Specifications

260 5975 Series MSD Troubleshooting and Maintenance Manual
9 Parts
Consumables and Maintenance Supplies
This section (Tables 28 through 31) lists parts available for cleaning and
maintaining your MSD.
Table 28 EI maintenance supplies
Description Part number
Abrasive paper, 30 µm 5061-5896
Alumina powder, 1 kg 8660-0791
Cloths, clean (qty 300) 05980-60051
Cloths, cleaning (qty 300) 9310-4828
Cotton swabs (qty 100) 5080-5400
Diffusion pump fluid (2 required) 6040-0809
Foreline pump oil, P3, 0.5 L 6040-0621
Gloves, clean – Large 8650-0030
Gloves, clean – Small 8650-0029
Grease, Apiezon L, high vacuum 6040-0289