User`s guide

Agilent 4155C/4156C User’s Guide Vol.2, Edition 6 4-27
Quasi-static C-V Measurements
Maximum Measurement Value
Figure 4-3 Maximum Measurement Value Using 1 nA range: HRSMU/MPSMU/HPSMU
Figure 4-4 Maximum Measurement Value Using 10 nA range: HRSMU/MPSMU/HPSMU
2 s
1 s
500 ms
300 ms
100 ms
50 ms
30 ms
1.00E-12
1.00E-11
1.00E-10
1.00E-09
1.00E-08
1.00E-07
1.00E-06
1.00E-05
0.001 0.01 0.1 1 10
QSCV Measurement Voltage (V)
C
a
p
a
c
i
t
a
n
c
e
(
F
)
Integration
Time
2 s
1 s
500 ms
300 ms
100 ms
50 ms
30 ms
Integration
Time
1.00E-11
1.00E-10
1.00E-09
1.00E-08
1.00E-07
1.00E-06
1.00E-05
1.00E-04
0.001 0.01 0.1 1 10
QSCV Measurement Voltage (V)
C
a
p
a
c
i
t
a
n
c
e
(
F
)