Agilent 4155C Semiconductor Parameter Analyzer Agilent 4156C Precision Semiconductor Parameter Analyzer User’s Guide: Measurement and Analysis Agilent Technologies
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In This Manual This manual provides information for measurement and analysis functions of Agilent 4155C/4156C, and consists of the following chapters: • Sweep Measurements Describes how to perform sweep measurements. • Knob Sweep Measurements Describes how to perform knob sweep measurements. • Sampling Measurements Describes how to perform sampling measurements. • Quasi-static C-V Measurements Describes how to perform quasi-static C-V measurements.
Contents 1. Sweep Measurements Measurement Functions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3 Basic Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4 Subordinate Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7 Synchronous Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Contents Normal Sweep and Knob Sweep Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4 Features of Knob Sweep Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-5 KNOB SWEEP screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-8 Analysis of the Knob Sweep Measurement Results . . . . . . . . . . . . . . . . . . . . . . . . . .2-9 Executing Measurements . . . . . . . . . . . . . . . . .
Contents Step 1. Prepare for the measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-36 Step 2. Mount your DUT on the test fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-36 Step 3. Define the channel assignments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-37 Step 4. Set up the measurement parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-38 Step 5. Set up the results display . . . . . . . . .
Contents Maximum Measurement Value . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-26 Considering Measurement Accuracy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-28 5. Stress Force Stress Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-3 Stress Output Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Contents To Zoom the Display Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19 To Center Display at Cursor Location . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-20 To Draw Line through Two Specified Points . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-20 To Draw Line through Specified Point with Specified Gradient . . . . . . . . . . . . . . . .
Contents Power Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-27 Measurement Ranging Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-29 Auto Ranging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-30 Limited Auto Ranging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Contents Measurement Sequence. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-54 8. Support Functions User Function and User Variable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Output or Measurement Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . User Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Contents To Control Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-37 To Use Matrix Setup File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-41 Trigger Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-42 Trigger Input. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Contents @L1CO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-16 @L1G . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-16 @L1G1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-17 @L1G2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Contents Agilent 4155C/4156C User’s Guide Vol.
1 Sweep Measurements
Sweep Measurements This chapter consists of the following sections which describes how to execute a sweep measurement: • “Measurement Functions” • “Defining Measurement Conditions” • “Making a Measurement” For details about the measurement setup screens, see Setup Screen Reference manual. 1-2 Agilent 4155C/4156C User’s Guide Vol.
Sweep Measurements Measurement Functions Measurement Functions For sweep measurements, the sweep source channels perform staircase sweep output of voltage or current, while the monitor channels measure voltage or current for each sweep step. The 4155C/4156C provides three types of sweep measurement: • “Basic Sweep Measurement” One sweep source (VAR1) is used. • “Subordinate Sweep Measurement” A primary (VAR1) and secondary sweep source (VAR2) are used.
Sweep Measurements Measurement Functions Basic Sweep Measurement Basic sweep measurement uses one sweep source (VAR1). The following sweep types are available: • • LIN/LOG • Linear staircase • Logarithmic staircase SWEEP MODE • Single Source channel sweeps the output from user specified start value to stop value. • Double Source channel sweeps the output from user specified start value to stop value, then from stop value to start value.
Sweep Measurements Measurement Functions Figure 1-1 Basic Sweep Measurement To set up basic sweep measurement, select VAR1 function for desired SMU or VSU on CHANNELS: CHANNEL DEFINITION screen. Parameters Also, specify the following parameters for VAR1 on MEASURE: SWEEP SETUP screen. Parameter Description sweep mode Single or double sweep. linear/log Linear or logarithmic sweep. For logarithmic sweep, select the number steps in one decade as follows: LOG10 10 steps in one decade.
Sweep Measurements Measurement Functions start Start value of sweep. For logarithmic sweep, start must not be zero. Allowable range of start depends on output range of sweep source. For output range of each measurement channel, refer to Chapter 7. stop Stop value of single sweep or turning back value of double sweep. For logarithmic sweep, stop must have same polarity as start, and must not be zero. Allowable range of stop depends on output range of sweep source.
Sweep Measurements Measurement Functions Subordinate Sweep Measurement For subordinate sweep measurement, you set up a secondary sweep source (VAR2) in addition to a primary sweep source (VAR1). After primary sweep is completed, the output of secondary sweep source is incremented or decremented by the specified step value, then the primary sweep source is swept again.
Sweep Measurements Measurement Functions Parameters The parameters for primary sweep source (VAR1) are same as the parameters for sweep source of basic sweep measurement. For secondary sweep source (VAR2), specify the following parameters on MEASURE: SWEEP SETUP screen. NOTE Parameter Description start Start value of secondary sweep. Allowable range of start depends on the output range of secondary sweep source. For the output range of each measurement channel, refer to Chapter 7.
Sweep Measurements Measurement Functions Synchronous Sweep Measurement For synchronous sweep measurement, you set up a synchronous sweep source (VAR1') in addition to a primary sweep source (VAR1). The output of the synchronous sweep source is swept synchronously with the output of the primary sweep source at a constant offset value and ratio.
Sweep Measurements Measurement Functions Parameters The parameters for primary sweep source (VAR1) are same as the parameters for sweep source of basic sweep measurement. For synchronous sweep source (VAR1'), specify the following parameters on MEASURE: SWEEP SETUP screen. Parameter Description offset Offset between outputs of primary and synchronous sweep sources. ratio Ratio between outputs of primary and synchronous sweep sources. compliance Compliance value of synchronous sweep source.
Sweep Measurements Measurement Functions Pulse Sweep Measurement For a sweep measurement, a sweep or constant source SMU can be a pulse source. But only one SMU can be a pulse source. Figure 1-4 shows the relationship between pulse source and other sources. Figure 1-4 Pulse Source and Other Sources For the pulse sweep measurement, the delay time of the primary sweep source is ignored, and each step of the primary sweep source is synchronized with output of the SMU pulse source.
Sweep Measurements Measurement Functions Figure 1-5 SMU Pulse Parameters Specify SMU pulse parameters (MEASURE: SWEEP SETUP): Parameter Description pulse period SMU forces the next pulse after specified pulse period. Allowable range: 5 ms to 1 s. Resolution: 100 μs. pulse width Time from when SMU output starts to change from base value to time when SMU starts to return from peak value. Measurements are made while the peak value is output. Allowable range: 0.5 ms to 100 ms. Resolution: 100 μs.
Sweep Measurements Measurement Functions NOTE Pulse width If the measurement settings do not meet the following conditions, pulse width setting of SMU may be insufficient to make measurement. If so, the pulse width is automatically changed to be appropriate. Number of Meas. Channels: 1 Integration Time: Short Ranging Mode: Fixed Agilent 4155C/4156C User’s Guide Vol.
Sweep Measurements Defining Measurement Conditions Defining Measurement Conditions This section describes the sweep measurement tasks. The basic procedure to test your DUT is as follows: 1 Connecting your DUT to the 4155C/ 4156C. See Chapter 10 for procedures.
Sweep Measurements Defining Measurement Conditions 4 D IS P LA Y : DI S PL AY S E TU P 01 J AN 29 10 :5 8A M G RA PH I CS *D I SP LA Y M OD E G R AP HI C S Setting the display mode to show measurement results. See following in this section: L IS T *G R AP HI C S X ax is Y 1a xi s Y 2a xi s N A ME VD S QI D D SQ ID S C AL E L IN EA R L IN EA R L IN EA R MIN 0. 00 00 0 00 0 0 V 0. 00 0 00 00 00 0 0. 00 0 00 00 0 00 MAX 2. 00 00 0 00 V 10 0. 0 00 00 00 0 m 10 0.
Sweep Measurements Defining Measurement Conditions To Define Measurement Units Press Chan front-panel key to define the measurement units. CHANNELS: CHANNEL DEFINITION screen is displayed. 1. MEASUREMENT MODE: Select SWEEP secondary softkey for sweep measurement. 2. VNAME: Enter a unique name for voltage variable. For example, enter Vce for collector-emitter voltage. If channel does neither V force nor V measurement, you can omit VNAME. 3. INAME: Enter a unique name for current variable.
Sweep Measurements Defining Measurement Conditions 6. DISCHARGE: Select ON secondary softkey to connect the discharge resistor to VMU input, or OFF to disconnect the resistor. The discharge resistor is used to prevent the VMU inputs from charge up in the idle state. When DISCHARGE is ON, the discharge resistor is automatically connected to the VMU input, and disconnected from the input in the measurement state.
Sweep Measurements Defining Measurement Conditions To Set up Primary Sweep Primary sweep source is the measurement unit defined as VAR1 in the CHANNELS: CHANNEL DEFINITION screen. To set up the primary sweep source, press Meas front-panel key. The MEASURE: SWEEP SETUP screen is displayed. 1. VAR1 : SWEEP MODE Select one of the following softkeys to set the sweep mode: • SINGLE : single sweep mode. • DOUBLE : double sweep mode. 2.
Sweep Measurements Defining Measurement Conditions To Set up Secondary Sweep Secondary sweep source is the measurement unit defined as VAR2 in the CHANNELS: CHANNEL DEFINITION screen. On the MEASURE: SWEEP SETUP screen, set up the primary sweep source (VAR1), then do following: 1. VAR2: START Enter the secondary sweep start value. 2. VAR2: STEP Enter the secondary sweep step value. 3. VAR2: NO OF STEP Enter the number of steps for the secondary sweep. 4. VAR2 : COMPLIANCE, POWER COMPLIANCE Only for SMU.
Sweep Measurements Defining Measurement Conditions To Set up Synchronous Sweep Synchronous sweep source is the measurement unit defined as VAR1’ in the CHANNELS: CHANNEL DEFINITION screen. VAR1’ is available for the measurement units set to the output mode same as the VAR1 output mode. The output value of VAR1' is calculated by the following equation: VAR1' = VAR1 × RATIO + OFFSET On the MEASURE: SWEEP SETUP screen, set up the primary sweep source (VAR1), then do following: 1.
Sweep Measurements Defining Measurement Conditions To Set up Constant Output Constant voltage/current source is the measurement unit defined as CONST in the CHANNELS: CHANNEL DEFINITION screen. To set up the constant output source, press Meas front-panel key. The MEASURE: SWEEP SETUP screen is displayed. 1. CONSTANT : SOURCE Enter the desired output value of the constant source. 2. CONSTANT : COMPLIANCE Only for SMU. Enter the compliance value for the constant source.
Sweep Measurements Defining Measurement Conditions To Set up SMU Pulsed Output SMU pulse output source is the measurement unit defined as VPULSE or IPULSE in the CHANNELS: CHANNEL DEFINITION screen. For pulsed sweep source, set the function (FCTN) to VAR1, VAR2, or VAR1’. For pulsed constant source, set the function to CONST. To set up the SMU pulse output source, press Meas front-panel key. The MEASURE: SWEEP SETUP screen is displayed. 1.
Sweep Measurements Defining Measurement Conditions Pulse Parameters The relation between the PERIOD, WIDTH, and BASE values are as shown in the following figures. SMU outputs the pulses as shown in figure (a) or figure (b). • Figure (a) When the function (FCTN) is set to VAR1, VAR2, or VAR1’. The pulse peak values are the sweep output values calculated from the sweep start, stop, step values, and so on. • Figure (b) When the function (FCTN) is set to CONST.
Sweep Measurements Defining Measurement Conditions To Set up PGU Output 1. Define PGU to be VPULSE and CONST as described in “To Define Measurement Units” on page 1-16. 2. Press Meas key in the PAGE CONTROL key group. 3. Select PGU SETUP primary softkey. 4. In the PERIOD field of PGU1, enter the pulse period value. 5. In the WIDTH field of desired PGU column, enter the pulse width value. 6. In the DELAY TIME field of desired PGU column, enter delay time value. 7.
Sweep Measurements Defining Measurement Conditions To modify the UNIT and NAME fields Modify the UNIT and NAME fields on the CHANNELS: CHANNEL DEFINITION screen. Using PGUs as constant voltage source To use a PGU as a constant voltage source, set the desired PGU as follows: • V in MODE column on the CHANNEL DEFINITION screen • Desired output voltage value in SOURCE field on MEASURE: PGU SETUP screen. Agilent 4155C/4156C User’s Guide Vol.
Sweep Measurements Defining Measurement Conditions To Set up Stop Condition 1. Press Meas key in the PAGE CONTROL key group. 2. Move field pointer to SWEEP Status field. 3. Select one of the following softkeys: CONT AT ANY STOP AT ANY ABNORM STOP AT COMPLIANCE Sweep will continue even if an abnormal status occurs. If power compliance is set for an SMU, this softkey is not displayed. Sweep will stop if any abnormal status occurs. Sweep will stop only if SMU reaches its compliance setting.
Sweep Measurements Defining Measurement Conditions To Display Graphics Results 1. Press Display key in the PAGE CONTROL key group. 2. Select DISPLAY SETUP primary softkey. 3. In the DISPLAY MODE field, select GRAPHICS secondary softkey. 4. In the X axis column, enter variable name, select axis scale, and enter minimum and maximum values. 5. In the Y1 axis column, enter variable name, select axis scale, and enter minimum and maximum values. 6.
Sweep Measurements Defining Measurement Conditions To Display List Results 1. Press Display key in the PAGE CONTROL key group. 2. Select DISPLAY SETUP primary softkey. 3. In the DISPLAY MODE field, select LIST secondary softkey. 4. In the LIST area, select the secondary softkey of the variables for which you want to list the measurement results. When the pointer is in the NAME row, the allowable variable names appear in the secondary softkey area.
Sweep Measurements Defining Measurement Conditions To Execute or Stop Measurement • • To execute a measurement, press: • Single • Repeat • Append key in the MEASUREMENT key group for single measurement. key in the MEASUREMENT key group for repeat measurement. key in the MEASUREMENT key group for append measurement. To stop a measurement, press Stop key in the MEASUREMENT key group.
Sweep Measurements Making a Measurement Making a Measurement In this section, you learn how to execute the measurements with an 4155C/4156C and to display the measurement results graphically. Id-Vg measurement of a MOS FET is provided as an example. You learn step-by-step how to perform this measurement. You measure the device under test (DUT) by using the measurement circuit as shown in the following diagram. SMU2 and SMU3 sweep the same voltage to the gate and drain. SMU3 measures the drain current (Id).
Sweep Measurements Making a Measurement Step 1. Prepare for the measurement Before executing measurement, configure the 4155C/4156C and accessories. 1. Make sure that the 4155C/4156C is off. 2. Connect the 16442A/B test fixture to the 4155C/4156C. See figure below. 3. If you use the keyboard, connect it to the 4155C/4156C.
Sweep Measurements Making a Measurement Connection between 4155C and 16442A/B: 16442A/B Triaxial Cables Coaxial Cables Interlock/LED Cable 4155 4155C cable 16442A/B Intlk Interlock/LED a Intlk SMU 1 Triaxial b SMU 2 Triaxial b SMU 3 Triaxial b SMU 4 Triaxial b SMU 1 (blue label) SMU 2 (blue label) SMU 3 (blue label) SMU 4 (blue label) 4155C cable 16442A/B VSU 1 Coaxial c VSU 1 VSU 2 Coaxial c VSU 2 VMU 1 Coaxial c VMU 1 VMU 2 Coaxial c VMU 2 a.
Sweep Measurements Making a Measurement Step 2. Mount your DUT on the test fixture 1. Select a suitable socket module for your DUT. 2. Mount the socket module on the test fixture. 3. Mount your DUT on the socket module. 4. Make connections with four connection cables (miniature banana to pin plug). You make the following connections: • Source to SMU1 • Gate to SMU2 • Drain to SMU3 • Substrate to SMU1 Both the source and substrate terminals are connected to SMU1. 5.
Sweep Measurements Making a Measurement Wiring for the 4156C For this measurement, non-Kelvin connections are used. So, connect only the force terminals as shown in the following figure: Wiring for the 4155C 1-34 Agilent 4155C/4156C User’s Guide Vol.
Sweep Measurements Making a Measurement Step 3. Define the channel assignments You set the connection information on the CHANNELS: CHANNEL DEFINITION screen. 1. Turn on the 4155C/4156C. Self-test starts. 2. After self-test is finished, make sure that CHANNELS: CHANNEL DEFINITION screen appears on the screen of the 4155C/4156C. If not, press Chan front-panel key. where, softkeys located bottom of screen are the primary softkeys, and softkeys located right side of screen are the secondary softkeys. 3.
Sweep Measurements Making a Measurement Figure 1-6 Channel Definition Screen CHANNELS: CHANNEL DEFINITION 01JAN29 10:57AM SWEEP * ME A SU RE MEN T MOD E SW E EP SAMPLING * CH A NN EL S UNIT SMU1:HR SM U 2: HR SM U 3: HR SM U 4: HR SM U 5: HP VSU1 VSU2 VMU1 VMU2 PGU1 PGU2 GNDU VNAME VS VG VD MEASURE INAME IS IG ID STBY MODE COMMON V V FCTN CONST VA R1 ' VA R1 SERIES RESISTANCE 0 ohm QSCV DEFAULT MEASURE SETUP 0 ohm ------------------------------------------- ----- -------- ---- MEM1 M B-Tr VCE-
Sweep Measurements Making a Measurement Step 4. Define the user functions You define the user functions on the CHANNELS: USER FUNCTION DEFINITION screen. 1. Select USER FCTN primary softkey. The CHANNELS: USER FUNCTION DEFINITION screen appears. 2. Enter the user function information as shown in the following table. For the actual screen, see Figure 1-7. on Front Panel on Keyboard To move the pointer, use arrow keys of MARKER/CURSOR area. use arrow keys.
Sweep Measurements Making a Measurement Figure 1-7 User Function Definition Screen CHANNELS: USER FUNCTION DEFINITION 01JAN29 10:53AM * US E R FU NCT IO N NAME UNIT DEFI N IT IO N SQID SQRT(ID) DSQID DIFF(SQID,VG) DELETE ROW SQID Enter User Function Name. (max 6 chars.) CHANNEL DEF US E R FC T N USER VAR S E5250A PROP B PREV PAGE NEXT PAGE Figure 1-7 defines the following two user functions: SQID = √ Id DSQID = ∂SQID / ∂Vg = ∂√ Id / ∂Vg Where, Id is drain current and Vg is gate voltage.
