Technical Data Sheet No. TD9305M Rev.
TABLE OF CONTENTS 1. UNPACKING THE AFM/AFC MASS FLOW METER.....................1 1.1 Inspect Package for External Damage.........................................1 1 1.2 Unpack the Mass Flow Meter/Controller....................................... 1.3 Returning Merchandise for Repair...............................................1 2. INSTALLATION............................................................ 2 2.1 Primary Gas Connections............................................................2 2.
7.3 Linearity Adjustment...................................................................... 17 7.3.1 Connections and Initial Warm Up........................................... 17 7.3.2 ZERO Adjustment.................................................................18 7.3.3 25% Flow Adjustment............................................................. 18 7.3.4 50% Flow Adjustment............................................................ 18 7.3.5 75% Flow Adjustment.....................................
1. UNPACKING THE AFM/AFC MASS FLOW METER 1.1 Inspect Package for External Damage Your AFM/AFC Mass Flow Meter/Controller was carefully packed in a sturdy cardboard carton, with anti-static cushioning materials to withstand shipping shock. Upon receipt, inspect the package for possible external damage. In case of external damage to the package contact the shipping company immediately. 1.
2. INSTALLATION 2.1 Primary Gas Connections Please note that the AFM/AFC Mass Flow Meter/Controller will not operate with liquids. Only clean gases are allowed to be introduced into the instrument. If gases are contaminated they must be filtered to prevent the introduction of impediments into the sensor. CAUTION: It is the users responsibility to determine if the instrument is appropriate for their OXYGEN application, and for specifying O2 cleaning service if required.
FIGURE 2-1, WIRING DIAGRAM FOR AFM/AFC TRANSDUCERS PIN FUNCTION 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Chassis Ground Common, Signal Ground For Pin 3 0-5 VDC Flow Signal +15 VDC Power Supply (-) 4-20 mA Flow Signal (optional) +7 VDC for Local Set Point (unassigned) TTL Valve Off Control (AFC) Control Set Point Input 0 5 VDC (AFC) Common, Signal Ground for Pin 9 Common, Power Supply Valve Test Point/Purge (AFC) (unassigned) -15 VDC Power Supply (+) 4-20 mA Flow Signal (optional) FIGURE 2-3, AFM/AFC 15 PIN "
Important Notes: In general, "D" Connector numbering patterns are standardized. There are, however, some connectors with nonconforming patterns and the numbering sequence on your mating connector may or may not coincide with the numbering sequence shown in our pin configuration table above. It is imperative that you match the appropriate wires in accordance with the correct sequence regardless of the particular numbers displayed on your mating connector.
4. SPECIFICATIONS FLOW MEDIUM: Please note that AFM26/36/46 Mass Flow Meters and AFC26/36/46 Mass Flow Controllers are designed to work with clean gases only. Never try to meter or control flow rates of liquids with any AFM's or AFC's. CALIBRATIONS: Performed at standard conditions [14.7 psia (1.01 bars) and 70FF (21.1 FC)] unless otherwise requested or stated. ENVIRONMENTAL (per IEC 664): Installation Level II; Pollution Degree II. 4.
WETTED MATERIALS: 316 stainless steel, VITON7 O-rings; BUNA-N7, EPR or KALREZ7 O-rings are optional. Aalborg7 makes no expressed or implied guarantees of corrosion resistance of mass flow meters as pertains to different flow media reacting with components of meters. It is the customers' sole responsibility to select the model suitable for a particular gas based on the fluid contacting (wetted) materials offered in the different models.
OUTPUT SIGNALS: Linear 0-5 VDC (2000 Ω minimum load impedance); 4-20 mA optional (50-500 Ω loop resistance); 20 mV peak to peak max noise. Contact your distributor or Aalborg7 for optional RS232 or IEEE488 interfaces. COMMAND SIGNAL: 0-5 VDC (200K Ω input impedance). TRANSDUCER INPUT POWER: AFC 26: (10 sLit/min max) +15 +5% VDC, 80 mA max, 1.2 watts max; -15 +5% VDC, 200 mA max; 3 watts max; AFC 36: (50 sLit/min max) +15 +5% VDC, 80 mA max, 1.2 watts max; -15 +5% VDC, 600 mA max, 9 watts max.
