User`s guide

4-32 Agilent 4155C/4156C User’s Guide Vol.2, Edition 6
Quasi-static C-V Measurements
Considering Measurement Accuracy
Table 4-3 Conditions for Calculating Measurement Accuracy
Calculation example data shown in Figures 4-5 through 4-26 is applied to the
measurement data when the QSCV integration time is set to the same value as the
LEAK integration time.
Conditions Measurement Unit
Measurement
Range
Output
Range
Equivalent
Parallel
Resistance
of DUT
Guard
Capacitance of
Measurement
Path
HRSMU
MPSMU/
HPSMU
10 pA /
100 pA
2 V 10 T ohm 200 pF Figure 4-5
20 V 10 T ohm 200 pF Figure 4-6
20 V 10 T ohm 1 nF Figure 4-7
20 V 100 G ohm 200 pF Figure 4-8
1 nA 2 V 10 T ohm 200 pF Figure 4-9 Figure 4-17
20 V 10 T ohm 200 pF Figure 4-10 Figure 4-18
20 V 10 T ohm 1 nF Figure 4-19
20 V 10 G ohm 200 pF Figure 4-11 Figure 4-20
40 V 1 G ohm 200 pF Figure 4-12 Figure 4-21
100 V 1 G ohm 200 pF Figure 4-13 Figure 4-22
200 V 1 G ohm 200 pF Figure 4-23
10 nA 2 V 10 T ohm 200 pF Figure 4-14 Figure 4-24
20 V 10 T ohm 200 pF Figure 4-25
20 V 10 G ohm 200 pF Figure 4-15
20 V 1 G ohm 200 pF Figure 4-16 Figure 4-26