Sweep Measurements Making a Measurement Step 5. Set up the measurement parameters You set the output parameters on the MEASURE: SWEEP SETUP screen. 1. Press Meas front-panel key. The MEASURE: SWEEP SETUP screen appears. In the screen, the upper left area defines the VAR1 information, and the upper right area defines the VAR1’ information. See Figure 1-8. 2. Set the VAR1 information as shown below: on Front Panel on Keyboard To move the pointer, use arrow keys of MARKER/CURSOR area. use arrow keys.
Sweep Measurements Making a Measurement Figure 1-8 Sweep Setup Screen MEASURE: SWEEP SETUP 01JAN29 10:58AM SINGLE * VA RI A BL E UNIT NAME SWEEP MODE LIN/LOG START STOP STEP NO O F S TE P COMPLIANCE PO WE R C OM P VAR1 VAR2 SMU3:HR VD SINGLE LINEAR 0.0000 V 2.0000 V 20.0mV 101 100.00mA OFF VAR1' UNIT SMU2:HR NAME VG OFFSET 0.0000 V RATIO 1.000 COMPLIANCE 100.00mA POWER COMP OFF DOUBLE * TI MI N G HOLD TIME 0.0000 s DELAY TIME 0.
Sweep Measurements Making a Measurement Step 6. Set up the results display You set the results display information on the DISPLAY: DISPLAY SETUP screen. 1. Press Display front-panel key. The DISPLAY: DISPLAY SETUP screen appears. 2. Make sure GRAPHICS is displayed in the DISPLAY MODE field. If not, select GRAPHIC secondary softkey in the DISPLAY MODE field. 3. Set the X-, Y1-, and Y2-axes information as shown below. For the actual setup, see Figure 1-9.
Sweep Measurements Making a Measurement Figure 1-9 Display Setup Screen DISPLAY: DISPLAY SETUP 01JAN29 10:58AM GRAPHICS *D I SP LA Y M OD E G R AP HI CS LIST *G R AP HI CS Xaxis Y1axis Y2axis NAME VD SQID DSQID SCALE LINEAR LINEAR LINEAR MIN 0.000000000 V 0.0000000000 0.0000000000 MAX 2.0000000 V 100.00000000m 100.00000000m *G R ID ON * LI NE PARA M ET ER ON *DATA VARIABLES *DATA DISPLAY RESOLUTION NORMAL GRAPHICS Select Display Mode with softkey or rotary knob.
Sweep Measurements Making a Measurement Step 7. Execute the measurement Press Single front-panel key to execute the measurement. You will get measurement results as shown in the following example: GRAPH/LIST: GRAPHICS SHORT 01JAN29 10:59AM MARKER OFF () () 1 00 .m MARKER MIN/MAX 100.m SQID INTERPOLATE OFF DSQID 1 0. 0m /div 10.0m /div MARKER SKIP AUTO ANALYSIS 0.00 0.00 0. 0 0 VD (V) 20 0 .m / div CURSOR 2.
Sweep Measurements Making a Measurement 1-44 Agilent 4155C/4156C User’s Guide Vol.
2 Knob Sweep Measurements
Knob Sweep Measurements This chapter explains how to execute knob sweep measurements. The knob sweep function is useful in the following cases: • to determine a parameter value for normal sweep • to quickly make a rough measurement of a DUT characteristics 2-2 Agilent 4155C/4156C User’s Guide Vol.
Knob Sweep Measurements Measurement Functions Measurement Functions The knob sweep function allows you to easily perform real-time sweep measurements by rotating the rotary knob on the front panel. This function is useful when you want to quickly make a rough measurement of a DUT characteristic, or when you want to easily define a measurement setup for normal sweep. To start the knob sweep measurement, press the green key and then the Single front-panel key.
Knob Sweep Measurements Measurement Functions Normal Sweep and Knob Sweep Measurements Table 2-2 compares the normal sweep measurement performed by measurement front-panel keys and knob sweep measurement by the front-panel knob.
Knob Sweep Measurements Measurement Functions Features of Knob Sweep Function The following are parameters that are for knob sweep measurement only or that have a different meaning or range from normal sweep measurement. LIN/LOG mode Only linear mode is available. Even if you set LOG on the MEASURE: SWEEP SETUP screen, the knob sweep is a linear sweep measurement. VAR1 Range Sweep range of VAR1 source output.
Knob Sweep Measurements Measurement Functions Step Time Step time is the time width of a sweep step as shown in the following figure. For knob sweep measurements, you cannot set the delay time. Instead, you set the step time, which you can only set on the KNOB SWEEP screen. Setup range is 0.5 ms to 100 ms, with 100 μs resolution. For normal sweep measurement, the step time depends on the measurement time. For knob sweep measurement, step time is always this specified value.
Knob Sweep Measurements Measurement Functions Sweep Step Value For the VAR1 channel, you do not set the step value. You can consider the step value to be the amount you rotate the knob. Then, the sweep is performed for the specified number of steps. The STEP field on the MEASURE: SWEEP SETUP screen has no meaning. Initial value: 0, Step value automatically set: 0 to VAR1 range/number of steps. Number of Steps For the VAR1 channel, you set the number of steps on the KNOB SWEEP screen.
Knob Sweep Measurements Measurement Functions KNOB SWEEP screen To start the knob sweep measurement, press the green key and then the Single front-panel key. The 4155C/4156C displays KNOB SWEEP screen, and starts measurements. To stop the knob sweep measurement, press the Stop front-panel key or a PAGE CONTROL group key. Cursor On the KNOB SWEEP screen, the long cursor is always displayed, and you cannot turn it off. In the CURSOR field, coordinate values of the cursor are displayed in X, Y order.
Knob Sweep Measurements Measurement Functions Analysis of the Knob Sweep Measurement Results On the KNOB SWEEP screen, you cannot use analysis functions and user functions. But you can analyze the knob sweep measurement result by quitting knob sweep mode as shown below: 1. Select the SETUP COPY primary softkey on the KNOB SWEEP screen. 2. Press the Graph/List front-panel key. The knob sweep results are displayed on the GRAPH/LIST screen. Then you can use analysis functions.
Knob Sweep Measurements Executing Measurements Executing Measurements You can easily execute the knob sweep measurements, as shown below: 1. Defines measurement units on the CHANNELS: CHANNEL DEFINITION screen. 2. Presses the green key, and then Single key. NOTE In the knob sweep mode, user functions and user variables are not available. See “To Use User Function” on page 2-9. To use PGU in the pulse output mode (MODE=VPULSE), set up the MEASURE: PGU SETUP screen as same as the normal sweep mode.
Knob Sweep Measurements Executing Measurements To Define Measurement Units Press Chan front-panel key to define the measurement units. CHANNELS: CHANNEL DEFINITION screen is displayed. 1. MEASUREMENT MODE: Select SWEEP secondary softkey. 2. VNAME and INAME: Enter a unique name for voltage or current variable. These names must be 6 or less alphanumeric characters. First character must be alphabet character. For example, enter Vce for collector-emitter voltage.
Knob Sweep Measurements Executing Measurements To Execute Measurements 1. Press the green key, then Single front-panel key. The KNOB SWEEP screen is displayed, and knob sweep measurement starts. During measurements, self-test, or forcing stress, this operation is ignored. If you want to change the Y-axis parameter, press Stop front-panel key and Y-AXIS ASSIGN primary softkey. Then select a secondary softkey for the Y-axis parameter you want.
Knob Sweep Measurements Executing Measurements Example The following figure shows an example to set both X axis and Y axis display regions to positive. To Stop Measurement To stop the knob sweep measurement, press Stop front-panel key. This returns the 4155C/4156C operation state to the previous state. For example, if the knob sweep measurement starts from the idle state, the operation state returns to the idle state.
Knob Sweep Measurements Executing Measurements To Change Measurement Conditions To change the measurement conditions, use the following primary softkeys: Softkey DISPLAY SETUP Description Used to change graph display. The following secondary softkeys are available: X-AXIS REGION Selects the X-axis display range from +, −, or +/-. Y-AXIS REGION Selects the Y-axis display range from +, −, or +/-. X-AXIS DISPLAY Selects the X-axis direction from NORMAL or REVERSE.
Knob Sweep Measurements Executing Measurements Softkey VAR2 SETUP CONST SETUP Description Used to change VAR2 sweep source setup. The following secondary softkeys are available: VAR2 START Sets VAR2 sweep start value. VAR2 STEP Sets VAR2 sweep steps. VAR2 POINTS Sets number of sweep steps. COMPLIANCE Sets VAR2 compliance value. Used to change CONST source setup. Secondary softkeys are available for selecting CONST source. Select a secondary softkey to change the CONST source output value.
Knob Sweep Measurements Executing Measurements 2-16 Agilent 4155C/4156C User’s Guide Vol.
3 Sampling Measurements
Sampling Measurements This chapter explains how to execute sampling measurements, and consists of the following sections: • “Measurement Functions” • “Defining Measurement Conditions” • “Making a Measurement” For details about how to enter or input setup data, refer to Setup Screen Reference manual. 3-2 Agilent 4155C/4156C User’s Guide Vol.
Sampling Measurements Measurement Functions Measurement Functions For a sampling measurement, you can monitor current or voltage changes at a DUT while forcing constant current, constant voltage, or pulsed constant bias.
Sampling Measurements Measurement Functions Sampling Interval and Measurement Time When the sampling interval enough longer than the actual measurement time, measurement unit repeats measurement every specified sampling interval. However, if the sampling interval is less than the measurement time, measurement unit cannot repeat measurements every specified interval.
Sampling Measurements Measurement Functions Figure 3-1 Sampling Measurement Operation Summary Case 1. Sampling Interval > Meas. Time SMU Output PGU Output Meas. Time Time 4 Hold Time 6 Sampling Interval 2 3 Sampling Interval 5 Trigger Trigger Trigger Sampling Interval Trigger Trigger Total Sampling Time (TOTAL SAMP. TIME) (TOTAL SAMP. TIME is one of the stop condition.) 1 Starts Sampling Case 2. Stops Sampling Sampling Interval < 7 Meas. Time SMU Output PGU Output Meas.
Sampling Measurements Measurement Functions Sampling measurement is executed as explained below. 1. At Starts Sampling, source unit starts the constant current output, constant voltage output, or pulsed constant bias output. 2. Waits hold time. 3. Measurement unit (SMU or VMU) starts one point measurement. 4. After the measurement, the result data is stored in memory. 5. Triggers one point measurement. Interval of trigger is same as Sampling Interval. 6.
Sampling Measurements Measurement Functions Sampling Measurement Data Measurement parameters of sampling measurement are set to the NAME column of the DISPLAY: DISPLAY SETUP screen. Available parameters and example parameters for the NAME field are listed in the table below: Parameter Name Meanings of Parameter @TIME Measurement start time. This is the time the measurement unit starts one point measurement. This is different from timing of the measurement trigger sent every sampling interval.
Sampling Measurements Measurement Functions For example, if Thold=10 ms, Tinterval=5 ms, and @TIME values are as shown below, estimated measurement time is 15 ms to 20 ms, and there are 3 triggers between @INDEX=1 and @INDEX=2. • @TIME (for @INDEX=1) = 10 ms = 10 + 5 × [(1 − 1) + 0] ms • @TIME (for @INDEX=2) = 30 ms = 10 + 5 × [(2 − 1) + 3] ms Sampling Interval Hold Time TIME Meas.
Sampling Measurements Measurement Functions Sampling Completion The sampling measurement completes when one of the following conditions is satisfied: • Stop condition The stop condition is satisfied. See below. • Total sampling time The specified total sampling time has elapsed. Available for linear and thinned-out sampling. Setting TOTAL SAMP.TIME to auto or no limit disables this sampling completion condition. • Number of sampling points The specified number of samples has elapsed.
Sampling Measurements Measurement Functions To use this function, the INITIAL INTERVAL value must be set to 2 ms or more. The INITIAL INTERVAL is the minimum resolution of the sampling interval. For details about the INITIAL INTERVAL, see “Linear Sampling Measurement” on page 3-13, “Thinned-out Sampling Measurement” on page 3-16, or “Logarithmic Sampling Measurement” on page 3-19. To set up the stop condition, specify the following parameters on the MEASURE: SAMPLING SETUP screen.
Sampling Measurements Measurement Functions Source Output Sequence and Time Origin Source unit output sequence and the time origin depends on the setup value of the OUTPUT SEQUENCE MODE OF SAMPLING field in the MEASURE: OUTPUT SEQUENCE screen. The following two modes are available for the field. • SIMULTANEOUS mode All source unit starts output at same timing. This timing is defined as the Time Origin. See figure below.
Sampling Measurements Measurement Functions • SEQUENTIAL mode Source units starts output in the order defined in the OUTPUT SEQUENCE table of the MEASURE: OUTPUT SEQUENCE screen. Time Origin is when the last source reaches the specified output value. See figure below. If there is pulse bias sources (PGUs), they start to force pulse base value in the order shown above, and start to force pulse bias at the Time Origin.
Sampling Measurements Measurement Functions Linear Sampling Measurement Linear sampling mode keeps a constant sampling interval that is the interval of measurement trigger. And if the measurement units are ready to measure, the units start measurement, and the result data is stored in memory. This is repeated until one of the sampling completion conditions is satisfied.
Sampling Measurements Measurement Functions 3. If the sampling completion condition is not satisfied after additional 5 points measurement, linear sampling mode changes the sampling interval to two times the previous interval, and continues sampling measurement. Measurement data is updated as described in step 2. 4. This discarding and doubling of the sampling interval is repeated until the sampling completion condition is satisfied.
Sampling Measurements Measurement Functions HOLD TIME Hold time. This is the time from starting source output to first trigger. If this value is 0, first @TIME value is 0. • Allowable range when INITIAL INTERVAL ≥ 2 ms: 0 to 655.35 s with 100 μs resolution. • Allowable range when INITIAL INTERVAL < 2 ms: − 30 ms to 655.35 s with 100 μs resolution. Table 3-1 Effective Parameter Values INITIAL INTERVAL 60 μs to 480 μs, 20 μs resolution 560 μs to 1.92 ms, 80 μs resolution NO.OF SAMPLES Max.
Sampling Measurements Measurement Functions Thinned-out Sampling Measurement Thinned-out sampling mode operates like the linear sampling mode. Difference is that the sampling interval is not changed in the thinned-out sampling measurement. So even if both the following two conditions occur, thinned-out sampling mode does not change the sampling interval, and continues sampling measurement. • number of sampling points reaches specified NO.
Sampling Measurements Measurement Functions 3. If the sampling completion condition is not satisfied after additional 5 points measurement, thinned-out sampling mode keeps the sampling interval, and continues sampling measurement. Data is updated as described in step 2. 4. This discarding is repeated until the sampling completion condition is satisfied. By the end of the measurement, 10 measurement result data is stored in memory.
Sampling Measurements Measurement Functions Table 3-2 Effective Parameter Values 720 μs to 1.92 ms INITIAL INTERVAL 2 ms to 65.535 s NO.OF SAMPLES Max. 10001/(number of measurement units) TOTAL SAMP.TIME NO LIMIT or INITIAL INTERVAL × (NO.OF SAMPLES −1) s to 1 × 1011 s HOLD TIME − 30 ms to 655.35 s, 100 μs resolution 0 to 655.35 s, 100 μs resolution Stop Condition DISABLE DISABLE/ENABLE Measurement Units a 1b Max.
Sampling Measurements Measurement Functions Logarithmic Sampling Measurement Logarithmic sampling mode plots the measurement data on the X-axis (@TIME) set to the logarithmic scale by doing the following operation. See Figure 3-2. 1. Forces constant current, constant voltage, or pulsed constant bias. 2. Waits hold time. 3. Triggers one point measurement. 4. Measurement unit executes measurement. Measurement result data is stored in memory. 5. Triggers one point measurement.
Sampling Measurements Measurement Functions @TIME Value @TIME value of measurement data is determined by MODE, INITIAL INTERVAL, NO. OF SAMPLES, and HOLD TIME parameters. Where MODE decides number of measurement points in 1 decades. For example, LOG10 mode obtains 10 data per 1 decade. An example to get measurement data in logarithmic sampling measurement is explained below. This example assumes the following settings. See also Figure 3-2.
Sampling Measurements Measurement Functions Rule to determine @TIME: @TIME value is determined by the following rule. Data measured at @TIME=Tlog are stored in memory. Tlog ≥ Ttarget | Tlog − Ttarget | < | Ttarget − Tprev | where, Tlog Data stored in @TIME. Actual measurement point. Ttarget Target value of @TIME. The values can plot data on the logarithmic X-axis in the same interval completely. Tprev Tlog − sampling interval. Actual measurement point.
Sampling Measurements Measurement Functions Parameters To set up the logarithmic sampling measurement, specify the following parameters on MEASURE: SAMPLING SETUP screen. See Table 3-3. Parameter Description MODE Sampling mode. LOG10, LOG25, or LOG50. INITIAL INTERVAL MODE Number of data in 1 decade LOG10 LOG25 LOG50 10 25 50 The sampling interval during logarithmic sampling. Allowable range: 560 μs to 65.535 s.
Sampling Measurements Measurement Functions Table 3-3 Effective Parameter Values 560 μs to 1.92 ms INITIAL INTERVAL 2 ms to 65.535 s NO.OF SAMPLES Maximum 111 (LOG10), 276 (LOG25), 551 (LOG50) HOLD TIME − 30 ms to 655.35 s, 100 μs resolution 0 to 655.35 s, 100 μs resolution Stop Condition DISABLE DISABLE/ENABLE Measurement Units a 1b Max. 8 c Measurement Range d FIX FIX/AUTO/LIMITED Integration Time e Short Short/Medium/Long a Number of units (SMUs or VMUs) used for measurements.
Sampling Measurements Defining Measurement Conditions Defining Measurement Conditions This section covers the tasks for sampling measurements. The basic procedure to test your DUT is as follows: 1 Connecting your DUT to the 4155C/4156C. See Chapter 10 for procedures.
