Specifications

Parts 9
5975 Series MSD Troubleshooting and Maintenance Manual 245
Diffusion pump and related parts
Figure 57 Dry foreline pump and related parts
Foreline hose assembly
Dry pump
Hose clamp
Table 19 Diffusion pump MSD vacuum system components (Figure 58)
Item Description Part number
Claw clamps for baffle adapter G3170-60590
1 Diffusion pump
120V G1099-80500
220/240V G1099-80501
Diffusion pump baffle adapter G1099-20021
Diffusion pump baffle adapter O-ring 0905-1443
Diffusion pump control cable G3170-60437