Quick Start Guide Agilent 4155B Semiconductor Parameter Analyzer Agilent 4156B Precision Semiconductor Parameter Analyzer Agilent Part No.
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Printing History Edition 1: August 1997 Edition 2: January 2000 4 Agilent 4155B/4156B Quick Start Guide, Edition 2
In This Guide Book This guide book is a quick start guide for Agilent 4155B and Agilent 4156B. It introduces basic measurement and analysis without a lot of explanation and details. This guide consists of the following three chapters: • Overview: briefly introduces the 4155B/4156B, also provides solutions to problems you may encounter while using this guide • Making a measurement: preparing for measurements and measuring a sample device (MOS FET).
Finding Further Information This guide book is written for the 4155B/4156B beginners. See the following books for further information: • User's Guide General Information provides general information of the 4155B/4156B. • User's Guide Measurement and Analysis provides information on how to use the 4155B/4156B for performing measurements and analysis. • Programmer's Guide provides information on how to control the 4155B/4156B with remote commands.
1 Overview Agilent 4155B/4156B Quick Start Guide, Edition 2
Overview Agilent 4155B Semiconductor Parameter Analyzer and Agilent 4156B Precision Semiconductor Parameter Analyzer are fully, automatic, high performance instruments designed to measure, display graphically, and analyze the dc parameters and characteristics of semiconductor devices such as diodes, transistors, ICs, solar cells, and wafers during the fabrication process. You can evaluate device design, process design, production line, and so on by using the 4155B/4156B.
Overview Agilent 4155B/4156B At a Glance Agilent 4155B/4156B At a Glance LINE switch For applying power. Flexible disk drive For inserting a 3.5-inch diskette, which can be used for mass storage. Keyboard interface For connecting keyboard. So, you can control the 4155B/4156B from keyboard as well as from the front-panel keys. Primary softkeys For changing display screen and secondary softkey menu. Secondary softkeys For selecting variable names and alternatives, and changing items.
Overview Agilent 4155B/4156B At a Glance Agilent 4155B Agilent 4156B SMU terminals Terminals through which voltage and current are forced and measured by SMUs. Intlk interface Terminal through which signals for interlock function pass. The interlock function is for preventing electric shock.
Overview If You Have a Problem If You Have a Problem This section describes how to solve the following unexpected problems: • If the 4155B/4156B cannot be powered on • If display screen does not appear after applying power • If the 16442A test fixture is not stable If the 4155B/4156B cannot be powered on • Check that the power cable is firmly connected to the 4155B/4156B and to power outlet. • Check that the front-panel LINE switch is on. • Check that the voltage selector switch is set properly.
Overview If You Have a Problem If display screen does not appear after applying power • If Agilent 41501 SMU/Pulse Generator Expander is installed, first turn on the 41501, then turn on the 4155B/4156B. • If the self-test fails, see "If You Have a Problem" in the 4155B/4156B User's Guide General Information. If the 16442A test fixture is not stable • Install stabilizers on the 16442A. For this procedure, see "Installation" in the 4155B/4156B User's Guide General Information.
2 Making a Measurement Agilent 4155B/4156B Quick Start Guide, Edition 2
Making a Measurement In this chapter, you learn how to execute the measurements with an 4155B/4156B and to display the measurement results graphically. Id-Vg measurement of a MOS FET is provided as an example. You learn step-by-step how to perform this measurement.
Making a Measurement You measure the device under test (DUT) by using the measurement circuit as shown in the following diagram. SMU2 and SMU3 sweep the same voltage to the gate and drain. SMU3 measures the drain current (Id). The source and substrate are connected to circuit common. You should get result similar to the following figure. Gate voltage Vg (swept from 0 V to 2 V) is assigned to X axis, ÖId is assigned to Y1 axis, and ¶ÖId / ¶Vg is assigned to Y2 axis.
Making a Measurement Step 1. Prepare for the measurement Step 1. Prepare for the measurement Before executing measurement, configure the 4155B/4156B and accessories. 1. Make sure that the 4155B/4156B is off. 2. Connect the 16442A test fixture to the 4155B/4156B. See next figure. 3. If you use the keyboard, connect it to the 4155B/4156B. 4.
Making a Measurement Step 1. Prepare for the measurement If you use the 4155B, connect as shown below: 16442A Triaxial Cables Coaxial Cables Interlock/LED Cable 4155B 4155B cable 16442A Intlk Interlock/LED a Intlk SMU 1 Triaxial b SMU 2 Triaxial b SMU 3 Triaxial b SMU 4 Triaxial b SMU 1 (blue label) SMU 2 (blue label) SMU 3 (blue label) SMU 4 (blue label) 4155B cable 16442A VSU 1 Coaxial c VSU 1 VSU 2 Coaxial c VSU 2 VMU 1 Coaxial c VMU 1 VMU 2 Coaxial c VMU 2 a.
Making a Measurement Step 2. Mount your DUT on the test fixture Step 2. Mount your DUT on the test fixture 1. Select a suitable socket module for your DUT. 2. Mount the socket module on the test fixture. 3. Mount your DUT on the socket module. 4. Make connections with four connection cables (miniature banana to pin plug). You make the following connections: • Source to SMU1 • Gate to SMU2 • Drain to SMU3 • Substrate to SMU1 Both the source and substrate terminals are connected to SMU1. 5.