Sampling Measurements Defining Measurement Conditions 4 D IS PL AY : D IS PL AY SE T UP 00 DEC 07 0 2:1 8P M GR AP HIC S * DI SPL AY M ODE Setting the display mode to show measurement results. The following tasks are described: GR APH IC S LI ST * GR APH IC S NA ME X ax is Y 1ax is @ TI ME VG SC ALE L IN EAR Y2a xi s • “To Display Graphics Results” • “To Display List Results” L INE AR MI N 0. 000 00 0 000 s 0.0 00 00 000 0 V MA X 20 0.0 0m s 1.
Sampling Measurements Defining Measurement Conditions To Define Measurement Units 1. Press Chan key in the PAGE CONTROL key group. 2. Select CHANNEL DEF primary softkey. 3. In the MEASUREMENT MODE area, select SAMPLING secondary softkey. 4. In the VNAME column, enter a unique name for voltage variable. For example, enter Vce for collector-emitter voltage. If channel does neither V force nor V measurement, you can omit VNAME. 5. In the INAME column, enter a unique name for current variable.
Sampling Measurements Defining Measurement Conditions To Set up Sampling Parameters 1. Confirm that SAMPLING is set in the MEASUREMENT MODE field on the CHANNELS: CHANNEL DEFINITION screen. If SAMPLING is not set, select SAMPLING secondary softkey in the MEASUREMENT MODE field. 2. Press Meas key in the PAGE CONTROL key group. 3. Select SAMPLING SETUP primary softkey. 4. In the MODE field of SAMPLING PARAMETER, select: • LINEAR secondary softkey for equally spaced sampling intervals.
Sampling Measurements Defining Measurement Conditions The following figure shows the relation between the sampling parameters and sampling measurement. You can set a hold time by entering a number (units: seconds) in the HOLD TIME field. 3-28 Agilent 4155C/4156C User’s Guide Vol.
Sampling Measurements Defining Measurement Conditions To Set up Constant Output 1. Define CONST units as described in “To Define Measurement Units” on page 3-26. 2. Press Meas key in the PAGE CONTROL key group. 3. Select SAMPLNG SETUP primary softkey. 4. In the SOURCE field of the desired unit in the CONSTANT area, enter the desired output value. To modify the UNIT, NAME, and MODE field Modify the UNIT, NAME, and MODE fields on the CHANNELS: CHANNEL DEFINITION screen.
Sampling Measurements Defining Measurement Conditions To Set up PGU Output 1. Define PGU to be VPULSE and CONST as described in “To Define Measurement Units” on page 3-26. 2. Press Meas key in the PAGE CONTROL key group. 3. Select PGU SETUP primary softkey. 4. In the PERIOD field of PGU1, enter the pulse period value. 5. In the WIDTH field of desired PGU column, enter the pulse width value. 6. In the DELAY TIME field of desired PGU column, enter delay time value. 7.
Sampling Measurements Defining Measurement Conditions To modify the UNIT and NAME fields Modify the UNIT and NAME fields on the CHANNELS: CHANNEL DEFINITION screen. Using PGUs as constant voltage source To use a PGU as a constant voltage source, set the desired PGU as follows: • V in MODE column on the CHANNEL DEFINITION screen • Desired output voltage value in SOURCE field on MEASURE: PGU SETUP screen. Agilent 4155C/4156C User’s Guide Vol.
Sampling Measurements Defining Measurement Conditions To Define Stop Conditions The measurement stop condition defines the condition to stop the sampling measurement. The stop condition is one of the sampling completion conditions. 1. Press Meas key in the PAGE CONTROL key group. 2. Select SAMPLNG SETUP primary softkey. 3. In the ENABLE/DISABLE field of the STOP CONDITION area, select ENABLE secondary softkey. 4.
Sampling Measurements Defining Measurement Conditions To Display Graphics Results 1. Press Display key in the PAGE CONTROL key group. 2. Select DISPLAY SETUP primary softkey. 3. In the DISPLAY MODE field, select GRAPHICS secondary softkey. 4. In the X axis column, enter variable name, select axis scale, and enter minimum and maximum values. In the sampling mode, @TIME (time) is entered initially. 5. In the Y1 axis column, enter variable name, select axis scale, and enter minimum and maximum values. 6.
Sampling Measurements Defining Measurement Conditions To Display List Results 1. Press Display key in the PAGE CONTROL key group. 2. Select DISPLAY SETUP primary softkey. 3. In the DISPLAY MODE field, select LIST secondary softkey. 4. In the LIST area, select the secondary softkey of the variables for which you want to list the measurement results. When the pointer is in the NAME row, the allowable variable names appear in the secondary softkey area.
Sampling Measurements Defining Measurement Conditions To Execute or Stop Measurement • • To execute a measurement, press: • Single • Repeat • Append key in the MEASUREMENT key group for single measurement. key in the MEASUREMENT key group for repeat measurement. key in the MEASUREMENT key group for append measurement. To stop a measurement, press Stop key in the MEASUREMENT key group.
Sampling Measurements Making a Measurement Making a Measurement In this section, you learn how to execute the sampling measurements using the 4155C/4156C. As an example, you measure charge voltage of capacitor. Measurement circuit and typical characteristics are shown below: Charge Voltage V SMU2 DUT SMU1 Time NOTE For accurate measurements, allow the 4155C/4156C to warm-up for a minimum of 40 minutes after you turn on the instrument, and then execute calibration.
Sampling Measurements Making a Measurement Step 3. Define the channel assignments You set the connection information on the CHANNELS: CHANNEL DEFINITION screen. 1. If the 4155C/4156C has turned off, turn on the 4155C/4156C. And wait until the self-test is completed. 2. Make sure that CHANNELS: CHANNEL DEFINITION screen appears on the screen of the 4155C/4156C. If not, press Chan front-panel key. 3.
Sampling Measurements Making a Measurement Step 4. Set up the measurement parameters You set the output parameters on the MEASURE: SAMPLING SETUP screen. The following setup is to force 500 nA to 0.1 μF capacitor as an example. 1. Press Meas front-panel key. The MEASURE: SAMPLING SETUP screen appears. 2. Set the SAMPLING PARAMETER table as shown below: MODE THINNED-OUT INITIAL INTERVAL 2.00 ms NO. OF SAMPLES 20 TOTAL SAMP.
Sampling Measurements Making a Measurement 4. Set the CONSTANT table as shown below: UNIT SMU2 : MP NAME IG MODE I SOURCE 500 nA COMPLIANCE 1V This setup is to force a constant current of 500 nA. MEASURE: SAMPLING SETUP 00DEC07 02:18PM LINEAR * S A M P L I N G P A R A M ET E R MODE *STOP CONDITION THINNED-OUT INITIAL INTERVAL NO. OF SAMPLES 2.00ms 20 NAME TOTAL SAMP. TIME NO LIMIT HOLD TIME 0.000000 s FILTER LOG10 ENABLE/DISABLE ENABLE ENABLE DELAY 0.0000000 s VG THRESHOLD 900.
Sampling Measurements Making a Measurement Step 5. Set up the results display You set the results display information on the DISPLAY: DISPLAY SETUP screen. 1. Press Display front-panel key. The DISPLAY: DISPLAY SETUP screen appears. 2. Move the field pointer to the DISPLAY MODE field. Then select GRAPHICS softkey to set the results display mode to the graph mode. 3.
Sampling Measurements Making a Measurement Step 6. Execute the measurement Press Single front-panel key to execute the measurement. The 4155C/4156C starts the thinned-out sampling measurement, and repeats one point measurement until the stop condition is satisfied, then stops the sampling. After the sampling measurement, You will get measurement results as shown in the following example: GRAPH/LIST: GRAPHICS SHORT 00DEC07 04:52PM MARKER MARKER( 196ms @INDEX 921.20mV 20 ) ON (V) MARKER MIN/MAX 1.
Sampling Measurements Making a Measurement If you change the results display to the GRAPH/LIST: LIST screen, you will see the screen as shown below: GRAPH/LIST: LIST SHORT 00DEC07 04:52PM MARKER @TIME = NO. 1/ 0.0000 s to @TIME 1 VG s V 6 160ms 754.96mV 7 164ms 773.46mV 8 168ms 791.98mV 9 172ms 810.44mV 10 176ms 828.90mV 11 178ms 838.18mV 12 180ms 847.42mV 13 182ms 856.66mV 14 184ms 865.88mV 15 186ms 875.12mV 16 188ms 884.30mV 17 190ms 893.50mV 18 192ms 902.
4 Quasi-static C-V Measurements
Quasi-static C-V Measurements This chapter consists of the following sections which explains how to execute quasi-static C-V (QSCV) measurements: • “Measurement Functions” • “Defining Measurement Conditions” • “Making a Measurement” • “Maximum Measurement Value” • “Considering Measurement Accuracy” For details about how to enter or input setup data, refer to Setup Screen Reference manual. 4-2 Agilent 4155C/4156C User’s Guide Vol.
Quasi-static C-V Measurements Measurement Functions Measurement Functions For quasi-static C-V (QSCV) measurements, the sweep source channel performs linear staircase sweep output of voltage, while the monitor channel measures capacitance for each sweep step. Available Units The QSCV measurement uses a voltage sweep source (VAR1), and a voltage constant source. Also, optional constant sources may be used.
Quasi-static C-V Measurements Measurement Functions Operation In the QSCV measurement, the 4155C/4156C executes the capacitance measurement at the sweep steps except for the sweep start voltage and stop voltage. At each sweep step, the capacitance measurement is executed over the voltage range: output voltage ± cvoltage/2 (V). where cvoltage is the capacitance measurement voltage. See Figure 4-1. The operation of the quasi-static CV measurements are explained below. This is the case of start < stop. a.
Quasi-static C-V Measurements Measurement Functions Figure 4-1 VAR1 Output and Measurement Items of QSCV Measurement stop voltage (limit of sweep source output) last step cvoltage= 2 × Vq Trigger delay time 3rd step 0V 0V Measurement items at Nth sweep step 2nd step hold time step voltage 1st step V 0 IL 0 Vq start voltage (source output value when starting sweep output) NOTE V IL cinteg Vq delay time I linteg linteg step voltage delay time If the following conditions are true, ignore
Quasi-static C-V Measurements Measurement Functions Parameters Specify the following parameters for VAR1 and CONST channels on the MEASURE: QSCV SETUP screen. Parameter Description sweep mode Single (start to stop) or double sweep (start to stop to start). start Start voltage of sweep. This is the output voltage at the start of the sweep output. The permissible range of start, stop, and step depends on the output range of the source unit.
Quasi-static C-V Measurements Measurement Functions Specify the following parameters to define the measurement conditions on the MEASURE: QSCV MEASURE SETUP screen. See also Setup Screen Reference for setting these parameters. Parameter Description unit Unit used to measure capacitance range Measurement range. 1 nA or 10 nA for the MPSMU/HPSMU. 10 pA, 100 pA, 1 nA, or 10 nA for the HRSMU. cname Variable name of the capacitance data iname Variable name of the leakage current data.
Quasi-static C-V Measurements Defining Measurement Conditions Defining Measurement Conditions This section describes the QSCV measurement tasks. The overall procedure for testing your DUT is as follows: 1 Connecting your DUT to the 4155C/ 4156C. See Chapter 10 for procedures.
Quasi-static C-V Measurements Defining Measurement Conditions 4 D I S P LA Y : DI S PL A Y SE T U P GR A P H ICS Setting the display mode to show measurement results. *D I S P LA Y M O D E G R A P HI C S LI S T *G R A P HI C S X ax i s NAME V1 S C A L E L IN E A R MIN - 3. 0 0 0 00 0 0 V MAX 3. 0 0 0 00 0 0 V Y1 a x i s C A P01 LI N E A R 3 6 . 0 00 0 0 p F 1 1 0 .
Quasi-static C-V Measurements Defining Measurement Conditions To Define Measurement Units Press the Chan front-panel key to define the measurement units. The CHANNELS: CHANNEL DEFINITION screen appears. 1. MEASUREMENT MODE Select the QSCV secondary softkey for the quasi-static CV (QSCV) measurement. 2. VNAME Enter a unique name for the voltage variable. For example, enter Vg for gate voltage. If the channel does neither V force nor V measurement, you can omit VNAME. 3.
Quasi-static C-V Measurements Defining Measurement Conditions To Set up QSCV Sweep Source The QSCV sweep source is the source unit defined as VAR1 in the CHANNELS: CHANNEL DEFINITION screen. To set up the sweep source, press the Meas front-panel key. The MEASURE: QSCV SETUP screen appears. 1. VAR1: SWEEP MODE Select one of the following softkeys to set the sweep mode: • SINGLE: single sweep mode (start to stop) • DOUBLE: double sweep mode (start to stop to start) 2.
Quasi-static C-V Measurements Defining Measurement Conditions 8. DELAY TIME Enter the delay time. 0 to 65.535 seconds, 100 μs resolution. You cannot change UNIT and NAME in this screen. To change the values, go to the CHANNELS: CHANNEL DEFINITION screen. NOTE In the QSCV measurement, the 4155C/4156C executes the capacitance measurement at the sweep steps except for the sweep start voltage and stop voltage.
Quasi-static C-V Measurements Defining Measurement Conditions To Set up Constant Output Constant source is the source unit defined as CONST in the CHANNELS: CHANNEL DEFINITION screen. To set up the constant output source, press the Meas front-panel key. The MEASURE: QSCV SETUP screen is displayed. 1. CONSTANT: SOURCE Enter the desired output value of the constant source. 2. CONSTANT: COMPLIANCE Only for SMU. Enter the compliance value for the constant source.
Quasi-static C-V Measurements Defining Measurement Conditions To Define Measurement Conditions Press the Meas front-panel key, and select the MEASURE SETUP softkey. The MEASURE: QSCV MEASURE SETUP screen appears. 1. UNIT and FCTN Select one of the secondary softkeys to specify the measurement unit. The FCTN field just displays the function of the unit. 2. RANGE Select one of the secondary softkeys to specify the measurement range. 3. CNAME Enter a unique name for the capacitance measurement data variable.
Quasi-static C-V Measurements Defining Measurement Conditions To Display Graphics Results 1. Press the Display key in the PAGE CONTROL key group. 2. Select the DISPLAY SETUP primary softkey. 3. In the DISPLAY MODE field, select the GRAPHICS secondary softkey. 4. In the X axis column, enter the variable name, select the axis scale, and enter minimum and maximum values. 5. In the Y1 axis column, enter the variable name, select the axis scale, and enter minimum and maximum values. 6.
Quasi-static C-V Measurements Defining Measurement Conditions To Display List Results 1. Press the Display key in the PAGE CONTROL key group. 2. Select the DISPLAY SETUP primary softkey. 3. In the DISPLAY MODE field, select the LIST secondary softkey. 4. In the LIST area, select the secondary softkey of the variables for which you want to list the measurement results. When the pointer is in the NAME row, the permissible variable names appear in the secondary softkey area.
Quasi-static C-V Measurements Defining Measurement Conditions To Execute or Stop Measurement To execute a measurement, press: Single Clears GRAPHICS or LIST screen, then executes measurement one time. Measurement results are displayed on the GRAPHICS or LIST screen. Repeat Executes measurements continuously. Before each measurement is executed, the GRAPHICS or LIST screen is cleared. Most recent measurement results are displayed on the GRAPHICS or LIST screen. Append Executes measurement one time.
Quasi-static C-V Measurements Making a Measurement Making a Measurement In this section, you learn how to execute the QSCV measurements using the 4155C/4156C. As an example, you measure MOS capacitor. Measurement circuit and typical characteristics are shown below: MOS Capacitor Capacitance A SMU1 NOTE SMU2 Voltage For accurate measurements, let the 4155C/4156C warm up for at least 40 minutes after you turn on the instrument, and then execute calibration. For self-calibration, see Chapter 7.
Quasi-static C-V Measurements Making a Measurement Step 3. Define the channel assignments Set the connection information on the CHANNELS: CHANNEL DEFINITION screen. 1. If the 4155C/4156C has been turned off, turn it on and wait until the self-test is completed. 2. Make sure that the CHANNELS: CHANNEL DEFINITION screen appears on the screen of the 4155C/4156C. If not, press the Chan front-panel key. 3.
Quasi-static C-V Measurements Making a Measurement Step 4. Set up the source parameters Set the output parameters on the MEASURE: QSCV SETUP screen. Define the source parameters as shown below: NOTE In the QSCV measurement, the 4155C/4156C executes the capacitance measurement at the sweep steps except for the sweep start voltage and stop voltage. At each sweep step, the capacitance measurement is executed over the voltage range: output voltage ± capacitance measurement voltage/2. 1.
Quasi-static C-V Measurements Making a Measurement 4. Set the TIMING table. The following values are just an example. HOLD TIME 10 s DELAY TIME 100 ms This table sets the hold time and delay time. Hold time: 0 to 655.35 seconds, 10 ms resolution. Delay time: 0 to 65.535 seconds, 100 μs resolution. MEASURE: QSCV SETUP SINGLE *VARIABLE UNIT NAME SWEEP MODE START STOP STEP NO OF STEP COMPLIANCE VAR1 SMU1:HR V1 SINGLE 3.100 V -3.100 V -100.0mV 61 100.00mA *TIMING HOLD TIME DELAY TIME 10.00 s 100.
Quasi-static C-V Measurements Making a Measurement Step 5. Set up the measurement parameters Set the output parameters on the MEASURE: QSCV MEASURE SETUP screen. Define the measurement parameters as shown below: 1. Press the Meas front-panel key, and select the MEASURE SETUP softkey. The MEASURE: QSCV MEASURE SETUP screen appears. 2. Set the MEASUREMENT UNIT table. The following values are just an example.
Quasi-static C-V Measurements Making a Measurement 4. Enable or disable the leakage current compensation function using the LEAK COMPENSATION field. To enable the function, select the ON softkey. To disable the function, select the OFF softkey. 5. Enable or disable the zero offset cancel function using the ZERO CANCEL field. To disable the offset cancel function, select the OFF softkey. The following procedure enables the function. a.
Quasi-static C-V Measurements Making a Measurement Step 6. Set up the results display Set the results display information on the DISPLAY: DISPLAY SETUP screen. 1. Press the Display front-panel key. The DISPLAY: DISPLAY SETUP screen appears. 2. Move the field pointer to the DISPLAY MODE field. Then select the GRAPHICS softkey to set the results display mode to the graph mode. 3. Set the X and Y1 axes information. The following values are just an example.
