Specifications
Vacuum System 6
5975 Series MSD Troubleshooting and Maintenance Manual 173
Vacuum System Components
The parts of the vacuum system are identified in Figure 34.
• Foreline (rough) pump
• High vacuum pump (diffusion or turbo pump)
• Analyzer chamber
• Side plate (analyzer door), and front and rear end plates
• Vacuum seals
• Calibration valve(s) and vent valve
• Vacuum control electronics
• Vacuum gauges and gauge control electronics
Each of these is discussed in more detail in this chapter.
Figure 34 Example vacuum system components (MSD with turbo pump shown)
Hose to foreline pump
High vacuum pump
High vacuum pump
Analyzer chamber
GC/MSD interface
Micro-Ion vacuum gauge (if present)
CI flow control
Vent valve
cooling fan