User`s guide

Agilent 4155C/4156C User’s Guide Vol.2, Edition 6 4-41
Quasi-static C-V Measurements
Considering Measurement Accuracy
Figure 4-13 Calculation Example of Measurement Accuracy: HRSMU
Conditions:
Measurement Range: 1 nA
Output Range: 100 V
Integration Time: 2, 1, 0.5, 0.3, 0.1, 0.05, 0.03 s corresponding to the lines from top
to bottom
Equivalent Parallel Resistance of DUT: 1 G ohm
Guard Capacitance of Measurement Path: 200 pF
0
2
4
6
8
10
0.01 0.1 1 10
QSCV Measurement Voltage (V)
R
e
a
d
i
n
g
A
c
c
u
r
a
c
y
(
%
)
1E-11
1E-10
0.01 0.1 1 10
QSCV Measurement Voltage (V)
O
f
f
s
e
t
A
c
c
u
r
a
c
y
(
F
)