FLOW RANGES TABLE I AFM 26 AND AFC 26 LOW FLOW MASS FLOW METER/CONTROLLERS* CODE scc/min [N2] CODE std liters/min [N2] 01 0 to 10 07 0 to 1 02 0 to 20 08 0 to 2 03 0 to 50 09 0 to 5 04 0 to 100 10 0 to 10 05 0 to 200 06 0 to 500 TABLE II AFM 36 AND AFC 36 MEDIUM FLOW MASS FLOW METER/CONTROLLERS* CODE standard liters/min [N2] 11 0 to 15 30 20 31 30 32 40 33 50 TABLE III AFM 46 AND AFC 46 HIGH FLOW MASS FLOW METER/CONTROLLERS* * CODE standard liters/min [N2] 40 60 41
TABLE IV PRESSURE DROPS AFM MODEL MAXIMUM PRESSURE DROP FLOW RATE [std liters/min] [mm H2O] [psid] [mbar] up to 10 25 0.04 2.5 15 63 0.09 6.4 20 300 0.44 30 30 800 1.18 81 40 1480 2.18 150 50 2200 3.23 223 60 3100 4.56 314 100 5500 8.08 557 AFM 26 AFM 36 AFM 46 TABLE IV PRESSURE DROPS AFC MODEL FLOW RATE [std liters/min] AFC 26 MAXIMUM PRESSURE DROP [mm H2O] [psid] [mbar] up to 10 720 1.06 75 15 2630 3.87 266 20 1360 2.00 138 30 2380 3.
5. OPERATING INSTRUCTIONS 5.1 Preparation and Warm Up It is assumed that the Mass Flow Meter or Controller has been correctly installed and thoroughly leak tested as described in section 2. Make sure the flow source is OFF. Power up the transducer using your own power supply (or turn the POWER switch to the ON position at the front panel of your SDPROC Command Module). Allow the Mass Flow Meter or Controller to warm-up for a minimum of 15 minutes.
5.3 Swamping Condition If a flow of more than 10% above the maximum flow rate of the Mass Flow Meter is taking place, a condition known as "swamping" may occur. Readings of a "swamped" meter cannot be assumed to be either accurate or linear. Flow must be restored to below 110% of maximum meter range. Once flow rates are lowered to within calibrated range, the swamping condition will end. Operation of the meter above 110% of maximum calibrated flow may increase recovery time. 5.
It is recommended that a potentiometer between 5K to 100K ohm and capable of at least 10-turns or more for adjustment be used. Use the control potentiometer to command the percentage of flow desired. Alternatively, a variable 0 to 5VDC analog signal may be applied directly to the SET POINT and COMMON connections of the AFC transducer (see Figure 2-1). 5.
6. MAINTENANCE 6.1 Introduction It is important that the Mass Flow Meter/Controller is used with clean, filtered gases only. Liquids may not be metered. Since the RTD sensor consists, in part, of a small capillary stainless steel tube, it is prone to occlusion due to impediments or gas crystallization. Other flow passages are also easily obstructed. Therefore, great care must be exercised to avoid the introduction of any potential flow impediment.
screen will now become visible. Push the screen out through the inlet fitting. Clean or replace each of the removed parts as necessary. If alcohol is used for cleaning, allow time for drying. Inspect the flow path inside the transducer for any visible signs of contaminant's. If necessary, flush the flow path through with alcohol. Thoroughly dry the flow paths by flowing clean dry gas through. Carefully re-install the RFE and inlet fitting, avoiding any twisting and deforming the RFE.
remove the plastic cap on top of the valve, and turn the set screw counterclockwise until it stops. See section 7.4 for valve adjustment, to return the valve to functional use.] 7. 7.1 CALIBRATION PROCEDURES NOTE: Removal of the factory installed calibration seals and/or any adjustments made to the meter, as described in this section, will void any calibration warranty applicable.