Quasi-static C-V Measurements Making a Measurement Step 7. Execute the measurement Press the Single front-panel key to execute the measurement. The 4155C/4156C starts the QSCV measurement. After the measurement, the measurement results will be as shown in the following example: GRAPH/LIST: GRAPHICS MARKER MARKER( 2.900 V 108.508pF ) ON (F) 110.p MARKER MIN/MAX C A P01 INTERPOLATE OFF DIRECT MARKER/ CURSOR 10.0p /div MARKER SKIP AUTO ANALYSIS 36.0p -3.00 V1 (V) 500.m /div CURSOR 3.
Quasi-static C-V Measurements Maximum Measurement Value Maximum Measurement Value NOTE The maximum measurement value is not the specifications but the reference data. The maximum measurement value depends on the settings of the current measurement range, the QSCV measurement voltage, and the integration time. See Figures 4-2 to 4-4. Each figure shows the characteristics of the capacitance value vs. the QSCV measurement voltage by the integration time setting.
Quasi-static C-V Measurements Maximum Measurement Value Figure 4-3 Maximum Measurement Value Using 1 nA range: HRSMU/MPSMU/HPSMU 1.00E-05 1.00E-06 Capacitance (F) 1.00E-07 1.00E-08 Integration Time 1.00E-09 2s 1s 500 ms 300 ms 1.00E-10 100 ms 1.00E-11 50 ms 30 ms 1.00E-12 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Maximum Measurement Value Using 10 nA range: HRSMU/MPSMU/HPSMU 1.00E-04 1.00E-05 1.00E-06 Capacitance (F) Figure 4-4 1.00E-07 Integration Time 1.
Quasi-static C-V Measurements Considering Measurement Accuracy Considering Measurement Accuracy NOTE The measurement accuracy is not the specifications but the reference data. The capacitance measurement accuracy can be calculated by the following formula: Measurement Accuracy = A (%) + B (F) A : Reading accuracy. % accuracy of the measured value. B : Offset accuracy.
Quasi-static C-V Measurements Considering Measurement Accuracy Table 4-1 Constant Value for calculating the Measurement Accuracy: HRSMU Current Measurement Range Constant 10 pA / 100 pA 1 nA Voltage Output Range 2V 20 V 40 V 100 V Ap 4.0 4.0 4.0 4.0 Bp 0.0025 0.018 0.035 0.088 Cp 0.0023 0.0052 0.008 0.019 Dp 0.0009 0.002 0.003 0.0076 Ao 0.07 Bo 3.7E-15 Boc 2.6E-18 Co 3.1E-15 Coc 6.6E-18 Do 7.2E-16 Doc 2.6E-18 Ap 0.51 0.51 0.52 0.52 Bp 0.0057 0.024 0.047 0.
Quasi-static C-V Measurements Considering Measurement Accuracy Current Measurement Range Constant 10 nA 4-30 Voltage Output Range 2V 20 V 40 V 100 V Ap 0.51 0.51 0.52 0.52 Bp 0.036 0.024 0.047 0.11 Cp 0.003 0.0048 0.0088 0.018 Dp 0.0041 0.008 0.015 0.027 Ao 0.041 Bo 7.3E-15 Boc 8.7E-18 Co 6.0E-14 Coc 6.0E-18 Do 4.3E-15 Doc 8.7E-18 Agilent 4155C/4156C User’s Guide Vol.
Quasi-static C-V Measurements Considering Measurement Accuracy Table 4-2 Constant Value for calculating the Measurement Accuracy: MPSMU/HPSMU Current Measurement Range Constant 1 nA 10 nA Voltage Output Range (200 V is only for HPSMU) 2V 20 V 40 V 100 V 200 V Ap 0.521 0.52 0.52 0.53 0.54 Bp 0.00398 0.027 0.047 0.12 0.23 Cp 0.000798 0.0072 0.0088 0.022 0.045 Dp 0.00238 0.011 0.015 0.036 0.072 Ao 0.041 Bo 7.2E-15 Boc 6.0E-18 Co 4.3E-14 Coc 5.1E-18 Do 4.
Quasi-static C-V Measurements Considering Measurement Accuracy Table 4-3 Conditions for Calculating Measurement Accuracy Conditions Measurement Unit Measurement Range Output Range Equivalent Parallel Resistance of DUT Guard Capacitance of Measurement Path HRSMU 10 pA / 100 pA 2V 10 T ohm 200 pF Figure 4-5 20 V 10 T ohm 200 pF Figure 4-6 20 V 10 T ohm 1 nF Figure 4-7 20 V 100 G ohm 200 pF Figure 4-8 2V 10 T ohm 200 pF Figure 4-9 Figure 4-17 20 V 10 T ohm 200 pF Figure 4-10 F
Quasi-static C-V Measurements Considering Measurement Accuracy Calculation Example of Measurement Accuracy: HRSMU 14 Reading Accuracy (%) 12 10 8 6 4 2 0 0.001 0.01 0.1 1 QSCV Measurement Voltage (V) 1.E-10 1.E-11 Offset Accuracy (F) Figure 4-5 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 1 QSCV Measurement Voltage (V) Conditions: Measurement Range: 10 pA / 100 pA Output Range: 2 V Integration Time: 2, 1, 0.5, 0.
Quasi-static C-V Measurements Considering Measurement Accuracy Calculation Example of Measurement Accuracy: HRSMU 12 Reading Accuracy (%) 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-11 1.E-12 Offset Accuracy (F) Figure 4-6 1.E-13 1.E-14 1.E-15 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: Measurement Range: 10 pA / 100 pA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Quasi-static C-V Measurements Considering Measurement Accuracy Calculation Example of Measurement Accuracy: HRSMU 12 Reading Accuracy (%) 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1E-11 1E-12 Offset Accuracy (F) Figure 4-7 1E-13 1E-14 1E-15 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: Measurement Range: 10 pA / 100 pA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Quasi-static C-V Measurements Considering Measurement Accuracy Calculation Example of Measurement Accuracy: HRSMU 12 Reading Accuracy (%) 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1E-11 Offset Accuracy (F) Figure 4-8 1E-12 1E-13 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: Measurement Range: 10 pA / 100 pA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.
Quasi-static C-V Measurements Considering Measurement Accuracy Calculation Example of Measurement Accuracy: HRSMU 18 16 Reading Accuracy (%) 14 12 10 8 6 4 2 0 0.001 0.01 0.1 1 QSCV Measurement Voltage (V) 1.E-10 1.E-11 Offset Accuracy (F) Figure 4-9 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 1 QSCV Measurement Voltage (V) Conditions: Measurement Range: 1 nA Output Range: 2 V Integration Time: 2, 1, 0.5, 0.2, 0.1, 0.05, 0.
Quasi-static C-V Measurements Considering Measurement Accuracy Calculation Example of Measurement Accuracy: HRSMU 10 Reading Accuracy (%) 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-10 1.E-11 Offset Accuracy (F) Figure 4-10 1.E-12 1.E-13 1.E-14 1.E-15 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: Measurement Range: 1 nA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.2, 0.1, 0.05, 0.
Quasi-static C-V Measurements Considering Measurement Accuracy Calculation Example of Measurement Accuracy: HRSMU 12 Reading Accuracy (%) 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-10 Offset Accuracy (F) Figure 4-11 1.E-11 1.E-12 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: Measurement Range: 1 nA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.3, 0.1, 0.05, 0.
Quasi-static C-V Measurements Considering Measurement Accuracy Calculation Example of Measurement Accuracy: HRSMU 10 Reading Accuracy (%) 8 6 4 2 0 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-10 Offset Accuracy (F) Figure 4-12 1.E-11 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: Measurement Range: 1 nA Output Range: 40 V Integration Time: 2, 1, 0.5, 0.3, 0.1, 0.05, 0.
Quasi-static C-V Measurements Considering Measurement Accuracy Calculation Example of Measurement Accuracy: HRSMU 10 Reading Accuracy (%) 8 6 4 2 0 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1E-10 Offset Accuracy (F) Figure 4-13 1E-11 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: Measurement Range: 1 nA Output Range: 100 V Integration Time: 2, 1, 0.5, 0.3, 0.1, 0.05, 0.
Quasi-static C-V Measurements Considering Measurement Accuracy Calculation Example of Measurement Accuracy: HRSMU 18 16 Reading Accuracy (%) 14 12 10 8 6 4 2 0 0.001 0.01 0.1 1 QSCV Measurement Voltage (V) 1.E-09 1.E-10 Offset Accuracy (F) Figure 4-14 1.E-11 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 1 QSCV Measurement Voltage (V) Conditions: Measurement Range: 10 nA Output Range: 2 V Integration Time: 2, 1, 0.5, 0.2, 0.1, 0.05, 0.
Quasi-static C-V Measurements Considering Measurement Accuracy Calculation Example of Measurement Accuracy: HRSMU 10 Reading Accuracy (%) 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-10 Offset Accuracy (F) Figure 4-15 1.E-11 1.E-12 0.00 0.01 0.10 1.00 10.00 QSCV Measurement Voltage (V) Conditions: Measurement Range: 10 nA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.3, 0.1, 0.05, 0.
Quasi-static C-V Measurements Considering Measurement Accuracy Calculation Example of Measurement Accuracy: HRSMU 10 Reading Accuracy (%) 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-10 Offset Accuracy (F) Figure 4-16 1.E-11 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: Measurement Range: 10 nA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.3, 0.1, 0.05, 0.
Quasi-static C-V Measurements Considering Measurement Accuracy Calculation Example of Measurement Accuracy: MPSMU, HPSMU 10 9 8 Reading Accuracy (%) 7 6 5 4 3 2 1 0 0.001 0.01 0.1 1 QSCV Measurement Voltage (V) 1.E-08 1.E-09 1.E-10 Offset Accuracy (F) Figure 4-17 1.E-11 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 1 QSCV Measurement Voltage (V) Conditions: Measurement Range: 1 nA Output Range: 2 V Integration Time: 2, 1, 0.5, 0.2, 0.1, 0.05, 0.
Quasi-static C-V Measurements Considering Measurement Accuracy Calculation Example of Measurement Accuracy: MPSMU, HPSMU 20 18 16 Reading Accuracy (%) 14 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-09 1.E-10 Offset Accuracy (F) Figure 4-18 1.E-11 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: Measurement Range: 1 nA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.2, 0.1, 0.05, 0.
Quasi-static C-V Measurements Considering Measurement Accuracy Calculation Example of Measurement Accuracy: MPSMU, HPSMU 20 18 16 Reading Accuracy (%) 14 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-08 1.E-09 1.E-10 Offset Accuracy (F) Figure 4-19 1.E-11 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: Measurement Range: 1 nA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.2, 0.1, 0.05, 0.
Quasi-static C-V Measurements Considering Measurement Accuracy Calculation Example of Measurement Accuracy: MPSMU, HPSMU 20 18 16 Reading Accuracy (%) 14 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-09 1.E-10 Offset Accuracy (F) Figure 4-20 1.E-11 1.E-12 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: Measurement Range: 1 nA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.2, 0.1, 0.05, 0.
Quasi-static C-V Measurements Considering Measurement Accuracy Calculation Example of Measurement Accuracy: MPSMU, HPSMU 20 18 16 Reading Accuracy (%) 14 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-09 1.E-10 Offset Accuracy (F) Figure 4-21 1.E-11 1.E-12 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: Measurement Range: 1 nA Output Range: 40 V Integration Time: 2, 1, 0.5, 0.2, 0.1, 0.05, 0.
Quasi-static C-V Measurements Considering Measurement Accuracy Calculation Example of Measurement Accuracy: MPSMU, HPSMU 50 Reading Accuracy (%) 40 30 20 10 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-09 1.E-10 Offset Accuracy (F) Figure 4-22 1.E-11 1.E-12 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: Measurement Range: 1 nA Output Range: 100 V Integration Time: 2, 1, 0.5, 0.2, 0.1, 0.05, 0.
Quasi-static C-V Measurements Considering Measurement Accuracy Calculation Example of Measurement Accuracy: HPSMU 80 70 Reading Accuracy (%) 60 50 40 30 20 10 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-09 1.E-10 Offset Accuracy (F) Figure 4-23 1.E-11 1.E-12 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: Measurement Range: 1 nA Output Range: 200 V Integration Time: 2, 1, 0.5, 0.2, 0.1, 0.05, 0.
Quasi-static C-V Measurements Considering Measurement Accuracy Calculation Example of Measurement Accuracy: MPSMU, HPSMU 10 9 8 Reading Accuracy (%) 7 6 5 4 3 2 1 0 0.001 0.01 0.1 1 QSCV Measurement Voltage (V) 1.E-08 1.E-09 Offset Accuracy (F) Figure 4-24 1.E-10 1.E-11 1.E-12 1.E-13 0.001 0.01 0.1 1 QSCV Measurement Voltage (V) Conditions: Measurement Range: 10 nA Output Range: 2 V Integration Time: 2, 1, 0.5, 0.2, 0.1, 0.05, 0.
Quasi-static C-V Measurements Considering Measurement Accuracy Calculation Example of Measurement Accuracy: MPSMU, HPSMU 20 18 16 Reading Accuracy (%) 14 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 1 10 QSCV Measurement Voltage (V) 1.E-09 1.E-10 Offset Accuracy (F) Figure 4-25 1.E-11 1.E-12 1.E-13 1.E-14 0.001 0.01 0.1 QSCV Measurement Voltage (V) Conditions: Measurement Range: 10 nA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.2, 0.1, 0.05, 0.
Quasi-static C-V Measurements Considering Measurement Accuracy Calculation Example of Measurement Accuracy: MPSMU, HPSMU 20 18 Reading Accuracy (%) 16 14 12 10 8 6 4 2 0 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) 1.E-09 Offset Accuracy (F) Figure 4-26 1.E-10 1.E-11 1.E-12 0.001 0.01 0.1 1 10 QSCV Measurement Voltage (V) Conditions: Measurement Range: 10 nA Output Range: 20 V Integration Time: 2, 1, 0.5, 0.2, 0.1, 0.05, 0.
5 Stress Force
Stress Force This chapter explains how to execute stress force, and consists of the following sections: • “Stress Function” • “Defining Stress Conditions” For details about the 4155C/4156C setup screens and entry fields, refer to Setup Screen Reference manual. For an example to use the stress force function, refer to Flash EEPROM Test in Sample Application Programs Guide Book. 5-2 Agilent 4155C/4156C User’s Guide Vol.
Stress Force Stress Function Stress Function The 4155C/4156C can force both dc stress and ac stress (pulsed stress) as shown in the following figure. Stress is defined as the bias that the 4155C/4156C can monitor the bias output time correctly. To start stress force, press Stress front-panel key. displaying the stress force time The STRESS: STRESS FORCE screen is displayed while stress is being forced. On this screen, the time that stress has been forced is displayed and updated every second.
Stress Force Stress Function Stress Output Channels Stress output channel is defined as the unit used to force stress. Available Units The 4155C/4156C can force dc voltage stress, dc current stress, and ac voltage stress (by PGUs in Agilent 41501A/B), but cannot force ac current stress. Table 5-1 shows available units and allowable modes for stress sources.
Stress Force Stress Function Switching Channels Connected to DUT The 4155C/4156C can control Agilent 16440A SMU/Pulse Generator Selector to automatically switch units that are connected to a DUT pin. You set up this automatic control on the STRESS: CHANNEL DEFINITION screen. For example, the DUT pin is connected to a PGU for stress force when Stress front-panel key in the MEASUREMENT key group is pressed, then connected to an SMU for measurement when Single front-panel key is pressed.
Stress Force Stress Function Stress Mode You set stress mode to the pulse count mode or duration mode. Pulse count mode You specify the pulse count (1 to 65535). The total stress time is determined by the pulse count and pulse period. The pulse count mode is used only when a PGU is used to force ac stress (that is, PGU is set to MODE=VPULSE and FCTN=SYNC on the STRESS:CHANNEL DEFINITION screen). Duration mode You specify the total stress time directly in seconds. Allowable range is 500 μs to 1 year (3.
Stress Force Stress Function Stress Force Sequence This section explains the source output sequence when starting the stress force, and when finishing the stress force.
Stress Force Stress Function NOTE Pulse Waveform when Stress Stops When you set the duration mode or press the Stop front-panel key, be aware that stress force may stop during the pulse peak output as shown in the following figure: Sequence for returning to 0 V (stress force state to the idle state) When the state changes from the stress state to the idle state, the outputs of the channels are returned to 0 V in opposite order that forcing occurred.
Stress Force Stress Function Figure 5-1 Example of the Stress Force Sequence • output sequence from idle state to the stress state: • 1. PGU1 2. SMU1 3. PGU2 4. SMU2 5. SMU3 stress force sequence (in the stress force state): The stress force channels (PGU1, PGU2, and SMU3) start stress and stop stress at the same time. • output sequence from stress state to the idle state: 1. 2. 3. 4. 5. SMU3 SMU2 PGU2 SMU1 PGU1 Agilent 4155C/4156C User’s Guide Vol.
Stress Force Stress Function Stress Stop Function at Abnormal Status On the STRESS: STRESS SETUP screen, you can select whether the stress stops or continues when an abnormal status occurs. When an 4155C/4156C is stopped by the stress stop function, a message is displayed in the message display area. The stress stop function is not effective until the stress has been forced for 10 seconds.
Stress Force Defining Stress Conditions Defining Stress Conditions This section covers the tasks for stress forcing. Two types of stress can be forced by the 4155C/4156C: • • dc stress • Dc voltage stress can be forced from SMUs, VSUs, or PGUs. • Dc current stress can be forced from SMUs. ac stress (also called pulsed stress) • Ac voltage stress can be forced from PGUs. • Ac current stress cannot be forced from the 4155C/4156C. Agilent 4155C/4156C User’s Guide Vol.
Stress Force Defining Stress Conditions The following illustrates the basic procedures for stress forcing. 1 Connecting your DUT to the 4155C/4156C. See Chapter 10 for procedures. 2 Defining the stress units and constant output units. See “To Set up Stress Source Channels” on page 5-13. To use the selector, see Chapter 8. 3 Setting the stress forcing parameters and constant output value.
