Specifications

246 5975 Series MSD Troubleshooting and Maintenance Manual
9 Parts
Diffusion pump packaging cap G3170-40540
2 Fan (for high vacuum pump) 3160-1037
3 Foreline gauge assembly G1099-60545
Foreline gauge seal 0905-1463
KF10/16 clamp (diffusion pump outlet) 0100-1397
KF10/16 seal (diffusion pump outlet) 0905-1463
KF50 clamp 0100-1395
KF50 seal (foreline pump to baffle adapter) 0100-1884
Side plate (includes feedthroughs and thumbscrews) G1099-60021
Analyzer chamber G3170-20549
Table 19 Diffusion pump MSD vacuum system components (Figure 58) (continued)
Item Description Part number