Specifications

10 5975 Series MSD Troubleshooting and Maintenance Manual
1 Introduction
5975 Series MSD Version
5975 Series MSDs are equipped with a diffusion pump or one of two
turbomolecular (turbo) pumps. The serial number label displays a product
number (Table 1) that indicates what kind of MSD you have.
Table 1 Available high vacuum pumps
Model name Product number Description Ionization modes
5975C TAD VL MSD G3170A Diffusion Pump MSD Electron impact (EI)
5975C TAD inert MSD
5975C TAD inert XL MSD
G3171A
G3172A
Standard Turbo MSD
Performance Turbo MSD
Electron impact (EI)
Electron impact (EI)
5975C TAD inert XL EI/CI
MSD
G3174A CI Performance Turbo Pump Electron impact (EI)
Negative chemical ionization (NCI)
Positive chemical ionization (PCI)
7820 VL MSD G3175A Diffusion Pump MSD Electron impact (EI)
7820 MSD G3176A Standard Turbo MSD Electron impact (EI)