Stress Force Defining Stress Conditions To Set up Stress Source Channels 1. Press Stress key in the PAGE CONTROL key group. 2. Select CHANNEL DEF primary softkey. 3. In the MODE field of desired unit in CHANNELS area, select: • V secondary softkey for dc voltage stress forcing mode (SMU, VSU, and PGU). • I secondary softkey for dc current stress forcing mode (SMU). • VPULSE secondary softkey for ac voltage stress forcing mode (PGU). • COMMON secondary softkey for circuit common (SMU and GNDU). 4.
Stress Force Defining Stress Conditions Example The following figure shows an example setup to set two PGUs to ac stress source. 5-14 Agilent 4155C/4156C User’s Guide Vol.
Stress Force Defining Stress Conditions To Set up Stress Condition/Timing 1. Press Stress key in the PAGE CONTROL key group. 2. Select STRESS SETUP primary softkey. 3. In the MODE field of the STRESS MODE area, select: • DURATION secondary softkey to specify how long to force stress. • PULSE COUNT secondary softkey to specify how many pulses to output for force stress (for ac stress only). 4. In the DURATION or PULSE COUNT field, enter the duration or pulse count.
Stress Force Defining Stress Conditions To set hold time In the HOLD TIME field, set desired value. For the meaning of hold time, see “Stress Force Sequence” on page 5-7. Setting the Accumulated Stress Time The ACCUMULATED STRESS field shows the total stress that has been forced. If necessary, you can change the value in this field. If so, the ACCUMULATED STRESS field on the STRESS: STRESS FORCE screen also changes to the new value. Example The following figure shows an example setup of stress condition.
Stress Force Defining Stress Conditions To Set up ac (Pulse) Output 1. Press the Stress key in the PAGE CONTROL key group. Confirm that the following is set on the STRESS: CHANNEL DEFINITION screen for the PGUs that you want to set up for ac stress: • VPULSE is set in the MODE field. • SYNC is set in the FCTN field. 2. Select STRESS SETUP primary softkey. 3. In the PERIOD field, enter the pulse period. 4. In the WIDTH field, enter the pulse width. 5.
Stress Force Defining Stress Conditions Delay time The following figure shows the meaning of delay time. Example The following figure shows an example to set up ac stress. 5-18 Agilent 4155C/4156C User’s Guide Vol.
Stress Force Defining Stress Conditions To Set up dc Output 1. Press Stress key in the PAGE CONTROL key group. Confirm that the following is set on the STRESS: CHANNEL DEFINITION screen for the units that you want to set up for dc stress: • V or I is set in the MODE field. • SYNC is set in the FCTN field. 2. Select STRESS SETUP primary softkey. 3. In the SOURCE field for the desired unit in the CONSTANT area, enter the desired dc stress value. 4.
Stress Force Defining Stress Conditions To Force Stress Press Stress key in the MEASUREMENT key group. The STRESS area shows the specified stress duration time. Even if you set STRESS MODE to PULSE COUNT, the stress duration time is calculated and shown in seconds. The ACCUMULATED STRESS area shows the total stress that has already been forced. To change the stress time (duration mode) Select CHANGE DURATON secondary softkey, then enter desired value.
Stress Force Defining Stress Conditions Example The following figure shows an example of STRESS: STRESS FORCE screen. Agilent 4155C/4156C User’s Guide Vol.
Stress Force Defining Stress Conditions 5-22 Agilent 4155C/4156C User’s Guide Vol.
6 Analyzing Measurement Results
Analyzing Measurement Results You can analyze measurement results by using lines, markers, and cursors on the Agilent 4155C/4156C screen. If you want to display lines and marker automatically, set up the DISPLAY: ANALYSIS SETUP screen before starting measurements. Then, after the measurements, the lines and marker are positioned automatically according to the setup.
Analyzing Measurement Results Analysis Function Analysis Function The 4155C/4156C provides the following functions for analyzing measurement results: • “Marker on the GRAPH/LIST: GRAPHICS screen” • “Marker on the GRAPH/LIST: LIST screen” • “Cursor” • “Line Drawing” • “Scaling Functions” • “Overlay Display Function” • “Automatic Analysis Function” Agilent 4155C/4156C User’s Guide Vol.
Analyzing Measurement Results Analysis Function Marker on the GRAPH/LIST: GRAPHICS screen Figure 6-1 Markers on the GRAPH/LIST: GRAPHICS screen You can display the markers on the plotted measurement curves on the GRAPH/LIST: GRAPHICS screen by selecting MARKER/CURSOR primary softkey, then selecting MARKER secondary softkey. The marker for Y1 axis is a circle (o), and the marker for Y2 axis is an asterisk (*). The active marker depends on the selected axis.
Analyzing Measurement Results Analysis Function • specifying the position for direct keyboard calculation If you enter an expression that has data variables related to measurement points, the value of the expression at the marker position is displayed. • indicating measurement point determined by auto analysis expression If you set up an expression for the marker on DISPLAY: ANALYSIS SETUP screen, the marker moves to the point determined by the expression after auto analysis is performed.
Analyzing Measurement Results Analysis Function Marker on the GRAPH/LIST: LIST screen Figure 6-2 Marker on the GRAPH/LIST: LIST screen When marker function is enabled on GRAPH/LIST: LIST screen, a marker (highlighted row) is displayed. Marker has following functions on this screen: • displaying values of data variables The data variable values are displayed for the highlighted row.
Analyzing Measurement Results Analysis Function Moving the marker Basically, you can move the marker up or down by using the rotary knob on the front panel or by using the upper arrow and down arrow front-panel keys. If you have defined more than four variable values, you can scroll right or left by using the left arrow or right arrow front-panel key. In addition to the basic movement, the following functions allow you to quickly move the marker to the desired position.
Analyzing Measurement Results Analysis Function Cursor Cursors are used to specify the position for line drawing or scaling functions on the GRAPH/LIST: GRAPHICS screen. Refer to “Line Drawing” on page 6-9 and “Scaling Functions” on page 6-11. You can select a short cursor, which is a cross "`+'", or a long cursor, which is a cross with long lines. You can move the cursor anywhere in the plotting area by using arrow keys of the Marker/Cursor key group.
Analyzing Measurement Results Analysis Function Line Drawing You can draw up to two lines in plotting area on GRAPH/LIST: GRAPHICS screen. To draw lines, you can select one of following four line modes: • Normal line mode: can draw a line through two cursors. • Grad line mode: can draw a line through a cursor with specified gradient. Agilent 4155C/4156C User’s Guide Vol.
Analyzing Measurement Results Analysis Function • Tangent line mode: can draw tangent line to marker, which is on measurement curve. • Regression line mode: can draw regression line within area specified by two cursors. 6-10 Agilent 4155C/4156C User’s Guide Vol.
Analyzing Measurement Results Analysis Function Scaling Functions You can change the axis scales after plotting the measurement results on the GRAPH/LIST: GRAPHICS screen. The following scaling functions are provided: • Autoscaling Changes X and Y-axis scaling to fit the measurement curve. • Zooming in Changes the scaling to half the present scaling. This enlarges the measurement curve on the plot area. • Zooming out Changes the scaling to double the present scaling.
Analyzing Measurement Results Analysis Function Overlay Display Function You can overlay a measurement curve (that was previously saved into one of the four internal memories) onto the curve that is presently displayed on the GRAPH/LIST: GRAPHICS screen. This is useful for comparing measurement results.
Analyzing Measurement Results Manual Analysis Manual Analysis You can position lines, markers, and cursors by using front-panel keys, rotary knob, and softkeys.
Analyzing Measurement Results Manual Analysis To Specify a Measurement Point on Curve 1. Select MARKER/CURSOR primary softkey. 2. Set MARKER secondary softkey to ON. Marker and marker coordinates are displayed. Selecting MARKER secondary softkey toggles between ON and OFF. 3. (if both Y1 and Y2 axis are set up) Select the desired marker (axis) by using AXIS primary softkey. The selected marker is highlighted. Selecting AXIS primary softkey toggles between Y1 and Y2. 4.
Analyzing Measurement Results Manual Analysis Example The following figure shows an example to move marker to desired measurement point and to set the Y1 axis marker to active. Agilent 4155C/4156C User’s Guide Vol.
Analyzing Measurement Results Manual Analysis To Specify between Measurement Points on Curve 1. Select MARKER/CURSOR primary softkey. 2. Set MARKER secondary softkey to ON. Marker and marker coordinates are displayed. Selecting MARKER toggles between ON and OFF. 3. (if both Y1 and Y2 axis are set up) Select the desired marker (axis) by using AXIS primary softkey. The selected marker is highlighted. Selecting AXIS primary softkey toggles between Y1 and Y2. 4. Set INTERPOLATE secondary softkey to ON.
Analyzing Measurement Results Manual Analysis Example The following figure shows an example to move marker to points between measurement points by setting INTERPOLATE softkey to ON. Agilent 4155C/4156C User’s Guide Vol.
Analyzing Measurement Results Manual Analysis To Display or Move Cursor 1. Select MARKER/CURSOR primary softkey. 2. Set CURSOR secondary softkey to SHORT or LONG. Short or long cursor and cursor coordinates are displayed. Selecting CURSOR secondary softkey toggles as follows: OFF → SHORT → LONG → OFF 3. Move the cursor by using arrow keys of the MARKER/CURSOR key group. The CURSOR coordinate fields indicate the location of cursor.
Analyzing Measurement Results Manual Analysis To Adjust Display Range to Measurement Curve Automatically 1. Select SCALING primary softkey. 2. (if both Y1 and Y2 axis are set up) Select desired measurement curve by using AXIS primary softkey. 3. Select AUTO SCALING secondary softkey. Scale is changed automatically to fit the selected measurement curve. When you set VAR2 parameter, or when you perform append measurement, the scale is changed so that all measurement curves can be displayed.
Analyzing Measurement Results Manual Analysis To Center Display at Cursor Location 1. Position cursor at the point where you want to center the plotting area. (For details about displaying and moving cursor, see “To Display or Move Cursor” on page 6-18.) 2. Select SCALING primary softkey. 3. (if both Y1 and Y2 axis are set up) Select desired measurement curve by using AXIS primary softkey. 4. Select CENTER AT CURSOR secondary softkey. The plotting area is centered around the cursor location.
Analyzing Measurement Results Manual Analysis To turn off the line intercept and gradient display Select DISPLAY SETUP primary softkey, then set LINE PRMTRS secondary softkey to OFF. To turn off the data variable display area Use the following procedure: 1. Select DISPLAY SETUP primary softkey. 2. Set DATA VAR secondary softkey to OFF. To move the selected cursor to the selected marker position Select CURSOR TO MARKER secondary softkey.
Analyzing Measurement Results Manual Analysis To Draw Line through Specified Point with Specified Gradient 1. Select LINE primary softkey. 2. Set LINE SELECT softkey to 1 or 2. Selecting this softkey toggles the setting. 3. Set LINE secondary softkey to ON. A line and two cursors are displayed. Selecting LINE secondary softkey toggles as follows: OFF → ON → OFF 4. Select GRAD MODE secondary softkey if it is not highlighted. Softkey becomes highlighted.
Analyzing Measurement Results Manual Analysis Example The following figure shows an example to draw a line through specified point with specified gradient. Agilent 4155C/4156C User’s Guide Vol.
Analyzing Measurement Results Manual Analysis To Draw Tangent to Specified Point of Measurement Curve 1. Press LINE primary softkey. 2. Set LINE SELECT softkey to 1 or 2. Selecting this softkey toggles the setting. 3. Set LINE secondary softkey to ON. A line and two cursors are displayed. Selecting the LINE secondary softkey toggles as follows: OFF → ON → OFF 4. Select TANGENT MODE secondary softkey if it is not highlighted. Softkey becomes highlighted. The cursors disappear and marker appears.
Analyzing Measurement Results Manual Analysis Example The following figure shows an example to draw a tangent to a specified measurement point. Agilent 4155C/4156C User’s Guide Vol.
Analyzing Measurement Results Manual Analysis To Draw Regression Line for Specified Region 1. Select MARKER/CURSOR primary softkey, then set the MARKER secondary softkey to ON. 2. Select the desired axis for regression calculation by selecting AXIS primary softkey (if both Y1 and Y2 axis are set up). Then, if necessary, move marker to desired measurement curve by selecting MARKER SKIP secondary softkey. 3. Select LINE primary softkey. 4. Set LINE SELECT softkey to 1 or 2.
Analyzing Measurement Results Manual Analysis If it seems that only one cursor is displayed, the cursors are at the same location. When regression lines are displayed and when ON is set in the LINE PARAMETER field on the DISPLAY: DISPLAY SETUP screen, the X and Y intercepts and gradient of selected line are also displayed in the plotting area. To turn off the line intercept and gradient display Select DISPLAY SETUP primary softkey, then set LINE PRMTRS secondary softkey to OFF.
Analyzing Measurement Results Manual Analysis To Display and Select a Line 1. Select LINE primary softkey. 2. Set LINE SELECT softkey to 1 or 2. Selecting this softkey toggles the setting. 3. Set LINE secondary softkey to ON. Selected line and two cursors are displayed. Selecting the LINE secondary softkey toggles as follows: OFF → ON → OFF Set LINE SELECT secondary softkey to desired line (1 or 2). Selected line is highlighted.
Analyzing Measurement Results Manual Analysis To Change Data Variable on Graph 1. Select DISPLAY SETUP primary softkey. 2. Select RE-SETUP GRAPH secondary softkey. 3. Move the pointer to desired data variable field by using the arrow keys, then select secondary softkey to enter the desired variable name. 4. Select EXIT primary softkey to exit the RE-SETUP GRAPH mode. To exit without changing data variable Select CANCEL primary softkey.
Analyzing Measurement Results Manual Analysis To Change Range of X or Y Axis Scale 1. Select DISPLAY SETUP primary softkey. 2. Select RE-SETUP GRAPH secondary softkey. 3. Move pointer to maximum or minimum value field of X or Y axis scale by using the arrow keys, then edit the setup value by using ENTRY keys or rotary knob. 4. Select EXIT primary softkey to exit RE-SETUP GRAPH mode. To exit without changing range of X or Y axis scale Select CANCEL primary softkey.
Analyzing Measurement Results Manual Analysis To Change Variable Assigned to X, Y1, or Y2 Axis 1. Select DISPLAY SETUP primary softkey. 2. Select RE-SETUP GRAPH secondary softkey. 3. Move pointer to variable field of X, Y1, or Y2 axis by using arrow keys, then select secondary softkey to set the desired variable. 4. Select EXIT primary softkey to exit RE-SETUP GRAPH mode. To exit without changing variable assigned to X, Y1, or Y2 axis Select CANCEL primary softkey.
Analyzing Measurement Results Manual Analysis To Overlay an Internal Memory Measurement Curve onto Plotting Area This section explains how to overlay a measurement curve (that was stored into an internal memory) onto plotting area. To store a measurement curve into an internal memory, refer to User's Guide General Information. 1. Select DISPLAY SETUP primary softkey. 2. Set OVERLAY PLANE secondary softkey to the desired memory number. Selected measurement curve is overlaid onto plotting area.
Analyzing Measurement Results Manual Analysis Example The following figure shows an example to overlay a measurement curve (that is stored in internal memory 1) onto the presently displayed measurement curve. Agilent 4155C/4156C User’s Guide Vol.
Analyzing Measurement Results Manual Analysis To Scroll the LIST screen • Press an arrow key of the MARKER/CURSOR key group. List scrolls in direction of selected arrow. List can be scrolled even while performing measurements. When marker is displayed, marker does not move during scrolling. To scroll list fast Press Fast key of the MARKER/CURSOR key group while pressing an arrow key of the MARKER/CURSOR key group. 6-34 Agilent 4155C/4156C User’s Guide Vol.
Analyzing Measurement Results Manual Analysis To Display or Move Marker on LIST screen 1. Select MARKER primary softkey. 2. Set MARKER secondary softkey to ON. The marker is displayed. Selecting MARKER secondary softkey toggles between ON and OFF. 3. Rotate rotary knob to move the marker to desired measurement point. To turn off marker Set MARKER secondary softkey to OFF. To move marker to next VAR2 step Select MARKER SKIP secondary softkey.
Analyzing Measurement Results Manual Analysis To Change Variables of LIST screen 1. Select RE-SETUP primary softkey. 2. Move pointer to desired column variable or data variable field by using arrow keys, then select secondary softkey of desired variable. 3. Select EXIT primary softkey to exit RE-SETUP LIST mode. To exit without changing LIST variables Select CANCEL primary softkey. Example The following figure shows an example to change the LIST variables. 6-36 Agilent 4155C/4156C User’s Guide Vol.
Analyzing Measurement Results Automatic Analysis Automatic Analysis You set up automatic analysis before the measurement by using the DISPLAY: ANALYSIS SETUP screen. Then, after measurement is performed, the marker and lines are automatically positioned according to automatic analysis setup.
Analyzing Measurement Results Automatic Analysis To Draw Line by Specifying Two Points 1. Press Display front-panel key. 2. Confirm that ON is set on the LINE secondary softkey on the GRAPH/LIST: GRAPHICS screen. 3. Select ANLYSIS SETUP primary softkey. The DISPLAY: ANALYSIS SETUP screen is displayed. 4. In field (1), select NORMAL secondary softkey. 5. In field (2), select secondary softkey to specify desired axis. 6.
Analyzing Measurement Results Automatic Analysis Data condition mode specifies a point related to the measurement curve. So, if no measurement data satisfy the specified condition, the nearest measurement point is used. For the meaning of expression that you can enter in step 6 or 7, see Chapter 8. To specify a point between two measurement points Set Interpolate field to ON. To disable (clear) the settings Move the pointer to field (1), then select DISABLE secondary softkey. Setup fields disappear.
Analyzing Measurement Results Automatic Analysis To Draw Line by Specifying Gradient and One Point 1. Press Display front-panel key. 2. Confirm that ON is set on the LINE secondary softkey on the GRAPH/LIST: GRAPHICS screen. 3. Select ANLYSIS SETUP primary softkey. The DISPLAY: ANALYSIS SETUP screen is displayed. 4. In field (1), select GRAD secondary softkey. 5. In field (2), select secondary softkey to specify desired axis. 6.
