User`s guide

Agilent 4155C/4156C User’s Guide Vol.2, Edition 6 4-29
Quasi-static C-V Measurements
Considering Measurement Accuracy
Table 4-1 Constant Value for calculating the Measurement Accuracy: HRSMU
Current
Measurement
Range
Constant
Voltage Output Range
2 V 20 V 40 V 100 V
10 pA / 100 pA Ap 4.0 4.0 4.0 4.0
Bp 0.0025 0.018 0.035 0.088
Cp 0.0023 0.0052 0.008 0.019
Dp 0.0009 0.002 0.003 0.0076
Ao 0.07
Bo 3.7E-15
Boc 2.6E-18
Co 3.1E-15
Coc 6.6E-18
Do 7.2E-16
Doc 2.6E-18
1 nA Ap 0.51 0.51 0.52 0.52
Bp 0.0057 0.024 0.047 0.11
Cp 0.003 0.0048 0.0088 0.018
Dp 0.0041 0.008 0.015 0.027
Ao 0.041
Bo 7.0E-15
Boc 8.7E-18
Co 3.0E-14
Coc 6.0E-18
Do 4.0E-15
Doc 8.7E-18