Specifications

240 5975 Series MSD Troubleshooting and Maintenance Manual
9 Parts
Vacuum System
This section lists replacement parts available for the vacuum system. It
includes clamps, O-rings and seals (Table 16), standard foreline pump and
related components (Table 17 and Figure 56), dry foreline pump and related
components (Table 18 and Figure 57), diffusion pump and related components
(Table 19 and Figure 58), and turbo pump vacuum system components
(Table 20 and Figure 59).
O-rings and seals
Table 16 O-rings and seals
Description Part number
Calibration valve O-ring (1/4-inch) 5180-4182
End plate O-ring (for front and rear end plates) 0905-1441
GC/MSD interface O-ring 0905-1405
HED feedthrough G1099-80012
HED feedthrough O-ring 0905-0490
KF10/16 seal (foreline pump inlet and diffusion pump
outlet), Micro-Ion vacuum gauge
0905-1463
KF50 seal (diffusion pump inlet) 0100-1884
KF25 O-ring assembly (turbo pump outlet) 0100-1551
KF elbow adapter for standard turbo pump outlet G2589-20041
O-ring for standard turbo pump inlet or diffusion pump
baffle adapter
0905-1443
Seal, performance turbo pump inlet 0100-1879
Side plate O-ring 0905-1442
Vent valve O-ring (1/4-inch) 5180-4182