Technical data

Module 8
Capacitance Measurement
8-15
CMU
SMU CMU Unify Unit
(SCUU)
SCUU cable
SMU
SMU
Force1 or CMUH
Force2 or CMUL
Sense1
Sense2
SCUU Connection Example – SCUU Cable
To install the SCUU near the manipulators/positioners, use the N1301A-102 SCUU cable.
To realize accurate capacitance measurement, use the N1301A-200/201/202 GSWU & cable. See
the next section.