Specifications

General Maintenance 4
5975 Series MSD Troubleshooting and Maintenance Manual 129
To Remove the Foreline Gauge
Materials needed
Screwdriver, flat-blade, large (8730-0002)
Procedure
1 Vent the MSD.
2 Separate the MSD from the GC. See page 103.
3 Unplug the foreline gauge cable from the foreline gauge.
4 Disconnect the foreline gauge assembly from the diffusion pump outlet.
5 Loosen the hose clamp.
6 Pull the foreline gauge assembly out of the foreline hose.
WARNING
The foreline pump and diffusion pump may still be hot.
CAUTION
Be sure the MSD is vented to atmosphere before breaking the seal at the foreline
gauge. Never vent the MSD at the pump end; use the vent valve.