User`s guide

58 Agilent 1100 Series Valves
6 Specifications
Volume in flow passages: Stator (20° ports)27.2 nl, (45° ports) 30.5 nl, rotor seal 25.0
nl/groove
Maximum pressure: 41 MPa (408 bar, 6000 psi)
Recommended flow range: 0.1 - 100
µl
Tabl e 30 G1163A 1100 Series 2 position/ 10 port micro valve (continued)