Installation manual
© Agilent Technologies 2001–2003 Agilent 3070 System Installation Manual (MS Windows Version) 1-38
Chapter 1: MS Windows System Installation Procedure: Verifying the Vacuum Subsystem
Figure 1-15 Internal vacuum solenoids in a four-module testhead
E9946A Vacuum components shown above the dotted line
Vacuum components below the dotted line are customer
supplied
Vacuum
Source
Pressure Gage
Port3
In
0ut
+
_
+
_
+
_
+
_
+
_
1
2
3
4
5
6
7
8
9
10
11
12
Remote
Shutdown
Jumper
+
_
+
_
+
_
+
_
+
_
1
2
3
4
5
6
7
8
9
10
11
12
Relay 2
Relay 1
Relay 3
Relay 4
Relay 5
80-PSI Regulator
03066-67911
Air Lines
Port2
Port1
Port0
Vacuum Valve
E3770-67900
E9900-63200
4-Module Manifold
System Card
2-inch Vacuum Hose
Manual Cut-off Valve