User`s guide

4-28 Agilent 4155C/4156C User’s Guide Vol.2, Edition 6
Quasi-static C-V Measurements
Considering Measurement Accuracy
Considering Measurement Accuracy
NOTE The measurement accuracy is not the specifications but the reference data.
The capacitance measurement accuracy can be calculated by the following formula:
Measurement Accuracy = A (%) + B (F)
A : Reading accuracy. % accuracy of the measured value.
B : Offset accuracy.
where,
Tinteg: Integration time for the capacitance measurement, in seconds
Tleak: Integration time for the leakage current measurement, in seconds
Vstep: QSCV measurement voltage, in V
Rdut: Equivalent parallel resistance of DUT, in Ω
Cg: Guard capacitance of the measurement path, in F
Ax, Bx, Cx, and Dx values are the constant. For the values, see Table 4-1 for the high
resolution SMU (HRSMU), and Table 4-2 for the medium power/high power SMU
(MPSMU and HPSMU).
Calculation examples of the measurement accuracy are shown in Figures 4-5
through 4-26. Conditions of the calculation are shown in Table 4-3.
AAp
Bp Cp Tinteg Dp
Tinteg
Tleak
-----------------
×+×+
Vstep
---------------------------------------------------------------------------------+=
B
Ao
Rdut
------------
Bo Boc+ Cg Co( Coc Cg×+ )+× Tinteg Do Doc Cg)×+(
Tinteg
Tleak
-----------------
×+×
Vstep
----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------+=