Specifications
Parts 9
5975 Series MSD Troubleshooting and Maintenance Manual 247
Turbo pump and related parts
Figure 58 Diffusion pump and related parts
1
2
3
Table 20 Turbo pump MSD vacuum system components (Figure 59)
Item Description Part number
Claw clamps for baffle adapter, standard turbo G3170-60590
Clamp for vacuum gauging 0100-1397
1 Fan (for high vacuum pump) G1099-60564
KF25 clamp (for turbo pump outlet) 0100-0549