Analyzing Measurement Results Automatic Analysis Data condition mode specifies a point related to the measurement curve. So, if no measurement data satisfy the specified condition, the nearest measurement point is used. For the meaning of expression that you can enter in step 6 or 7, see Chapter 8. To specify a point between two measurement points Set Interpolate field to ON. To disable (clear) the settings Move the pointer to field (1), then select DISABLE secondary softkey. Setup fields disappear.
Analyzing Measurement Results Automatic Analysis To Draw Tangent to Specified Measurement Point 1. Press Display front-panel key. 2. Confirm that ON is set on the LINE secondary softkey on the GRAPH/LIST: GRAPHICS screen. 3. Select ANLYSIS SETUP primary softkey. The DISPLAY: ANALYSIS SETUP screen is displayed. 4. In field (1), select TANGENT secondary softkey. 5. In field (2), select secondary softkey to specify desired axis. 6. In field (3), select secondary softkey to select desired data variable name.
Analyzing Measurement Results Automatic Analysis Example The following figure shows an example setup to automatically draw a tangent line to a specified measurement point. Agilent 4155C/4156C User’s Guide Vol.
Analyzing Measurement Results Automatic Analysis To Draw Regression Line by Specifying Two Points 1. Press Display front-panel key. 2. Confirm that ON is set on the LINE secondary softkey on the GRAPH/LIST: GRAPHICS screen. 3. Select ANLYSIS SETUP primary softkey. The DISPLAY: ANALYSIS SETUP screen is displayed. 4. In field (1), select REGRESSION secondary softkey. 5. In field (2), select secondary softkey to specify desired axis. 6.
Analyzing Measurement Results Automatic Analysis Regression calculation is performed in the range defined by the two specified points as shown in the following figure. Data condition mode specifies a point related to the measurement curve. So, if no measurement data satisfy the specified condition, the nearest measurement point is used. For the meaning of expression that you can enter in step 6 and 7, see Chapter 8. To specify a point between two measurement points Set Interpolate field to ON.
Analyzing Measurement Results Automatic Analysis Example The following figure shows an example setup to automatically draw a regression line. The range for the regression calculation is specified by two points. One point is specified by X-Y coordinate mode and other point is specified by data condition mode. 6-46 Agilent 4155C/4156C User’s Guide Vol.
Analyzing Measurement Results Automatic Analysis To Display Marker at Specified Point 1. Press Display front-panel key. 2. Select ANLYSIS SETUP primary softkey. The DISPLAY: ANALYSIS SETUP screen is displayed. 3. Move pointer to field (1), then select secondary softkey to set desired data variable name. 4. In field (2), enter desired expression. 5. In field (3), select: • AFTER secondary softkey if you want to set a search start condition for finding specified point.
Analyzing Measurement Results Automatic Analysis Example The following figure shows an example setup to automatically display marker at specified point. 6-48 Agilent 4155C/4156C User’s Guide Vol.
7 Measurement Units and Functions
Measurement Units and Functions This chapter explains measurement units and measurement functions of the Agilent 4155C/4156C Semiconductor Parameter Analyzer and Agilent 41501A/B Expander. • “Measurement Units” • “Compliance” • “Measurement Ranging Mode” • “Measurement Time” • “SMU Filter” • “Self-calibration” • “Zero Offset Cancel” • “QSCV Zero Offset Cancel” • “Operation States” • “Output Sequence” • “Measurement Sequence” 7-2 Agilent 4155C/4156C User’s Guide Vol.
Measurement Units and Functions Measurement Units Measurement Units The 4155C/4156C and 41501A/B have the measurement units listed below. This section explains source and measurement functions of the measurement units. • “GNDU - Ground Unit” • “SMU - Source Monitor Unit” • “VSU - Voltage Source Unit” • “VMU - Voltage Monitor Unit” • “PGU - Pulse Generator Unit” GNDU - Ground Unit GNDU is a 0 V constant voltage source, and used for the reference of the measurement ground.
Measurement Units and Functions Measurement Units SMU - Source Monitor Unit SMU can force a constant voltage, constant current, pulse voltage, or pulse current, and can measure a dc current or dc voltage. Only one SMU can be set to pulsed source. Figure 7-2 shows a simplified SMU circuit diagram.
Measurement Units and Functions Measurement Units Type of SMUs Following three types of SMUs are available: • • • HRSMU (high resolution SMU) • Only for the 4156C. The 4156C has four HRSMUs. • Force and measure: up to ±100 V or ±100 mA. • Maximum output power: 2 W. • Minimum current measurement range: 10 pA with 1 fA resolution. • Output and measurement ranges: see “HRSMU - High Resolution SMU” on page 7-6. • Kelvin connection is available.
Measurement Units and Functions Measurement Units HRSMU - High Resolution SMU Figure 7-3 HRSMU Output and Measurement Ranges Table 7-1 HRSMU Output Voltage Ranges and Resolutions 7-6 Range Output Value Output Resolution Current Compliance Range 2V 0 ≤ |V| ≤ 2 V 100 μV ±100 mA 20 V 0 ≤ |V| ≤ 20 V 1 mV ±100 mA 40 V 0 ≤ |V| ≤ 40 V 2 mV ±50 mA 100 V 0 ≤ |V| ≤ 100 V 5 mV ±20 mA Agilent 4155C/4156C User’s Guide Vol.
Measurement Units and Functions Measurement Units Table 7-2 HRSMU Measurement Voltage Values and Resolutions Measurement Resolutions b Range Measurement Value a Integration Time 1PLC or Longer 640 μs to 1.92 ms 80 μs to 560 μs High Speed Sampling Measurement c 2V 0 ≤ |V| ≤ 2.2 V 2 μV 20 μV 200 μV 2 mV 20 V 0 ≤ |V| ≤ 22 V 20 μV 200 μV 2 mV 20 mV 40 V 0 ≤ |V| ≤ 44 V 40 μV 400 μV 4 mV 40 mV 100 V 0 ≤ |V| ≤ 100 V 100 μV 1 mV 10 mV 100 mV a.
Measurement Units and Functions Measurement Units Table 7-4 HRSMU Measurement Current Values and Resolutions Measurement Resolutions b Range Measurement Value a Integration Time 1PLC or Longer 640 μs to 1.92 ms 80 μs to 560 μs High Speed Sampling Measurement c 10 pA 0 ≤ |I| ≤ 10.5 pA 1 fA 1 fA 1 fA 10 fA 100 pA 0 ≤ |I| ≤ 115 pA 1 fA 1 fA 10 fA 100 fA 1 nA 0 ≤ |I| ≤ 1.15 nA 10 fA 10 fA 100 fA 1 pA 10 nA 0 ≤ |I| ≤ 11.
Measurement Units and Functions Measurement Units MPSMU - Medium Power SMU Figure 7-4 MPSMU Output and Measurement Ranges Table 7-5 MPSMU Output Voltage Ranges and Resolutions Range Output Value Output Resolution Current Compliance Range 2V 0 ≤ |V| ≤ 2 V 100 μV ±100 mA 20 V 0 ≤ |V| ≤ 20 V 1 mV ±100 mA 40 V 0 ≤ |V| ≤ 40 V 2 mV ±50 mA 100 V 0 ≤ |V| ≤ 100 V 5 mV ±20 mA Agilent 4155C/4156C User’s Guide Vol.
Measurement Units and Functions Measurement Units Table 7-6 MPSMU Measurement Voltage Values and Resolutions Measurement Resolutions b Range Measurement Value a Integration Time 1PLC or Longer 640 μs to 1.92 ms 80 μs to 560 μs High Speed Sampling Measurement c 2V 0 ≤ |V| ≤ 2.2 V 2 μV 20 μV 200 μV 2 mV 20 V 0 ≤ |V| ≤ 22 V 20 μV 200 μV 2 mV 20 mV 40 V 0 ≤ |V| ≤ 44 V 40 μV 400 μV 4 mV 40 mV 100 V 0 ≤ |V| ≤ 100 V 100 μV 1 mV 10 mV 100 mV a.
Measurement Units and Functions Measurement Units Table 7-8 MPSMU Measurement Current Values and Resolutions Measurement Resolutions b Range Measurement Value a Integration Time 1PLC or Longer 640 μs to 1.92 ms 80 μs to 560 μs High Speed Sampling Measurement c 1 nA 0 ≤ |I| ≤ 1.15 nA 10 fA 10 fA 100 fA 1 pA 10 nA 0 ≤ |I| ≤ 11.5 nA 10 fA 100 fA 1 pA 10 pA 100 nA 0 ≤ |I| ≤ 115 nA 100 fA 1 pA 10 pA 100 pA 1 μA 0 ≤ |I| ≤ 1.15 μA 1 pA 10 pA 100 pA 1 nA 10 μA 0 ≤ |I| ≤ 11.
Measurement Units and Functions Measurement Units HPSMU - High Power SMU Figure 7-5 HPSMU Output and Measurement Ranges Table 7-9 HPSMU Output Voltage Ranges and Resolutions 7-12 Range Output Value Output Resolution Current Compliance Range 2V 0 ≤ |V| ≤ 2 V 100 μV ±1000 mA 20 V 0 ≤ |V| ≤ 20 V 1 mV ±1000 mA 40 V 0 ≤ |V| ≤ 40 V 2 mV ±500 mA 100 V 0 ≤ |V| ≤ 100 V 5 mV ±125 mA 200 V 0 ≤ |V| ≤ 200 V 10 mV ±50 mA Agilent 4155C/4156C User’s Guide Vol.
Measurement Units and Functions Measurement Units Table 7-10 HPSMU Measurement Voltage Values and Resolutions Measurement Resolutions b Range Measurement Value a Integration Time 1PLC or Longer 640 μs to 1.92 ms 80 μs to 560 μs High Speed Sampling Measurement c 2V 0 ≤ |V| ≤ 2.
Measurement Units and Functions Measurement Units Table 7-12 HPSMU Measurement Current Values and Resolutions Measurement Resolutions b Range Integration Time Measurement Value a 1PLC or Longer 640 μs to 1.92 ms 80 μs to 560 μs High Speed Sampling Measurement c 1 nA 0 ≤ |I| ≤ 1.15 nA 10 fA 10 fA 100 fA 1 pA 10 nA 0 ≤ |I| ≤ 11.5 nA 10 fA 100 fA 1 pA 10 pA 100 nA 0 ≤ |I| ≤ 115 nA 100 fA 1 pA 10 pA 100 pA 1 μA 0 ≤ |I| ≤ 1.15 μA 1 pA 10 pA 100 pA 1 nA 10 μA 0 ≤ |I| ≤ 11.
Measurement Units and Functions Measurement Units SMU Pulse Output When SMU is pulsed source, set pulse parameters in following ranges: Pulse width 0.5 ms to 100 ms, 100 μs resolution Pulse Period 5 ms to 1 s, 100 μs resolution where pulse period ≥ pulse width + 4 ms Be aware that if any of following are true, pulsed SMU channel may not output the pulse period and pulse width you specified: • Measurement range differs from compliance range (lowest range that includes compliance).
Measurement Units and Functions Measurement Units • Voltage Compliance If you use SMU as pulse current source, you can set voltage compliance as follows: • When |I| ≤ 10 μA, voltage compliance must be 2 V or less. • When |I| > 10 μA, voltage compliance ranges are same as in tables on previous pages. where, meaning of I depends on the pulse output mode. See below: If SMU is pulsed constant source peak or base value, whichever has larger absolute value.
Measurement Units and Functions Measurement Units VSU - Voltage Source Unit Figure 7-6 shows a simplified VSU circuit diagram. Figure 7-6 Simplified VSU Circuit Diagram • VSU can force up to ±20 V with 1 mV resolution. • Only range available is 20 V range, so output range is automatically set to 20 V. • Current compliance is automatically set to ±100 mA. Agilent 4155C/4156C User’s Guide Vol.
Measurement Units and Functions Measurement Units VMU - Voltage Monitor Unit The VMU has two measurement modes: grounded or differential. Grounded mode uses one VMU. Differential mode uses two VMUs. Figure 7-7 is a simplified VMU circuit diagram. The VMU can measure up to 20 V. Table 7-13 shows the voltage measurement range of the VMU. Figure 7-7 Simplified VMU Circuit Diagram NOTE High Impedance DUT A very high-impedance DUT may cause measurement error owing to the input leakage current from the VMU.
Measurement Units and Functions Measurement Units Table 7-13 VMU Voltage Ranges and Resolutions Measurement Resolutions b Measurement Mode Grounded Measurement Differential Measurement Integration Time 1PLC or Longer 640 μs to 1.92 ms 80 μs to 560 μs High Speed Sampling Measurement c 2V 2 μV 20 μV 200 μV 2 mV 20 V 20 μV 200 μV 2 mV 20 mV 0.2 V 0.2 μV 2 μV 20 μV 200 μV 2V 2 μV 20 μV 200 μV 2 mV Range a a.
Measurement Units and Functions Measurement Units PGU - Pulse Generator Unit Two PGUs (pulse generator units) are available, which are in the 41501A/B Expander. Each PGU provides a pulsed output, and can also function as a dc source. Figure 7-8 shows a simplified PGU circuit diagram. Figure 7-8 Simplified PGU Circuit Diagram When you use two PGUs, the outputs are always synchronized with each other. The PGUs cannot be synchronized with the other measurement units.
Measurement Units and Functions Measurement Units Output Impedance For the PGU pulsed outputs, you must select the PGU output impedance from 50 Ω and Low impedance (approx. 0 Ω). And PGU output value is defined to be the value that is output if the PGU output terminal is open. So, when a load is connected and PGU impedance is set to 50 Ω, the actual output value will be different.
Measurement Units and Functions Measurement Units Leading Edge and Trailing Edge Transition Time The leading-edge and trailing-edge transition times have five setting ranges as shown in Table 7-16. Table 7-16 Ranges and Resolutions of Leading and Trailing Transition Time Range Leading and Trailing Transition Time Resolution 1 100 ns to 1000 ns 1 ns 2 0.50 μs to 10.00 μs 10 ns 3 5.0 μs to 100.0 μs 100 ns 4 50 μs to 1000 μs 1 μs 5 0.5 ms to 10.
Measurement Units and Functions Compliance Compliance Compliance is available for SMU (HPSMU, MPSMU, HRSMU) and VSU. To prevent damage to the test device due to overcurrent, overvoltage, or overpower, you can set current compliance, voltage compliance, or power compliance for SMU. For VSU, current compliance is automatically set to approximately ± 100 mA. You cannot change it.
Measurement Units and Functions Compliance Figure 7-9 Relation of Compliance and Output Current Compliance for COMMON Unit If you set COMMON output mode for the unit, current compliance for the unit is automatically set as follows and you cannot change the setting. Table 7-17 GNDU 1.
Measurement Units and Functions Compliance Table 7-18 Table 7-19 Unit Output Range V Compliance Setting Range HPSMU 1 nA to 10 mA 0 to 200 V 100 mA (0 ≤ |I| ≤ 50 mA) 0 to 200 V 100 mA (50 mA < |I| ≤ 115 mA) 0 to 100 V 1 A (0 ≤ |I| ≤ 50 mA) 0 to 200 V 1 A (50 mA < |I| ≤ 125 mA) 0 to 100 V 1 A (125 mA < |I| ≤ 500 mA) 0 to 40 V 1 A (500 mA < |I| ≤ 1 A) 0 to 20 V V Compliance Resolution Unit V Compliance Resolution HRSMU 0 V ≤ |V| ≤ 2 V 100 μV MPSMU 2 V < |V| ≤ 20 V 1 mV HPSMU 20
Measurement Units and Functions Compliance Table 7-20 Unit Output Range I Compliance Setting Range HPSMU 2V 1 pA to 1000 mA 20 V 1 pA to 1000 mA 40 V 1 pA to 500 mA 100 V 1 pA to 125 mA 200 V 1 pA to 50 mA I Compliance Resolution Unit I Compliance Resolution HRSMU 100 fA ≤ |I| ≤ 100 pA 10 fA 100 pA < |I| ≤ 1 nA 100 fA 1 nA < |I| ≤ 10 nA 1 pA 10 nA < |I| ≤ 100 nA 10 pA 100 nA < |I| ≤ 1 μA 100 pA 1 μA < |I| ≤ 10 μA 1 nA 10 μA < |I| ≤ 100 μA 10 nA 100 μA < |I| ≤ 1 mA 100 nA
Measurement Units and Functions Compliance Unit I Compliance Resolution HPSMU 1 pA ≤ |I| ≤ 1 nA 100 fA 1 nA < |I| ≤ 10 nA 1 pA 10 nA < |I| ≤ 100 nA 10 pA 100 nA < |I| ≤ 1 μA 100 pA 1 μA < |I| ≤ 10 μA 1 nA 10 μA < |I| ≤ 100 μA 10 nA 100 μA < |I| ≤ 1 mA 100 nA 1 mA < |I| ≤ 10 mA 1 μA 10 mA < |I| ≤ 100 mA 10 μA 100 mA < |I| ≤ 1 A 100 μA Power Compliance In addition to V compliance or I compliance, you can set power compliance for the VAR1, VAR2, and VAR1' channels of sweep measurement.
Measurement Units and Functions Compliance Figure 7-10 Power Compliance Output Area If you specify power compliance, SMUs can be swept at their maximum output limits because the 4155C/4156C changes the V (or I) output range and I (or V) compliance range during a V (or I) sweep. Figure 7-11 shows an example of the difference in SMU output when power compliance is set and when power compliance is not set.
Measurement Units and Functions Measurement Ranging Mode Measurement Ranging Mode Before executing measurements, you select a ranging mode from the following four modes. You can set the ranging mode for each measurement unit. • “Auto Ranging” • “Limited Auto Ranging” • “Compliance Range” • “Fixed Range” The following table lists the allowable measurement ranging modes for each measurement mode.
Measurement Units and Functions Measurement Ranging Mode Auto Ranging The monitor unit automatically searches for and measures at the range that provides the highest resolution as follows: V measurement The unit changes ranges (up or down one range at a time) until the measurement value is between 10 % and 110 % of the range, then the unit performs the measurement.
