User`s guide

Agilent 4155C/4156C User’s Guide Vol.2, Edition 6 4-53
Quasi-static C-V Measurements
Considering Measurement Accuracy
Figure 4-25 Calculation Example of Measurement Accuracy: MPSMU, HPSMU
Conditions:
Measurement Range: 10 nA
Output Range: 20 V
Integration Time: 2, 1, 0.5, 0.2, 0.1, 0.05, 0.03 s corresponding to the lines from top
to bottom
Equivalent Parallel Resistance of DUT: 10 T ohm
Guard Capacitance of Measurement Path: 200 pF
0
2
4
6
8
10
12
14
16
18
20
0.001 0.01 0.1 1 10
QSCV Measurement Voltage (V)
R
e
a
d
i
n
g
A
c
c
u
r
a
c
y
(
%
)
1.E-14
1.E-13
1.E-12
1.E-11
1.E-10
1.E-09
0.001 0.01 0.1 1 10
QSCV Measurement Voltage (V)
O
f
f
s
e
t
A
c
c
u
r
a
c
y
(
F
)