FIGURE 7-1, CALIBRATION POTENTIOMETER LOCATIONS 7.2 Calibration of AFM Mass Flow Meters All adjustments in this section are made from the outside of the meter, there is no need to disassemble any part of the instrument. AFM Mass Flow Meters may be field recalibrated/checked for the same range they were originally factory calibrated for. When linearity adjustment is needed, or flow range changes are being made proceed to step 7.3. Flow range changes may require a different Restrictor Flow Element (RFE).
7.2.2 ZERO Adjustment Shut off the flow of gas into the Mass Flow Meter. To ensure that no seepage or leak occurs into the meter, it is good practice to temporarily disconnect the gas source. Using the multimeter and the insulated screwdriver, adjust the ZERO potentiometer [R29] through the access window for 0 VDC (or 4 mA respectively) at zero flow. 7.2.3 SPAN Adjustment Reconnect the gas source. Using the flow regulator, adjust the flow rate to 100% of full scale flow.
7.3.2 ZERO Adjustment Shut off the flow of gas into the Mass Flow Meter. To ensure that no seepage or leak occurs into the meter, it is good practice to temporarily disconnect the gas source. Using the multimeter and the insulated screwdriver, adjust the ZERO potentiometer [R29] through the access window for 0 VDC (or 4 mA respectively) at zero flow. 7.3.3 25% Flow Adjustment Reconnect the gas source. Using the flow regulator, adjust the flow rate to 25% of full scale flow.
the transducer. The unit will now act as a mass flow meter. CAUTION: If the valve is left in the AUTO (control) or OPEN mode for an extended period of time, it may become warm or even hot to the touch. Use care in avoiding direct contact with the valve during operation. Follow steps outlined in section 7.2 and 7.3, then continue with step 7.4.2 below. 7.4.2 Valve Adjustment Discontinue the PURGE mode (set valve for the closed position).
TABLE VI AFC SOLENOID VALVE ORIFICE SELECTION TABLE ORIFICE PART NUMBER FLOW RATE [N2] OR.010 under 10 sccm OR.020 10 to 1000 sccm OR.040 1 to 5 slpm OR.055 5 to 10 slpm OR.063 10 to 15 slpm OR.073 15 to 20 slpm OR.094 20 to 50 slpm OR.125 50 to 100 slpm 8. TROUBLESHOOTING 8.1 Common Conditions Your Mass Flow Meter/Controller was thoroughly checked at numerous quality control points during and after manufacturing and assembly operations.
8.
INDICATION LIKELY REASON REMEDY unstable or no zero reading gas leak locate and correct pc board defective return to factory for replacement full scale output at "no flow" defective sensor condition or gas Leak with valve closed calibration off return to factory for replacement locate and repair gas metered is not the same as use matched calibration what meter was calibrated for composition of gas changed see K factor tables in APPENDIX 2 gas leak locate and correct pc board defective return
For best results it is recommended that instruments are returned to the factory for servicing. See section 1.3 for return procedures. 8.3 Technical Assistance Aalborg7 Instruments will provide technical assistance over the phone to qualified repair personnel. Please call our Technical Assistance at (845) 770-3000. Please have your Serial Number and Model Number ready when you call. 9. CALIBRATION CONVERSIONS FROM REFERENCE GASES The calibration conversion incorporates the K factor.