Making a Measurement Step 2. Mount your DUT on the test fixture Wiring for the 4156B For this measurement, non-Kelvin connections are used.
Making a Measurement Step 3. Define the channel assignments Step 3. Define the channel assignments You set the connection information on the CHANNELS: CHANNEL DEFINITION screen. 1. Turn on the 4155B/4156B. Self-test starts. 2. After self-test is finished, make sure that CHANNELS: CHANNEL DEFINITION screen appears on the screen of the 4155B/4156B. If not, press Chan front-panel key.
Making a Measurement Step 3. Define the channel assignments Action on Front Panel on Keyboard To move the pointer, use arrow keys of MARKER/CURSOR area. use arrow keys To move the cursor to edit in display area, use arrow keys of Edit area. use Backspace key. To enter "VS" in VNAME field, press . (period) and + keys, then Enter. type VS, then press Enter. To enter "IS" in INAME field, press * and + keys, then Enter. type IS, then press Enter.
Making a Measurement Step 4. Define the user functions Step 4. Define the user functions You define the user functions on the CHANNELS: USER FUNCTION DEFINITION screen. 1. Select USER FCTN primary softkey. The CHANNELS: USER FUNCTION DEFINITION screen appears. 2. Enter the user function information as shown in the following table: Action on Front Panel on Keyboard To move the pointer, use arrow keys of MARKER/CURSOR area. use arrow keys.
Making a Measurement Step 4. Define the user functions The above screen defines the following two user functions: SQID = ÖId DSQID = ¶SQID / ¶Vg = ¶ÖId / ¶Vg Where, Id is drain current and Vg is gate voltage.
Making a Measurement Step 5. Set up the measurement parameters Step 5. Set up the measurement parameters You set the output parameters on the MEASURE: SWEEP SETUP screen. 1. Press Meas front-panel key. The MEASURE: SWEEP SETUP screen appears. In the screen, the upper left area defines the VAR1 information, and the upper right area defines the VAR1’ information. 2.
Making a Measurement Step 5. Set up the measurement parameters Drain voltage sweeps from 0 V to 2 V with 10 mV step. The current compliance is set to 100 mA. Action on Front Panel on Keyboard To move the pointer, use arrow keys of MARKER/CURSOR area. use arrow keys. To set "SINGLE" in SWEEP MODE field, select SINGLE secondary softkey. press Shift-F1 keys. To set "LINEAR" in LIN/LOG field, select LINEAR secondary softkey. press Shift-F1 keys. To enter "2.
Making a Measurement Step 6. Set up the results display Step 6. Set up the results display You set the results display information on the DISPLAY: DISPLAY SETUP screen. 1. Press Display front-panel key. The DISPLAY: DISPLAY SETUP screen appears. 2. Make sure GRAPHICS is displayed in the DISPLAY MODE field. If not, select GRAPHIC secondary softkey in the DISPLAY MODE field.
Making a Measurement Step 6. Set up the results display 3. Set the X-, Y1-, and Y2-axes information as shown below: Action on Front Panel on Keyboard To enter "VG" in NAME field, select VG secondary softkey. press Shift-F3 keys. To set "LINEAR" in SCALE field, select LINEAR secondary softkey. press Shift-F1 keys. To enter "0.00000 V" in MIN field, press 0, then Enter. type 0, then press Enter. To enter "2.00000 V" in MAX field, press 2, then Enter. type 2, then press Enter.
Making a Measurement Step 7. Execute the measurement Step 7. Execute the measurement Press Single front-panel key to execute the measurement.
3 Analyzing the Results Agilent 4155B/4156B Quick Start Guide, Edition 2
Analyzing the Results In the previous chapter, you measured the drain current (Id) while performing a synchronous sweep of the gate voltage (Vg) and drain voltage (Vd). And the measurement results were drawn graphically on the screen. In this chapter, you analyze the measurement results on the graph and search threshold voltage (Vth) of the DUT. The basic algorithm to search for the threshold voltage is: 1. Assign gate voltage (Vg) to X-axis, ÖId to Y1-axis, and ¶ÖId / ¶Vg to Y2-axis. 2.
Analyzing the Results 1. Make sure that MARKER/CURSOR primary softkey is highlighted. If not, select the MARKER/CURSOR primary softkey. 2. Select MARKER secondary softkey so that ON appears on the softkey. The MARKER softkey is highlighted, and the markers appears on the measurement curve.
Analyzing the Results 3. Select AXIS primary softkey so that Y2 appears on the softkey. The Y2 axis is highlighted. 4. Select MARKER MIN/MAX secondary softkey until the * marker moves to the maximum point on the Y2 curve. The o marker (on Y1 curve) also moves to same X-axis point, which is maximum gradient of Y1 curve.
Analyzing the Results 5. Select AXIS primary softkey so that Y1 appears on the softkey. The Y1 axis is highlighted. 6. Select LINE primary softkey. The secondary softkey menu changes.
Analyzing the Results 7. Select LINE secondary softkey so that ON appears on the softkey. The LINE softkey is highlighted, and a vertical line appears in the center of the plotting area. 8. Select TANGENT MODE secondary softkey. The line becomes tangent to the o marker of the Y1 curve. Read the X-axis intercept value of the tangent line. This is the threshold voltage (Vth). In the example above, Vth is 935 mV.