Measurement Units and Functions Measurement Ranging Mode Limited Auto Ranging Limited auto ranging is similar to the auto ranging. But the limited auto ranging does not use the range(s) less than the range you specified. For example, if you select the 10 nA limited auto ranging, measurement unit does not use the 1 nA range or less. So the measurement time for limited auto ranging is less than for auto ranging.
Measurement Units and Functions Measurement Ranging Mode Compliance Range Compliance range is available for knob sweep measurement only. For details about setting compliance, refer to “Compliance” on page 7-23. V measurement The monitor unit measures at the lowest range that includes V compliance. For VMUs, compliance range is automatically set as follows. grounded mode 20 V differential mode 2V I measurement The monitor unit measures at the lowest range that includes I compliance.
Measurement Units and Functions Measurement Ranging Mode Enhanced Auto Ranging for Current Measurement Expanded functions are available for the auto ranging operation of the current measurement channels. To use the functions, set the AUTO RANGING MODE fields (MODE and RATE) on the SYSTEM: CONFIGURATION screen. This setting is effective for all of the current measurement SMU. MODE Auto range operation mode. 1, 2 or 3. See below. Initial setting is 1.
Measurement Units and Functions Measurement Time Measurement Time Measurement time depends on integration time, measurement range, and other measurement conditions, and can be expressed by the following formula: Measurement time = Integration time + Overhead time Integration time is the time required for measurement, and does not include range changing, data compensation, and so on which would be the overhead time.
Measurement Units and Functions Measurement Time MEDIUM Medium mode automatically sets the integration time. You cannot change this value. To set medium mode, press the Medium front-panel key. Integration time 1 PLC For the current measurements, the integration time is automatically set as shown in Table 7-23. SHORT Short mode is effective when you need high-speed measurements, but the measurement data has lower resolution. To set short mode, press the Short front-panel key.
Measurement Units and Functions Measurement Time Table 7-24 Integration Time in Short Mode (Integ time=0.96 to 1.
Measurement Units and Functions Measurement Time Overhead Time The overhead time is the time required for range changing and so on. This time depends on the measurement condition, and cannot be specified.
Measurement Units and Functions SMU Filter SMU Filter You can set SMU filter to on or off for sampling measurements or stress forcing. If filter is on, noise and overshoot are decreased, but settling time takes longer. • sampling measurement You set the FILTER field on the MEASURE: SAMPLING SETUP screen. If you set initial interval to a short time, and if filter is set to ON, be aware that settling time takes several ms. • stress force You set the FILTER field on the STRESS: STRESS SETUP screen.
Measurement Units and Functions Self-calibration Self-calibration Agilent 4155C/4156C provides the self-calibration function. To execute the self-calibration, do following: 1. Open the measurement terminals, or disconnect the device under test from the measurement terminals to perform the calibration properly. 2. Press System key in the PAGE CONTROL key group. 3. Select CALIB/DIAG primary softkey. The SYSTEM: SELF-CALIBRATION/DIAGNOSTICS screen is displayed. 4.
Measurement Units and Functions Zero Offset Cancel Zero Offset Cancel The 4155C/4156C has zero offset cancel function. This function allows you to minimize measurement error (offset) caused by resistance and leakage current of cables, prober, and so on. You can use the zero offset cancel function for: • low current measurement (measurement range ≤ 10 nA) by SMUs. • differential mode V measurement by VMUs. To Measure Offset Data To measure the offset data, do following: 1.
Measurement Units and Functions Zero Offset Cancel Table 7-25 Ranging Mode Available for Offset Measurement Measurement Mode Unit Current Measurement HPSMU, MPSMU Available Ranging Mode Measurement Range a auto 1 nA 1 nA limited or fixed 1 nA auto 10 pA 10 pA limited or fixed 10 pA 100 pA limited or fixed 100 pA 1 nA limited or fixed 1 nA auto, limited auto, fixed 0.2 V b HRSMU Differential Voltage Measurement VMU a. Offset data is measured in the measurement range shown above. b.
Measurement Units and Functions Zero Offset Cancel To Perform Offset Cancel Offset cancel is automatically performed during measurement. The measurement execution and the offset cancel are explained below: 1. Select the measurement range in the MEASUREMENT RANGE table on the MEASURE: MEASURE SETUP screen. See Table 7-25 for the ranging mode available. 10 nA limited auto and 10 nA fixed are also available.
Measurement Units and Functions QSCV Zero Offset Cancel QSCV Zero Offset Cancel This function is available for the quasi-static CV measurements. This function enables you to minimize measurement error (offset) caused by stray capacitance of cables, prober, and so on. To Measure Offset Data Measure the offset data, as follows: 1. Set the measurement conditions on the MEASURE: QSCV SETUP and MEASURE: QSCV MEASURE SETUP screen.
Measurement Units and Functions QSCV Zero Offset Cancel Table 7-27 Measurement Condition for the Offset Measurement Parameter for the offset measurement Internal setup (not the setup on the screen) Start voltage 0V Stop voltage Minimum value of the following values: • |setup value of the QSCV MEAS VOLTAGE field| × 2 • |setup value of the START field| • |setup value of the STOP field| or 5 V (if the all listed above is greater than 5 V) or 10 mV (if the all listed above is less than 10 mV) Hold t
Measurement Units and Functions QSCV Zero Offset Cancel To Perform Offset Cancel Set the ZERO CANCEL field to ON, and start the quasi-static CV measurement. The offset cancel is automatically performed while measurement is performed. The measurement data is automatically compensated by using the offset data. The compensated data is displayed on the GRAPH/LIST screen. To disable the function, select the OFF softkey in the ZERO CANCEL field.
Measurement Units and Functions Operation States Operation States The 4155C/4156C has the following four operation states. • “Idle State” • “Measurement State” • “Stress Force State” • “Standby State” Idle State In the idle state, the 4155C/4156C is not doing anything: no measurements, forcing current or voltage, forcing stress. An 4155C/4156C is in the idle state after applying power. In this state, output switches of all the measurement units are on, and all of the units output 0 V.
Measurement Units and Functions Operation States Stress Force State In the stress force state, the 4155C/4156C outputs stress. The output switches are off for units that do not have entries in the CHANNELS table of the STRESS: CHANNEL DEFINITION screen. Standby State In the standby state, the 4155C/4156C does not perform measurements or stress force, but it outputs dc bias and/or pulses using the measurement units defined as the standby channel.
Measurement Units and Functions Operation States • From measurement/stress states to standby state: If you perform measurements or force stress from the standby state, then the 4155C/4156C returns to the standby state after one of the following conditions occurs: Figure 7-12 • Measurement is finished. • Stress is finished. • Stop front-panel key is pressed. Changing among the Operation States 7-48 Agilent 4155C/4156C User’s Guide Vol.
Measurement Units and Functions Output Sequence Output Sequence When you perform measurements or force stress, or when you use the standby function, you can specify an output sequence for the source channels. The 4155C/4156C has two output sequence modes: • sequential mode The source channels output in the order that you specify in the OUTPUT SEQUENCE table on the MEASURE: OUTPUT SEQUENCE screen. The source outputs are stopped in the opposite order.
Measurement Units and Functions Output Sequence Sequential Mode Default output sequence in the sequential mode is shown below. In the default settings, output channels start the output in this order, and stop the output in the opposite order. 1. 2. 3. 4. 5. 6. 7. 8. SMU1 SMU2 SMU3 SMU4 VSU1 VSU2 PGU1 PGU2 Starting Outputs In the idle state, output switches of all units are on, and the units output 0 V. When moving to the measurement, stress force, or standby state, the units operate as shown below: 1.
Measurement Units and Functions Output Sequence Example Output sequence in the following conditions is shown in Figure 7-13. Figure 7-13 • Units available: SMU1 to SMU 4, VSU1 to VSU2. • Units disabled: SMU4 and VSU2. • Output sequence: No change from the default setting. Output Sequence Example for the Sequential Mode Agilent 4155C/4156C User’s Guide Vol.
Measurement Units and Functions Output Sequence Simultaneous Mode The simultaneous mode is available only for the sampling measurements. In this mode, all enabled units start the specified outputs at the same time, and stop the outputs in the opposite order of the OUTPUT SEQUENCE table. Default output sequence defined in the OUTPUT SEQUENCE table of the MEASURE: OUTPUT SEQUENCE screen is shown below. In the default settings, output channels stop the output in the opposite order of the following: 1. 2. 3.
Measurement Units and Functions Output Sequence Example Output sequence in the following conditions is shown in Figure 7-14. Figure 7-14 • Units available: SMU1 to SMU 4, VSU1 to VSU2. • Units disabled: SMU4 and VSU2. • Output sequence: No change from the default setting. Default Output Sequence Example for the Simultaneous Mode Agilent 4155C/4156C User’s Guide Vol.
Measurement Units and Functions Measurement Sequence Measurement Sequence The 4155C/4156C performs measurements for the variables or user functions set to the following entry fields on the DISPLAY: DISPLAY SETUP screen. Then measurements will be performed in the following order. For the user functions, measurements will be performed for the variables defined in the functions. 1. NAME for X axis of the GRAPHICS table 2. NAME for Y1 axis of the GRAPHICS table 3. NAME for Y2 axis of the GRAPHICS table 4.
8 Support Functions
Support Functions This chapter explains functions that can be used in measurements. Agilent 4155C/4156C Semiconductor Parameter Analyzer and Agilent 41501A/B Expander has the following useful measurement functions. • “User Function and User Variable” • “Standby Function” • “R-BOX Control” • “SMU/PG Selector Control” • “Switching Matrix Control” • “Trigger Function” 8-2 Agilent 4155C/4156C User’s Guide Vol.
Support Functions User Function and User Variable User Function and User Variable User function and user variable are kind of the 4155C/4156C internal data variable. The data variables are used for displaying and analyzing measurement results. You use data variables to assign output or measurement data to an axis for display. Each data variable has a name. You refer to a data variable by its name.
Support Functions User Function and User Variable You can get the measurement results by using the measurement result names. If the corresponding SMU or VMU does not perform a measurement, invalid data is returned. Output data of PGU The data variables for PGU output are as follows: Set data Data variable name pulse peak VNAME for PGU that you defined on CHANNELS: CHANNEL DEFINITION screen is the data variable name for pulse peak voltage. pulse period @PGT is the data variable for pulse period.
Support Functions User Function and User Variable User Function A user function consists of one or more data variables used in an expression. You define the user function name, expression, and unit on the CHANNELS: USER FUNCTION DEFINITION screen. You can use a user function inside another user function. And you can set up the user function on the DISPLAY: DISPLAY SETUP screen to plot the user function values or display the numeric value.
Support Functions User Function and User Variable User Variable A user variable is a data variable that is a numeric list, which is passed via GPIB commands of PAGE:CHANnels:UVARiable and TRACe|DATA subsystems from an external computer or the Internal IBASIC. For information about the PAGE:CHANnels:UVARiable and TRACe|DATA subsystems, refer to GPIB Command Reference. You can perform calculations between measurement results and the numeric list, or plot the numeric list on the GRAPH/LIST: GRAPHICS screen.
Support Functions User Function and User Variable Calculation between variables of different length If you perform calculation between user variables, or between a user variable and a measurement data variable, and the number of data are different, the extra data in the longer variable are invalid.
Support Functions User Function and User Variable Syntax of Data Variable Name A data variable name must start with alphabet character and can consist of maximum six alphanumeric characters. Refer to Figure 8-1. Figure 8-1 Syntax of Data Variable Name The name must be unique. Name is case sensitive. For example, Gm is different from GM. NOTE Using Built-in Function Name as Data Variable Name You can give a data variable name the same name as a built-in function.
Support Functions User Function and User Variable Expression An expression can be used for following: NOTE • In a user function definition • As a condition for an automatic analysis function • For direct keyboard calculation Direct Keyboard Calculation You can directly calculate the value of an expression as follows: • Enter the expression by using the front-panel keys, press the green key, then press Enter. The value of the expression is displayed.
Support Functions User Function and User Variable monadic operator Monadic operator performs operation on expression immediately to its right: − negative + positive dyadic operator Dyadic operator performs operation between two expressions: + addition - subtraction NOTE * multiplication / division ^ exponentiation Operation between data variables Operation between data variables is performed between data at the same measurement points.
Support Functions User Function and User Variable Figure 8-3 Numeric Constant scientific constant The following scientific constants are available: q electric charge. 1.60217710-19 k Boltzmann's constant. 1.38065810-23 e space permittivity. 8.85418810-12 data variable name Any data variable name. read out function keyword A keyword that invokes the 4155C/4156C’s built-in read out function. Refer to Chapter 9. built-in function keyword A keyword that invokes the 4155C/4156C’s built-in function.
Support Functions User Function and User Variable Arithmetic operator precedence When an expression contains more than one operation, the order of operation is determined by operator precedence. Operations with the highest precedence are performed first. Multiple operations with the same precedence are performed left to right. The following table shows the arithmetic operator precedence.
Support Functions Standby Function Standby Function The 4155C/4156C can force standby outputs before starting or after stopping a measurement or stress. You can select dc or pulse bias for the standby output. Standby Channels Standby channels are the measurement units which force the standby output. SMUs, VSUs, and PGUs can be used for the standby channel. VMUs and GNDU are not available.
Support Functions Standby Function Available Units and Output Values Following table shows the output value of the standby channels in the standby state. The specified values are the values that are set on the MEASURE setup screens. FCTN VAR1 VAR2 VAR1’ CONST Unit a MODE SMU VSU PGU V START START - I START - - VPULSE BASE - - IPULSE BASE - - V SOURCE SOURCE SOURCE I SOURCE - - VPULSE BASE - Specified pulses. b IPULSE BASE - - a.
Support Functions Standby Function Output Sequence of Standby Channels Output sequence of measurement units is defined on the MEASURE: OUTPUT SEQUENCE screen. Example output sequence setup is shown in the following table, and Figure 8-4 shows timing diagram of this example: Figure 8-4 Unit Output Sequence STBY SMU1 1 ON SMU3 2 OFF SMU4 3 OFF PGU1 4 ON PGU2 5 ON SMU2 6 ON Example of the Output Sequence of the Standby Channels Agilent 4155C/4156C User’s Guide Vol.
Support Functions Standby Function When Getting Setup File Usually, the 4155C/4156C is in the idle state after getting setups from a file or an internal memory.
Support Functions Standby Function To Use Standby Function 1. Press Chan key in the PAGE CONTROL key group. 2. Select CHANNEL DEF primary softkey. 3. In the STBY column of the desired unit, select STANDBY ON secondary softkey. 4. Press Standby key in the MEASUREMENT key group. The indicator above the Standby key shows whether the Standby function is enabled.
Support Functions R-BOX Control R-BOX Control Agilent 16441A R-Box must be used for applications which need to connect a series resistor between SMU and DUT. For example, the R-Box is effective for the DUT protection. If sudden voltage change occurs at DUT, excessive current flows to the DUT, and it may damage the DUT without the R-Box. In other case, you may want to measure negative resistance characteristics. This application needs series resistor because SMUs cannot measure negative resistance.
Support Functions R-BOX Control Non-Kelvin Connections The following figure shows the 16441A R-Box connections using non-Kelvin connections. Kelvin Connections The following figure shows the 16441A R-Box connections using Kelvin connections. Only 0 ohm is available for the Kelvin connection. Agilent 4155C/4156C User’s Guide Vol.
Support Functions R-BOX Control Setups You set resistance values in the SERIES RESISTANCE column on the CHANNELS: CHANNEL DEFINITION screen.
Support Functions R-BOX Control Circuit Diagram Figure 8-5 shows a simplified circuit diagram of an 16441A R-Box. Table 8-1 shows switching conditions for each setting. Table 8-1 Switching Conditions of the 16441A R-Box Switches Settings SW1 SW2 SW3 SW4 0Ω ON ON OFF OFF 10 kΩ OFF OFF OFF ON 100 kΩ OFF OFF ON OFF 1 MΩ OFF OFF OFF OFF Resistance is switched before and after measurement state. In the standby state, the stress state, and the idle state, 0 Ω is connected.
Support Functions R-BOX Control Figure 8-5 Simplified Circuit Diagram of the 16441A R-Box 8-22 Agilent 4155C/4156C User’s Guide Vol.
Support Functions R-BOX Control To Use R-Box 1. Connect the 16441A R-Box to the 4155C/4156C and to the 16442A/B Test Fixture or connector plate on your shield box. 2. Press Chan front-panel key of the PAGE CONTROL key group. 3. Select CHANNEL DEF primary softkey to display the CHANNELS: CHANNEL DEFINITION screen. 4. In the SERIES RESISTANCE fields, select: • 0 ohm secondary softkey to connect 0 Ω resistance. • 10k ohm secondary softkey to connect 10 kΩ resistance.
Support Functions R-BOX Control To measure negative resistance characteristics The 16441A R-Box allows SMUs to measure current-controlled negative resistance ( 1 MΩ) characteristics. Connect the resistance of the 16441A as shown in following figure. 16441A R-Box R SMU 8-24 DUT Agilent 4155C/4156C User’s Guide Vol.
Support Functions SMU/PG Selector Control SMU/PG Selector Control The 4155C/4156C can control the 16440A SMU/Pulse Generator Selector to automatically switch units that are connected to a DUT pin. You set up this automatic control using the SMU/PG SELECTOR field on the STRESS: CHANNEL DEFINITION screen. For example, you can specify to connect the PGU to the DUT during stress, and connect the SMU to the DUT during measurement.
Support Functions SMU/PG Selector Control Setup and Switching Conditions Setup of the SMU/PG SELECTOR field and switching conditions are explained below: CH1 (or CH3 for second selector): Setup SW1 SW2 SW3 Description SMU ON OFF OFF Connects SMU. PGU OFF ON ON Connects PGU. PGU OPEN OFF ON OFF Open. Disconnected. OPEN OFF OFF OFF Open. Disconnected. CH2 (or CH4 for second selector): Setup NOTE SW1 SW2 Description SMU ON OFF Connects SMU. PGU OFF ON Connects PGU.
Support Functions SMU/PG Selector Control To Use Selector 1. Press Stress key in the PAGE CONTROL key group. 2. Select CHANNEL DEF primary softkey. 3. In the MEASURE field of the SMU/PG SELECTOR area, select one of the following softkeys. This field sets the switching status of selector in the measurement state.
