User`s guide

Agilent 4155C/4156C User’s Guide Vol.2, Edition 6 4-31
Quasi-static C-V Measurements
Considering Measurement Accuracy
Table 4-2 Constant Value for calculating the Measurement Accuracy: MPSMU/HPSMU
Current
Measurement
Range
Constant
Voltage Output Range (200 V is only for HPSMU)
2 V 20 V 40 V 100 V 200 V
1 nA Ap 0.521 0.52 0.52 0.53 0.54
Bp 0.00398 0.027 0.047 0.12 0.23
Cp 0.000798 0.0072 0.0088 0.022 0.045
Dp 0.00238 0.011 0.015 0.036 0.072
Ao 0.041
Bo 7.2E-15
Boc 6.0E-18
Co 4.3E-14
Coc 5.1E-18
Do 4.2E-15
Doc 6.0E-18
10 nA Ap 0.52 0.52 0.52 0.53 0.54
Bp 0.004 0.027 0.047 0.12 0.23
Cp 0.0008 0.0072 0.0088 0.022 0.045
Dp 0.0024 0.011 0.015 0.036 0.072
Ao 0.041
Bo 6.2E-15
Boc 6.0E-18
Co 7.4E-14
Coc 5.1E-18
Do 3.2E-15
Doc 6.0E-18