15 Appendix A
4. Linearity
4.1 Linear Test Specifications
Direction X: <1.5 %
Direction Y: <1.5 %
4.2 Linearity Test
Apply voltage (DC5V) to upper (or lower ) electrodes, output
voltage Vx or Vy on the other electrodes is measured at every
regular intervals.
Linearity is the value of max. error voltage
