Specifications

171
Agilent 5975 Series MSD
Troubleshooting and Maintenance Manual
Agilent Technologies
6
Vacuum System
Overview 172
Vacuum System Components 173
Common Vacuum System Problems 174
Foreline Pump 175
High Vacuum Pump 178
Analyzer Chamber 179
Side Plate 180
Vacuum Seals 182
Face seals 182
KF (NW) seals 182
Compression seals 183
High voltage feedthrough seal 183
Foreline Gauge 184
Diffusion Pump and Fan 185
Turbo Pump and Fan 191
Calibration Valves and Vent Valve 192
Micro-Ion Vacuum Gauge 195
This chapter describes components of the MSD vacuum system.