Specifications

248 5975 Series MSD Troubleshooting and Maintenance Manual
9 Parts
KF25 O-ring assembly (for turbo pump outlet) 0100-1551
4 Micro-Ion Vacuum Gauge vacuum gauging electronics G3170-80001
2 Performance turbomolecular pump G3170-89062
2 Standard turbomolecular pump G3170-89061
Turbo pump seal with shield 0905-1613
3 Turbo power supply only G3170-60600
Turbo separate power supply-control wiring harness G3170-60835
5 Analyzer chamber (manifold) G3170-20560
Manifold EMC gasket G3170-80031
Table 20 Turbo pump MSD vacuum system components (Figure 59) (continued)
Item Description Part number