User`s guide

4-26 Agilent 4155C/4156C User’s Guide Vol.2, Edition 6

Quasi-static C-V Measurements

Maximum Measurement Value

NOTE The maximum measurement value is not the specifications but the reference data.

The maximum measurement value depends on the settings of the current

measurement range, the QSCV measurement voltage, and the integration time. See

Figures 4-2 to 4-4. Each figure shows the characteristics of the capacitance value vs.

the QSCV measurement voltage by the integration time setting. Each line in the

graph specifies the maximum measurement value for each integration time setting.

The graph data is applied to the measurement when the QSCV integration time is set

to the same value as the LEAK integration time.

Figure 4-2 Maximum Measurement Value Using 10 pA and 100 pA range: HRSMU

Integration

Time

2 s

1 s

500 ms

300 ms

1.00E-15

1.00E-14

1.00E-13

1.00E-12

1.00E-11

1.00E-10

1.00E-09

1.00E-08

1.00E-07

0.001 0.01 0.1 1 10

QSCV Measurement Voltage (V)

(

)