Specifications

250 5975 Series MSD Troubleshooting and Maintenance Manual
9 Parts
Analyzer
Table 21 and Figure 60 show the analyzer chamber and associated parts.
Table 21 Analyzer chamber and related parts (Figure 60)
Item Description Part number
1 Shield/plate for ion gauge port G3170-00003
Micro-Ion Vacuum Gauge Baffle G3170-00015
• M3X12 TX T10 PN SQ Cone SS (qty 2) 0515-0664
2 EI Calibration valve assembly
Turbo pump MSDs
Diffusion pump MSDs
G3170-60204
G3170-60201
3 Calibration vial G3170-80002
4 End plate front glass G3170-20552
4 End plate front acrylic G3170-20022
5 End plate front frame G3170-00001
End plate rear cap G3170-20553
Shield/plate for ion gauge port G3170-00003
Side plate (includes feedthrough and thumbscrews) G3170-60021
6 Vent valve knob G3170-20554