Specifications

122 5975 Series MSD Troubleshooting and Maintenance Manual
4 General Maintenance
To Remove the Diffusion Pump
Materials needed
• Aluminum foil, clean
• Gloves, oil-resistant
Procedure
1 Vent the MSD.
2 Separate the MSD from the GC. See “To Separate the MSD from the GC” on
page 103.
3 Disconnect the foreline gauge assembly from the diffusion pump outlet.
The foreline gauge cable can be disconnected or can remain connected to
the foreline gauge.
4 Disconnect the diffusion pump temperature sensor wires from the wiring
harness.
5 Disconnect high vacuum power (HIVAC POWER) cable from the back panel
of the MSD. (This is the thick black cable that emerges near the bottom of
the pump.)
6 Support the diffusion pump with one hand.
WARNING
The diffusion pump fluid may contain traces of toxic chemicals.