Support Functions SMU/PG Selector Control Example Following shows an example setup that connects two SMUs to DUT during measurement state, and connects two PGUs to DUT during stress force state. 8-28 Agilent 4155C/4156C User’s Guide Vol.
Support Functions Switching Matrix Control Switching Matrix Control The 4155C/4156C can control the Agilent E5250A Low Leakage Switch Mainframe installed with the E5252A matrix card. This section describes how to control the E5250A. • “Requirements” • “To Control Functions” • “To Control Connections” • “To Use Matrix Setup File” Requirements Prepare the instruments and cables listed in Table 8-2 and provide the following environment.
Support Functions Switching Matrix Control 7. Turn the instruments on. 8. Set the 4155C/4156C to SYSTEM CONTROLLER, as shown below: Press the System front panel key and the MISCELLANEOUS softkey, then select the CONTROLLER softkey in the 4155C is or 4156C is field on the SYSTEM: MISCELLANEOUS screen.
Support Functions Switching Matrix Control Table 8-3 Connecting E5250A Connectors on E5250A Rear Panel SMU INPUT 1 SMU INPUT 2 Connect to 4155C/4156C SMU connector or 41501 HPSMU/MPSMU connector Entry field name and default setup on the E5250A PROPERTIES screen INPUT1, SMU1 INPUT2, SMU2 SMU INPUT 3 INPUT3, SMU3 SMU INPUT 4 INPUT4, SMU4 SMU INPUT 5 INPUT5, SMU5 SMU INPUT 6 INPUT6, SMU6 AUX INPUT 7 AUX INPUT 8 4155C/4156C VSU/VMU connector, 41501 PGU connector, or other instruments INPUT7, VS
Support Functions Switching Matrix Control To Control Functions To control the E5250A functions, use the CHANNELS: E5250A PROPERTIES screen. Press the Chan front panel key, then select the E5250A PROP primary softkey. The E5250A PROPERTIES screen appears.
Support Functions Switching Matrix Control Step 3. To initialize the E5250A In the CONFIG MODE field, select the RESET E5250A softkey. All the E5250A settings will be initialized. Step 4. To select configuration mode In the CONFIG MODE field, select the E5250A configuration mode, either AUTO or NORMAL, using the softkey. Note that changing the mode initializes the E5250A setup except for the configuration mode. AUTO Sets auto configuration mode. In this mode, the installed cards are treated as one card.
Support Functions Switching Matrix Control Step 6. To set bias port (if you use the bias port function) In the BIAS PORT field, enter the port number of the E5250A input port to be used as the bias port. Available values are 1 to 10. Default value is 10. NOTE Connection after input bias port changed Changing the input port number of the bias port will disconnect the output bias ports from the previous input bias port and connect them to the new input bias port. Step 7.
Support Functions Switching Matrix Control Step 8. To select connection rule In the CONN RULE field, select the connection rule, either SROU or FREE, using the softkey. CAUTION SROU Sets the single route connection rule. Each input port can be connected to only one output port on a matrix card. FREE Sets the free connection rule. Each input port can be connected to multiple output ports and each output port can be connected to multiple input ports.
Support Functions Switching Matrix Control Step 10. To define E5250A input connection In the E250A INPUT CONNECTION fields, enter the unit name, device terminal name, or any identifications. The definitions are used to classify the E5250A input ports on the E5250A CONNECTION SETUP screen. If you define the unit name, use the softkeys. For the default settings, see Table 8-3. NOTE Value of INPUTn The INPUTn fields are labels used to classify the E5250A input ports.
Support Functions Switching Matrix Control To Control Connections To control the matrix connections, select the E5250A SETUP softkey. The 4155C/4156C sends a query for the present setup of the E5250A, and displays it on the E5250A CONNECTION SETUP screen. CHANNELS: E5250A CONNECTION SETUP 01JAN20 04:13PM ARRAY *SETUP DISPLAY MODE ARRAY *MATRIX CONNECTION STATUS INPUT PORT 111 111111122222 123456789012 345678901234 X........... ............ SMU1 .X.......... ............ SMU2 ..X......... ............
Support Functions Switching Matrix Control Step 3. To change the enable input ports (for ARRAY display mode, optional) INPUT 1 to INPUT 4 are always enabled. INPUT 5 to INPUT 10 are selectable. You can select one from INPUT 5, 7, and 9 and you can also select one from INPUT 6, 8, and 10. To change the enable input port, move the pointer on the field of the input port that you are going to enable, then select the ENABLE PORT softkey.
Support Functions Switching Matrix Control Step 5. To define the matrix connection (for ARRAY display mode) Repeat the following steps until the connection setup definition is completed. To apply the definition to the E5250A, select the APPLY SETUP softkey. 1. Move the pointer to the point whose status you want to change. 2. Select the CLOSE softkey to define the close status. “X” will be displayed at this point. Select the OPEN softkey to define the open status. “.” will be displayed at this point.
Support Functions Switching Matrix Control Step 6. To define the matrix connection (for LIST display mode) Enter the output port numbers to be connected. Use a comma to specify multiple numbers. Use a hyphen for a continuous range of numbers. For example, 1, 6 specifies the output ports 1 and 6, and 1-12 specifies output ports 1 through 12. To apply the setup to the E5250A, select the APPLY SETUP softkey.
Support Functions Switching Matrix Control Step 7. To apply the connection information to the E5250A Select the APPLY SETUP softkey to apply the setup to the E5250A. Step 8. To apply the open to all connections to the E5250A Select the APPLY OPEN ALL softkey to apply the open to all connections on the E5250A. The setup on the screen will be also changed to open all connections. Step 9.
Support Functions Trigger Function Trigger Function Trigger function is used to perform measurements synchronized with the measurements or source outputs by external instruments. Connection The following figure shows the connection between an 4155C/4156C and an external instrument. 8-42 Agilent 4155C/4156C User’s Guide Vol.
Support Functions Trigger Function Setup and restrictions • You cannot perform trigger outputs together with trigger inputs. You must select either trigger output or trigger input. • To use a trigger function, you must enable the trigger function and select either TRIG OUT or TRIG IN in the TRIGGER SETUP table on the MEASURE: OUTPUT SEQUENCE screen.
Support Functions Trigger Function Trigger Input The 4155C/4156C can receive an edge trigger (TTL level, pulse width approximately 10 μs) from external instruments via the trigger input terminal, and initiate a sweep or sampling measurement. Following figure shows examples of externally-triggered sampling and sweep measurements. For the trigger polarity, you can select positive or negative.
Support Functions Trigger Function Trigger Output The 4155C/4156C triggers external instruments via the trigger output terminal. For the trigger polarity, you can select positive or negative. The trigger output function is not available for sampling measurements. Gate Trigger Output The 4155C/4156C can output gate triggers when forcing stress. When stress forcing starts, the trigger signal changes to the active level. When stress forcing finishes, the trigger signal changes to the non-active level.
Support Functions Trigger Function Trigger output delay time for pulsed sweep measurements. When using an SMU as a pulse source, the 4155C/4156C can output edge triggers at each pulse leading edge. Trigger output delay time (TRIG OUT DELAY) specifies how much to delay the trigger after the leading edge. So, you set the trigger output delay time to wait until the 4155C/4156C outputs a stable pulse peak value.
Support Functions Trigger Function Step delay time for staircase sweep measurements. When performing sweep measurements without a pulsed SMU, the 4155C/4156C outputs an edge trigger at the time when the 4155C/4156C starts performing measurement in each sweep step as shown in the following figure. The step delay time you specify for trigger is the time from when the trigger is output to when the next step occurs. This is to make sure the external instrument has enough time to make the measurement.
Support Functions Trigger Function Trigger output function of PGU Using the Agilent 41501A/B contains PGUs, the 4155C/4156C can output a gate trigger through the 41501A/B Ext Pulse Generator Trig Out terminal. The trigger signal is synchronized with the PGU output pulses, and you cannot control trigger timing. The polarity of the trigger is positive and the output level is TTL. The following figure shows the trigger signal.
9 Built-in Functions
Built-in Functions This chapter explains the following functions built in the Agilent 4155C/4156C, that are used for calculating or reading the measurement setup data and the measurement result data: • “Built-in Function” • “Read Out Function” 9-2 Agilent 4155C/4156C User’s Guide Vol.
Built-in Functions Built-in Function You can use built-in functions for the following: • In the expression that is used to define a user function on the CHANNELS: USER FUNCTION DEFINITION screen. • As the condition for an automatic analysis function on the DISPLAY: ANALYSIS SETUP screen. • For direct keyboard calculations.
Built-in Functions ABS ABS Returns the absolute value of the expression. Syntax ABS(expression) Example To return the absolute value of ID: ABS(ID) AT Returns the value of 1st expression at the index number specified by the 2nd expression. Syntax AT(1st expression,2nd expression) If 2nd expression is not integer, linear interpolated value of 1st expression will be returned.
Built-in Functions COND COND This function does the following: Syntax • If 1st expression < 2nd expression, returns 3rd expression. • If 1st expression ≥ 2nd expression, returns 4th expression. COND(1st expression,2nd expression,3rd expression,4th expression) If value of 1st expression or a 2nd expression is invalid, the value for the previous measurement index number is used for the comparison. Example COND(ID-VG,SQRT(ID)-VG,VD,VGS-VTH) returns: • VD if ID-VG < SQRT(ID)-VG.
Built-in Functions DELTA DELTA Returns the difference of the expression. Syntax DELTA(expression) The difference is defined as follows: δn = (a2 − a1) δn = (an+1 − an−1)/2 δn = (aN − aN−1) when n = 1 when 1 < n < N when n = N Where, δn: an: value of an expression for measurement index number n. N: number of sweep steps or number of samples. difference for measurement index number n.
Built-in Functions DIFF DIFF Returns differential coefficient of 1st expression by 2nd expression. Syntax DIFF(1st expression,2nd expression) The differential coefficient is defined as follows: y’n = (y2 − y1)/(x2 − x1) y’n = (yn+1 − yn−1)/(xn+1 − xn−1) y’n = (yN − yN−1)/(xN − xN−1) when n = 1 when 1 < n < N when n = N Where, y’n: yn: xn: value of 1st expression for measurement index number n. N: number of sweep steps or number of samples. differential coefficient for measurement index number n.
Built-in Functions EXP EXP Raises e to the power of expression. Syntax EXP(expression) Example To raise e to the power of the ID: EXP(ID) INTEG Performs numerical integration of the 1st expression by the 2nd expression.
Built-in Functions LGT LGT Returns the logarithm (base 10) of expression. Syntax LGT(expression) If the expression is: Example 0 -Overflow is returned with status of "Arithmetic error". negative value logarithm of absolute value is returned with status of "Arithmetic error". To return the logarithm of ID: LGT(ID) LOG Returns the logarithm (base e) of expression. Syntax LOG(expression) If the expression is: Example 0 -Overflow is returned with status of "Arithmetic error".
Built-in Functions MAVG MAVG Returns the moving average value of 1st expression. The 2nd expression specifies how many measurement points to use for average.
Built-in Functions MAX MAX Returns the maximum sweep or sampling value. Syntax MAX(expression) For subordinate sweep measurement, this function returns the maximum value of the primary sweep for the secondary sweep step. If there are invalid values in expression, invalid values are ignored. Example To return the maximum value of ID: MAX(ID) MIN Returns the minimum sweep or sampling value.
Built-in Functions Read Out Function The read out functions are built-in functions for reading various values related to the maker, cursor, or line. You can use these functions to perform complex analysis of the measurement results. You can use read out functions for the following: • In the expression that is used to define a user function on the CHANNELS: USER FUNCTION DEFINITION screen. • As a condition for an automatic analysis function on the DISPLAY: ANALYSIS SETUP screen.
Built-in Functions @CX @CX Returns the value of X coordinate at the active cursor position. Syntax: @CX @CY Returns the value of Y coordinate at the active cursor position. Syntax: @CY If there are Y1 and Y2 axes, this function returns the value for selected axis. @CY1 Returns the value of Y1 coordinate at the active cursor position. Syntax: @CY1 @CY2 Returns the value of Y2 coordinate at the active cursor position. Syntax: @CY2 Agilent 4155C/4156C User’s Guide Vol.
Built-in Functions @IX @IX Returns the value of X coordinate at the cross point of LINE1 and LINE2. Syntax: @IX This function calculates the cross point by using the following formula: x =(y2-y1)/(α2-α1) Where, x: Value of X coordinate at the cross point. If the X axis is logarithmic scale, this function returns 10x. yn : Y-intercept value of LINEn. If the Y axis is logarithmic scale, yn is the log value of the y intercept of LINEn. αn : Slope of LINEn.
Built-in Functions @IY1 @IY1 Returns the value of Y1 coordinate at the cross point of LINE1 and LINE2. Syntax: @IY1 This function calculates the cross point by using the following formula: y1= y1+α1 ×(y2-y1)/(α1-α2) Where, y1 : Value of Y1 coordinate at the cross point. If the Y1 axis is logarithmic scale, this function returns 10y1. yn : Y1-intercept of LINEn. If the Y1 axis is logarithmic scale, yn is the log value of the Y1 intercept of LINEn. αn : Slope of LINEn.
Built-in Functions @L1CO @L1CO Returns the correlation coefficient of the regression for LINE1. Syntax: @L1CO LINE1 must be in regression mode. If not, this function returns invalid data. @L1G Returns the slope of LINE1. Syntax: @L1G If there are Y1 and Y2 axes, this function returns the value for selected axis.
Built-in Functions @L1G1 @L1G1 Returns the slope of LINE1 for Y1 axis.
Built-in Functions @L1G2 @L1G2 Returns the slope of LINE1 for Y2 axis.
Built-in Functions @L1X @L1X Returns the X intercept value (Y=0) of LINE1. Syntax: @L1X If LINE1 is horizontal, this function returns invalid data. @L1Y Returns the Y intercept value (X=0) of LINE1. Syntax: @L1Y If there are Y1 and Y2 axes, this function returns the value for selected axis. If LINE1 is vertical, this function returns invalid data. @L1Y1 Returns the Y1 intercept value (X=0) of LINE1. Syntax: @L1Y1 If LINE1 is vertical, this function returns invalid data.
Built-in Functions @L2G @L2G Returns the slope of LINE2. Syntax: @L2G If there are Y1 and Y2 axes, this function returns the value for selected axis.
Built-in Functions @L2G1 @L2G1 Returns the slope of LINE2 for Y1 axis.
Built-in Functions @L2G2 @L2G2 Returns the slope of LINE2 for Y2 axis.
Built-in Functions @L2X @L2X Returns the X intercept value (Y=0) of LINE2. Syntax: @L2X If LINE2 is horizontal, this function returns invalid data. @L2Y Returns the Y intercept value (X=0) of LINE2. Syntax: @L2Y If there are Y1 and Y2 axes, this function returns the value for selected axis. If LINE2 is vertical, this function returns invalid data. @L2Y1 Returns the Y1 intercept value (X=0) of LINE2. Syntax: @L2Y1 If LINE2 is vertical, this function returns invalid data.
Built-in Functions @MX @MX Returns the value of the X coordinate at the marker location. Syntax: @MX @MY Returns the value of the Y coordinate at the marker location. Syntax: @MY If there are Y1 and Y2 axes, this function returns the value for selected axis. @MY1 Returns the value of the Y1 coordinate at the marker location. Syntax: @MY1 @MY2 Returns the value of the Y2 coordinate at the marker location. Syntax: 9-24 @MY2 Agilent 4155C/4156C User’s Guide Vol.
10 Connecting Measurement Devices
Connecting Measurement Devices This section describes how to connect device under test (DUT) to the 16442A/B test fixture, and how to connect cables to the connector plate. For connecting the test fixture or the connector plate to the 4155C/4156C, see User's Guide General Information. If you use a wafer prober, see wafer prober manuals. Note that you must set the 4155C/4156C to the idle state when connecting or disconnecting DUTs. If not, the DUTs may be damaged.
Connecting Measurement Devices Using Test Fixture Using Test Fixture 1. Press the Stop front-panel key to set your 4155C/4156C to idle state. If the standby indicator is lit, press the Standby front-panel key. 2. Select a proper socket module for your DUT, then set the module on the test fixture. 3. Mount your DUT on the socket module. 4. Connect between the socket module and the test fixture by using the proper test leads. 5. Close the lid of the test fixture.
Connecting Measurement Devices Using Test Fixture Connections for High Current Measurements When you force or measure a large current, you may want to use a Kelvin (4-wire) connection to eliminate the residual resistance effects of test leads and contacts. For example, you can use the following connections as Kelvin connections on the test fixture. The Kelvin connection is available for the 4156C’s HRSMU and 41501A/B’s HPSMU.
Connecting Measurement Devices Using Connector Plate Using Connector Plate This section provides the information useful for connecting cables and probing needles to a connector plate. • “To Reduce Leakage Current” • “To Measure Low Resistance” To Reduce Leakage Current To reduce the leakage current caused by connection cables, the guard technique is effective. Connect the probing needles to the terminals of the connector plate by using coaxial cables as shown below: 1.
Connecting Measurement Devices Using Connector Plate Example The following example connection can be used to reduce the leakage current. Extend the outer conductor as close as possible to the probing needle. This also reduces the induced noise. Guarding Guarding reduces the leakage current between the measurement points and instrument. This is important when you measure low current. The following figure shows the theory of guarding.
Connecting Measurement Devices Using Connector Plate To Measure Low Resistance When you measure a low resistance, high current flows through the DUT. This high current increases the measurement error caused by the residual resistance of cables. To cancel the effect of this resistance, you can use Kelvin connections (4-wire), which means the force and sense lines are extended separately to the DUT. The Kelvin connection is available for the 4156C’s HRSMU and the 41501A/B’s HPSMU.
Connecting Measurement Devices Using Connector Plate Kelvin Connection Kelvin connections give good measurement results when you force high-current. The following figure shows the equivalent circuits for Kelvin and non-Kelvin connections. • For the non-Kelvin connection, the voltmeter measures the voltage drop of resistances rF1, RDUT, and rF2. • For the Kelvin connection, the voltmeter measures the voltage drop of resistance RDUT only.
