34 and Figures 63 and 64 show parts that may be required
to maintain the 5975 Series MSD with CI. The parts in this section are related
directly to the CI accessory; other parts for the MSD can be found in the
previous sections of this chapter.
Table 32 CI flow control module (Figure 63)
Item Description Part number
CI flow control module
*
1 CI calibration valve assembly G1999-60452
PFDTD calibrant 8500-8510
2 Calibration sample vial G3170-80002
Sample vial O-ring, 1/4-inch Viton 5180-4182
Solenoid valve and cable G1999-60452
CI cable from SC to CI Flow Module G3170-60808
Cable, CI to CI Bulkhead G3170-60807
CI Flow control PCA G3170-60005
3 Mass flow controller 0101-1006
4 Shutoff valve G1999-80402
Mass flow controller cable G1999-60464
5 Reagent gas select valve (Gas A and Gas B) G1999-80401
VCR gasket, 1/4-inch 0100-1436
VCR gasket, 1/8-inch 0100-0468
Methane/Isobutane gas purifier G1999-80410
Stainless steel tubing, 1/8-inch id, 20 feet 7157-0210
Swagelok ferrule, front, 1/8-inch, 20/package 5180-4110
Swagelok ferrule, rear, 1/8-inch, 20/package 5180-4116