Technical data

Agilent B1500A Configuration and Connection Guide, Edition 5 3- 19
Connection Guide for Wafer Prober
WGFMU and RSU
3.5 WGFMU and RSU
This section covers the instructions to make connection between WGFMU and RF/DC
probes. Before starting the instructions, complete the installation of the B1500A installed
with the WGFMU. See Agilent B1500 manual.
NOTE About WGFMU module installation
Module installation of WGFMU must be performed by Agilent Technologies service
personnel. Contact Agilent Technologies for the module installation.
NOTE RSU has SMA terminal which is coaxial connection. In this connection, ultra low current
measurement can not be performed.
3.5.1 Connecting RSU
Prepare the required accessories and connect cables between RSU and WGFMU or SMU.
See
Figure 3-19 for a connection example. This example connects two RSUs.
Figure 3-19 RSU Connection Example
Required accessories:
• WGFMU-to-RSU cable (D-sub), 1ea. per one RSU
1.5 m, 3 m, or 5 m cable (furnished with WGFMU module. If another length is
required, order 16493R-006, 003 or 004)
The 16493R-801 adapter is required and mounted on a shielding box to make
connection to the RSU in the shielding box. Then the 60 cm and 2.4 m cables
(16493R-001 and 005) are required instead of the 1.5m, 3 m, or 5 m cable.
• Sync connection cable (furnished with WGFMU module), 1 ea. between two
WGFMUs
MPSMU
Triaxial cable
Semse
Force
B1500A
MPSMU
Sense
Force
WGFMU
Channel 2
Channel 1
SMU 2
WGFMU 2
Output 2
WGFMU cable
SMU 1
WGFMU 1
Output 1
Triaxial cable
WGFMU cable
DUT
G
D
Subs
S
RSU
RSU
SMA
SMA