APPENDIX 1 COMPONENTS DIAGRAMS AFC CONTROL PC BOARD AFM METERING PC BOARD (ALSO INCORPORATED IN AFC) 24
APPENDIX 2 GAS FACTOR TABLE (“K” FACTORS) CAUTION: K-Factors at best are only an approximation. K factors should not be used in applications that require accuracy better than +/- 5 to 10%. ACTUAL GAS K FACTOR Relative to N2 Cp [Cal/g] Density [g/I] .5829 1.0000 .4346 .7310 1.4573 1.205 .6735 .4089 .5082 .8083 .38 .26 .3855 .3697 .3224 .2631 .2994 .324 .291 .7382 .658 .4036 .240 .352 .492 .1244 .1244 .1167 .1279 .1778 .0539 .0647 .1369 .1161 .1113 .3514 .4007 .3648 .336 .374 .2016 .2016 1.162 1.
ACTUAL GAS K FACTOR Relative to N2 Cp [Cal/g] Density [g/I] 1.00 .4357 .1947 .3538 .4252 .2522 .4044 .2235 .4271 .3714 .3896 .2170 .50 .3918 .3225 .3891 .60 .5191 .9784 .4967 .3287 .3538 .3834 .3697 .4210 .4252 .4589 .2031 .2240 .2418 .1760 .5696 .2668 1.454 2.43 2.05 .2421 .1792 1.0106 1.35 1.9 1.722 .508 .15 .1432 .140 .1882 .150 .1604 .224 .366 .3414 .3914 .420 .3395 .3513 .244 .365 .268 .1873 .176 .1357 .1432 .153 .1113 .1654 .140 .1544 .161 .160 .164 .185 .1404 .1071 1.241 1.241 1.241 .1834 .
ACTUAL GAS K FACTOR Relative to N2 Cp [Cal/g] Density [g/I] 1.000 1.000 .764 .9998 .9987 .7893 .80 .2492 .27 .2951 1.453 .7175 .75 .0861 .1912 .3171 .3479 .0545 .1025 .2397 .1108 .3872 .3701 .0593 .5328 .5328 3.610 1.627 1.206 .893 5.707 3.613 1.520 9.90 3.593 2.503 3.739 .715 .715 .5843 .4313 .5835 .6299 .68 .5180 .2499 .2126 .3512 .51 1.46 .990 1.000 .737 .4802 .6134 .7128 .176 .9926 .6337 .446 .2554 .2134 .3950 .174 .4438 .759 .3274 .3547 .1106 .1926 .3221 .2459 .164 .1373 .387 .4343 .246 .2328 .
ACTUAL GAS K FACTOR Relative to N2 Cp [Cal/g] Density [g/I] .36 .3021 .30 .35 .40 .5982 .284 .3482 .69 .2635 .3883 .5096 .3237 .3287 .3278 .1324 .1610 .1250 .399 .366 .3189 .1270 .1691 .1488 .1592 .1543 .127 .182 .1357 .1380 6.843 5.620 6.127 1.967 1.877 1.433 7.580 4.643 2.858 6.516 4.562 4.224 4.64 6.129 6.043 .2031 .161 8.
APPENDIX 3 DIMENSIONAL DRAWINGS AFM 26 MASS FLOW METER NOTES: Aalborg7 reserves the right to change designs and dimensions at its sole discretion at any time without notice. For certified dimensions please contact Aalborg7.
AFM 36/46 MASS FLOW METER NOTES: Aalborg7 reserves the right to change designs and dimensions at its sole discretion at any time without notice. For certified dimensions please contact Aalborg7.
AFC 26 MASS FLOW CONTROLLER NOTES: Aalborg7 reserves the right to change designs and dimensions at its sole discretion at any time without notice. For certified dimensions please contact Aalborg7.
AFC 36/46 MASS FLOW CONTROLLER NOTES: Aalborg7 reserves the right to change designs and dimensions at its sole discretion at any time without notice. For certified dimensions please contact Aalborg7.
APPENDIX 4 WARRANTY Aalborg7 Mass Flow Systems are warranted against parts and workmanship for a period of one year from the date of purchase. Calibrations are warranted for up to six months after date of purchase, provided calibration seals have not been tampered with. It is assumed that equipment selected by the customer is constructed of materials compatible with gases used. Proper selection is the responsibility of the customer.
